Oil Rotary Vacuum Pump

VD Series

VD

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VD series is a Double stage rotary vane type direct-driven oil rotary vacuum pump equipped
withULVAC's original multi-voltage motor.
This dual stage rotary vane mechanical vacuum achieves lower ultimate pressure.
Design optimization and wide option realized quiet operation and so this pump is
suitable for a wide range of applications.

Features

  • Multiple voltage motor fully developed by ULVAC
    A single motor can cover a wide range voltage, 200 to 240V / 380 to 460V.
  • Forced oil circulation system
    Pumping speed is stable even around atmospheric pressure. It is suitable for repeat and continuous running between atmospheric pressure and vacuum.
  • Various options are available for special application
    In addition to the standard model, we also offer models for special applications.

Specification Model Main Independent oil
filling (oiler)
He Leak Test
Standard VD30C, VD40C, VD60C, VD90C Fluorine Rubber n/a n/a
Spec. A VD30C-A, VD40C-A Nitrile Rubber n/a n/a
Spec. B VD30C-B, VD40C-B Silicon Rubber - n/a
Spec. H VD30C-H, VD40C-H, VD60C-H, VD90C-H Fluorine Rubber - -

Applications

  • Evaporation, sputtering, and ion plating
  • Analytical instrument and leak test system
  • Gas exchange, liquid filling
  • Vacuum dry, freeze dry, vacuum deaeration, and vacuum insulation
  • Vacuum chuck and vacuum molding
  • Other vacuum equipments

Specifications

Model VD30C VD40C VD60C VD90C
Designed pumping
speed
50Hz 30 m3/h/
(500 L/min)
40 m3/h/
(670 L/min)
60 m3/h/
(1000 L/min)
90 m3/h/
(1500 L/min)
60Hz 36 m3/h/
(600 L/min)
48 m3/h/
(800 L/min)
72 m3/h/
(1200 L/min)
108 m3/h/
(1800 L/min)
Ultimate pressure *1 GP Close ≦ 0.67 Pa
GP Open ≦ 6.7 Pa
Maximum water
vapor
tolerance
GP Open 50Hz 1300 Pa 1360 Pa 1320 Pa 970 Pa
60Hz 1400 Pa 1760 Pa 2800 Pa 2820Pa *2
Maximum water
vapor
capacity
GP Open 50Hz 190 g/h 270 g/h 430 g/h 480 g/h
60Hz 250 g/h 410 g/h 1100 g/h 1650 g/h *2
Motor *3 Type of motor Totally enclosed fan cooled 3 phase induction motor
Energy efficiency
class
IE3
Power 1.5 kW(4 poles) 1.5 kW(4 poles) 2.2 kW(4 poles) 3.7 kW(4 poles)
Voltage 50Hz 200 ~ 240 /380 ~ 415 V
60Hz 200 ~ 240 /380 ~ 460 V
Oil ULVOIL R-72
Oil capacity 1.0 ~ 2.5 L 2.5 ~ 4.0 L
Cooling method Air cooled
Inlet port connection JIS B 2290
( ISO KF )
VG40 equivalency / KF40 ( optional ) VG50 equivalency / KF50 ( optional )
Outlet port connection JIS B 2290
( ISO KF )
VG40 equivalency / KF40 ( optional )
External dimension WxDxH 210×660×
324mm
210×680×
324mm
280×761×
371mm
280×831×
371mm
Weight 58kg 60kg 90kg 113kg
Applicable standard CE
Standard accessory A dose of oil
Recommended oil mist trap
( Optional ) *4
TM201: for low load operation TM401: for low load operation
TM401: for high load operation TM-2: for high load operation
Option Oil mist trap, other oil types, gas ballast valve, ISO flange, explosion-resistant motor, special type for special application ( spec A, B and H )

Note) This specification uses SI measurement units. Conversion to non-SI units is as follows :
   6.7 Pa = 5 × 10-2 Torr
*1 Measured with a Pirani gauge.
  ( Apprx. 6.7 x 10-2 Pa when measured with a McLeod vacuum gauge. )
*2 VD90C is not allowed the continuous operation in the inlet pressure at 1,000 Pa or
   more and the maximum water vapor tolerance / maximum water vapor capacity
  (in the continuous operation)is 1,000 (Pa) / 600 (g/h).
*3 Factory shipment setup is 200V class Δ delta connection.
   Please change it to Y connection if working voltage is 400V class.
*4 High load operation means repeat pumping down between atmospheric pressure and
   vacuum in short term or long time operation at 10,000 Pa (75 Torr ) or higher.

Model
VD151 VD201
Designed pumping speed 50Hz 14.4 m3/h/
(240 L/min)
20.2 m3/h/
(336 L/min)
60Hz 17.3 m3/h/
(288 L/min)
24.2 m3/h/
(403 L/min)
Ultimate pressure *1 GP Close ≦ 0.67 Pa
GP Open ≦ 6.7 Pa
Maximum water vapor tolerance GP Open  500 Pa 1300 Pa
Maximum water vapor capacity GP Open  40 g/h 138 g/h
Motor Type of motor Totally enclosed fan cooled 3 phase
induction motor
Energy efficiency class IE2 *3 IE3
Power 0.55 kW( 4 poles) 0.7 kW(4 poles)
Voltage 50Hz 200 ~ 240 / 380 ~ 415 V
60Hz 200 ~ 240 / 380 ~ 460 V
Oil ULVOIL R-72
Oil capacity 0.7 ~ 1.1
Cooling method Air cooled
Inlet port connection KF25 equivalency
Outlet port connection G1
External dimension WxDxH 170×514×240 mm 170×536×265 mm
Weight 29 kg 34 kg
Applicable standard CE / cTUVus
Standard accessory A dose of oil
Recommended oil mist trap ( Optional ) *5 TMX-1 + adapter flange

Option

Oil mist trap

Note)This specification uses SI measurement units. Conversion to non-SI units is as follows :
   6.7 Pa = 5 × 10-2Torr
*1  Measured with a Pirani gauge. ( Apprx. 6.7 x 10-2 Pa when measured with a McLeod vacuum gauge. )
*2  Factory shipment setup is 200V class Δ delta connection. Please change it to Y connection if
   working voltage is 400V class.
*3  The energy efficiency regulation is not applicable for this motor.

Pumping Speed Curves

  • VD30C,VD40CVD30C,VD40C_curve.png
  • VD60C,VD90CVD60C,VD90C_curve.png
  • VD151,VD201DV151,VD201_curve.png

Dimension drawing

  • VD30C,VD40C,VD60C,VD90CVD30C,40C,60C,90C_en_size.png
  • VD151,VD201VD151,201_en_size.png

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