Oil Rotary Vacuum Pump
VD Series
VD
アルバック
withULVAC's original multi-voltage motor.
This dual stage rotary vane mechanical vacuum achieves lower ultimate pressure.
Design optimization and wide option realized quiet operation and so this pump is
suitable for a wide range of applications.
Features
- Multiple voltage motor fully developed by ULVAC
A single motor can cover a wide range voltage, 200 to 240V / 380 to 460V. - Forced oil circulation system
Pumping speed is stable even around atmospheric pressure. It is suitable for repeat and continuous running between atmospheric pressure and vacuum. - Various options are available for special application
In addition to the standard model, we also offer models for special applications.
| Specification | Model | Main | Independent oil filling (oiler) |
He Leak Test |
| Standard | VD30C, VD40C, VD60C, VD90C | Fluorine Rubber | n/a | n/a |
| Spec. A | VD30C-A, VD40C-A | Nitrile Rubber | n/a | n/a |
| Spec. B | VD30C-B, VD40C-B | Silicon Rubber | - | n/a |
| Spec. H | VD30C-H, VD40C-H, VD60C-H, VD90C-H | Fluorine Rubber | - | - |
Applications
- Evaporation, sputtering, and ion plating
- Analytical instrument and leak test system
- Gas exchange, liquid filling
- Vacuum dry, freeze dry, vacuum deaeration, and vacuum insulation
- Vacuum chuck and vacuum molding
- Other vacuum equipments
Specifications
| Model | VD30C | VD40C | VD60C | VD90C | ||
| Designed pumping speed |
50Hz | 30 m3/h/ (500 L/min) |
40 m3/h/ (670 L/min) |
60 m3/h/ (1000 L/min) |
90 m3/h/ (1500 L/min) |
|
| 60Hz | 36 m3/h/ (600 L/min) |
48 m3/h/ (800 L/min) |
72 m3/h/ (1200 L/min) |
108 m3/h/ (1800 L/min) |
||
| Ultimate pressure *1 | GP Close | ≦ 0.67 Pa | ||||
| GP Open | ≦ 6.7 Pa | |||||
| Maximum water vapor tolerance |
GP Open | 50Hz | 1300 Pa | 1360 Pa | 1320 Pa | 970 Pa |
| 60Hz | 1400 Pa | 1760 Pa | 2800 Pa | 2820Pa *2 | ||
| Maximum water vapor capacity |
GP Open | 50Hz | 190 g/h | 270 g/h | 430 g/h | 480 g/h |
| 60Hz | 250 g/h | 410 g/h | 1100 g/h | 1650 g/h *2 | ||
| Motor *3 | Type of motor | Totally enclosed fan cooled 3 phase induction motor | ||||
| Energy efficiency class |
IE3 | |||||
| Power | 1.5 kW(4 poles) | 1.5 kW(4 poles) | 2.2 kW(4 poles) | 3.7 kW(4 poles) | ||
| Voltage | 50Hz | 200 ～ 240 /380 ～ 415 V | ||||
| 60Hz | 200 ～ 240 /380 ～ 460 V | |||||
| Oil | ULVOIL R-72 | |||||
| Oil capacity | 1.0 ～ 2.5 L | 2.5 ～ 4.0 L | ||||
| Cooling method | Air cooled | |||||
| Inlet port connection JIS B 2290 ( ISO KF ) |
VG40 equivalency / KF40 ( optional ) | VG50 equivalency / KF50 ( optional ) | ||||
| Outlet port connection JIS B 2290 ( ISO KF ) |
VG40 equivalency / KF40 ( optional ) | |||||
| External dimension WxDxH | 210×660× 324mm |
210×680× 324mm |
280×761× 371mm |
280×831× 371mm |
||
| Weight | 58kg | 60kg | 90kg | 113kg | ||
| Applicable standard | CE | |||||
| Standard accessory | A dose of oil | |||||
| Recommended oil mist trap ( Optional ) *4 |
TM201: for low load operation | TM401: for low load operation | ||||
| TM401: for high load operation | TM-2: for high load operation | |||||
| Option | Oil mist trap, other oil types, gas ballast valve, ISO flange, explosion-resistant motor, special type for special application ( spec A, B and H ) | |||||
Note) This specification uses SI measurement units. Conversion to non-SI units is as follows :
6.7 Pa = 5 × 10-2 Torr
*1 Measured with a Pirani gauge.
( Apprx. 6.7 x 10-2 Pa when measured with a McLeod vacuum gauge. )
*2 VD90C is not allowed the continuous operation in the inlet pressure at 1,000 Pa or
more and the maximum water vapor tolerance / maximum water vapor capacity
(in the continuous operation)is 1,000 (Pa) / 600 (g/h).
*3 Factory shipment setup is 200V class Δ delta connection.
Please change it to Y connection if working voltage is 400V class.
*4 High load operation means repeat pumping down between atmospheric pressure and
vacuum in short term or long time operation at 10,000 Pa (75 Torr ) or higher.
|
Model
|
VD151 | VD201 | |||
| Designed pumping speed | 50Hz | 14.4 m3/h/ (240 L/min) |
20.2 m3/h/ (336 L/min) |
||
| 60Hz | 17.3 m3/h/ (288 L/min) |
24.2 m3/h/ (403 L/min) |
|||
| Ultimate pressure *1 | GP Close | ≦ 0.67 Pa | |||
| GP Open | ≦ 6.7 Pa | ||||
| Maximum water vapor tolerance | GP Open | 500 Pa | 1300 Pa | ||
| Maximum water vapor capacity | GP Open | 40 g/h | 138 g/h | ||
| Motor | Type of motor | Totally enclosed fan cooled 3 phase
induction motor
|
|||
| Energy efficiency class | IE2 *3 | IE3 | |||
| Power | 0.55 kW( 4 poles) | 0.7 kW(4 poles) | |||
| Voltage | 50Hz | 200 ～ 240 / 380 ～ 415 V | |||
| 60Hz | 200 ～ 240 / 380 ～ 460 V | ||||
| Oil | ULVOIL R-72 | ||||
| Oil capacity | 0.7 ～ 1.1 | ||||
| Cooling method | Air cooled | ||||
| Inlet port connection | KF25 equivalency | ||||
| Outlet port connection | G1 | ||||
| External dimension WxDxH | 170×514×240 mm | 170×536×265 mm | |||
| Weight | 29 kg | 34 kg | |||
| Applicable standard | CE / cTUVus | ||||
| Standard accessory | A dose of oil | ||||
| Recommended oil mist trap ( Optional ) *5 | TMX-1 + adapter flange | ||||
|
Option |
Oil mist trap |
||||
Note)This specification uses SI measurement units. Conversion to non-SI units is as follows :
6.7 Pa = 5 × 10-2Torr
*1 Measured with a Pirani gauge. ( Apprx. 6.7 x 10-2 Pa when measured with a McLeod vacuum gauge. )
*2 Factory shipment setup is 200V class Δ delta connection. Please change it to Y connection if
working voltage is 400V class.
*3 The energy efficiency regulation is not applicable for this motor.
Pumping Speed Curves
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Dimension drawing
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