Oil Rotary Vacuum Pump

VD Series



VD series is a direct-drive oil rotary pump with high efficiency (IE3) multi-voltage motor fully developed by ULVAC. This dual stage rotary vane mechanical vacuum achieves lower ultimate pressure. Design optimization realized quiet operation and so this pump is suitable for a wide range of applications.


  • High efficiency (IE3) multiple voltage motor fully developed by ULVAC
    A single motor can cover a wide range voltage, 200 to 240V / 380 to 460V.
  • Forced oil circulation system
    Pumping speed is stable even around atmospheric pressure. It is suitable for repeat and continuous running between atmospheric pressure and vacuum.
  • Various options are available for special application
    3 types, type A, B and H, are available in addition to standard type for special application.


  • Evaporation, sputtering, and ion plating
  • Analytical instrument and leak test system
  • Gas exchange, liquid filling
  • Vacuum dry, freeze dry, vacuum deaeration, and vacuum insulation
  • Vacuum chuck and vacuum molding
  • Other vacuum equipments


Model VD151 VD201
Designed pumping speed m3/h /L/min /cfm 50Hz 14.4/240/8.47 20.2/336/11.89
60Hz 17.3/288/10.18 24.2/403/14.24
Ultimate pressure Pa/Torr/mbar *1 GP close 0.67/5×10-3/6.7×10-3
GP open 6.7/5×10-2/6.7×10-2
Maximum water vapor tolerance Pa/Torr/mbar GP open 500/3.8/5.0 1300/9.8/13.0
Maximum water vapor capacity g/h 40 138
Motor type Totally enclosed fan cooled 3 phase induction motor
Energy efficiency class IE1 *2 IE3
kw/HP(number of poles) 0.55(4) 0.75(4)
Voltage *3 50Hz 200~240 / 380~415
60Hz 200~240 / 380~460
Oil capacity L 0.7~1.1
Cooling method Air cooled
Inlet KF25 equivalency
Outlet G1
Weight kg 29 34
External dimensions W×D×H mm 170×514×240 170×536×265
Applicable standard CE
Standard accessory A dose of oil, a set of manual
Recommended oil mist trap (Optional) TMX-1 + adapter flange
Options Oil mist trap

*1 Measured with a Pirani gauge. (Apprx. 6.7X10-2Pa when measured with a McLeod vacuum gauge.)
*2 The energy efficiency regulation is not applicable for this motor.
*3 Factory shipment setup is 200V class Δ delta connection. Please change it to Y connection if working voltage is 400V class.

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