Oil Rotary Vacuum Pump
VD Series
VD201
アルバック
Features
- High efficiency (IE3) multiple voltage motor fully developed by ULVAC
A single motor can cover a wide range voltage, 200 to 240V / 380 to 460V. - Forced oil circulation system
Pumping speed is stable even around atmospheric pressure. It is suitable for repeat and continuous running between atmospheric pressure and vacuum. - Various options are available for special application
3 types, type A, B and H, are available in addition to standard type for special application.
Applications
- Evaporation, sputtering, and ion plating
- Analytical instrument and leak test system
- Gas exchange, liquid filling
- Vacuum dry, freeze dry, vacuum deaeration, and vacuum insulation
- Vacuum chuck and vacuum molding
- Other vacuum equipments
Specifications
Model | VD151 | VD201 | |||||||||
Designed pumping speed m3/h /L/min /cfm | 50Hz | 14.4/240/8.47 | 20.2/336/11.89 | ||||||||
60Hz | 17.3/288/10.18 | 24.2/403/14.24 | |||||||||
Ultimate pressure Pa/Torr/mbar *1 | GP close | 0.67/5×10-3/6.7×10-3 | |||||||||
GP open | 6.7/5×10-2/6.7×10-2 | ||||||||||
Maximum water vapor tolerance Pa/Torr/mbar | GP open | 500/3.8/5.0 | 1300/9.8/13.0 | ||||||||
Maximum water vapor capacity g/h | 40 | 138 | |||||||||
Motor | type | Totally enclosed fan cooled 3 phase induction motor | |||||||||
Energy efficiency class | IE1 *2 | IE1 | |||||||||
kw/HP(number of poles) | 0.55(4) | 0.7(4) | |||||||||
Voltage *3 | 50Hz | 200~240 / 380~415 | |||||||||
60Hz | 200~240 / 380~460 | ||||||||||
Oil | ULVOIL R-72 | ||||||||||
Oil capacity L | 0.7~1.1 | ||||||||||
Cooling method | Air cooled | ||||||||||
Inlet | KF25 equivalency | ||||||||||
Outlet | G1 | ||||||||||
Weight kg | 29 | 34 | |||||||||
External dimensions W×D×H mm | 170×514×240 | 170×536×265 | |||||||||
Applicable standard | CE | ||||||||||
Standard accessory | A dose of oil, a set of manual | ||||||||||
Recommended oil mist trap (Optional) | TMX-1 + adapter flange | ||||||||||
Options | Oil mist trap |
*1 Measured with a Pirani gauge. (Apprx. 6.7X10-2Pa when measured with a McLeod vacuum gauge.)
*2 The energy efficiency regulation is not applicable for this motor.
*3 Factory shipment setup is 200V class Δ delta connection. Please change it to Y connection if working voltage is 400V class.
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