Oil Rotary Vacuum Pump
- High efficiency (IE3) multiple voltage motor fully developed by ULVAC
A single motor can cover a wide range voltage, 200 to 240V / 380 to 460V.
- Forced oil circulation system
Pumping speed is stable even around atmospheric pressure. It is suitable for repeat and continuous running between atmospheric pressure and vacuum.
- Various options are available for special application
3 types, type A, B and H, are available in addition to standard type for special application.
- Evaporation, sputtering, and ion plating
- Analytical instrument and leak test system
- Gas exchange, liquid filling
- Vacuum dry, freeze dry, vacuum deaeration, and vacuum insulation
- Vacuum chuck and vacuum molding
- Other vacuum equipments
|Designed pumping speed m3/h /L/min /cfm||50Hz||14.4/240/8.47||20.2/336/11.89|
|Ultimate pressure Pa/Torr/mbar *1||GP close||0.67/5×10-3/6.7×10-3|
|Maximum water vapor tolerance Pa/Torr/mbar||GP open||500/3.8/5.0||1300/9.8/13.0|
|Maximum water vapor capacity g/h||40||138|
|Motor||type||Totally enclosed fan cooled 3 phase induction motor|
|Energy efficiency class||IE1 *2||IE1|
|kw/HP(number of poles)||0.55(4)||0.7(4)|
|Voltage *3||50Hz||200～240 / 380～415|
|60Hz||200～240 / 380～460|
|Oil capacity L||0.7～1.1|
|Cooling method||Air cooled|
|External dimensions W×D×H mm||170×514×240||170×536×265|
|Standard accessory||A dose of oil, a set of manual|
|Recommended oil mist trap (Optional)||TMX-1 + adapter flange|
|Options||Oil mist trap|
*1 Measured with a Pirani gauge. (Apprx. 6.7X10-2Pa when measured with a McLeod vacuum gauge.)
*2 The energy efficiency regulation is not applicable for this motor.
*3 Factory shipment setup is 200V class Δ delta connection. Please change it to Y connection if working voltage is 400V class.
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