VD201

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VD series is a direct-drive oil rotary pump with high efficiency (IE3) multi-voltage motor fully developed by ULVAC. This dual stage rotary vane mechanical vacuum achieves lower ultimate pressure. Design optimization realized quiet operation and so this pump is suitable for a wide range of applications.

Features

High efficiency (IE3) multiple voltage motor fully developed by ULVAC
A single motor can cover a wide range voltage, 200 to 240V / 380 to 460V.
Forced oil circulation system
Pumping speed is stable even around atmospheric pressure. It is suitable for repeat and continuous running between atmospheric pressure and vacuum.
Various options are available for special application
3 types, type A, B and H, are available in addition to standard type for special application.

Applications

Evaporation, sputtering, and ion plating
Analytical instrument and leak test system
Gas exchange, liquid filling
Vacuum dry, freeze dry, vacuum deaeration, and vacuum insulation
Vacuum chuck and vacuum molding
Other vacuum equipments

Specifications

Model			VD151	VD201
Designed pumping speed m³/h /L/min /cfm	50Hz		14.4/240/8.47	20.2/336/11.89
	60Hz		17.3/288/10.18	24.2/403/14.24
Ultimate pressure Pa/Torr/mbar *1	GP close		0.67/5×10^-3/6.7×10^-3
	GP open		6.7/5×10^-2/6.7×10^-2
Maximum water vapor tolerance Pa/Torr/mbar	GP open		500/3.8/5.0	1300/9.8/13.0
Maximum water vapor capacity g/h			40	138
Motor	type		Totally enclosed fan cooled 3 phase induction motor
	Energy efficiency class		IE1 *2	IE1
	kw/HP(number of poles)		0.55(4)	0.7(4)
	Voltage *3	50Hz	200～240 / 380～415
		60Hz	200～240 / 380～460
Oil			ULVOIL R-72
Oil capacity L			0.7～1.1
Cooling method			Air cooled
Inlet			KF25 equivalency
Outlet			G1
Weight kg			29	34
External dimensions W×D×H mm			170×514×240	170×536×265
Applicable standard			CE
Standard accessory			A dose of oil, a set of manual
Recommended oil mist trap (Optional)			TMX-1 + adapter flange
Options			Oil mist trap

*1 Measured with a Pirani gauge. (Apprx. 6.7X10^-2Pa when measured with a McLeod vacuum gauge.)
*2　The energy efficiency regulation is not applicable for this motor.
*3　Factory shipment setup is 200V class Δ delta connection. Please change it to Y connection if working voltage is 400V class.

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Specifications

Model			VD151	VD201
Designed pumping speed m³/h /L/min /cfm	50Hz		14.4/240/8.47	20.2/336/11.89
	60Hz		17.3/288/10.18	24.2/403/14.24
Ultimate pressure Pa/Torr/mbar *1	GP close		0.67/5×10^-3/6.7×10^-3
	GP open		6.7/5×10^-2/6.7×10^-2
Maximum water vapor tolerance Pa/Torr/mbar	GP open		500/3.8/5.0	1300/9.8/13.0
Maximum water vapor capacity g/h			40	138
Motor	type		Totally enclosed fan cooled 3 phase induction motor
	Energy efficiency class		IE1 *2	IE1
	kw/HP(number of poles)		0.55(4)	0.7(4)
	Voltage *3	50Hz	200～240 / 380～415
		60Hz	200～240 / 380～460
Oil			ULVOIL R-72
Oil capacity L			0.7～1.1
Cooling method			Air cooled
Inlet			KF25 equivalency
Outlet			G1
Weight kg			29	34
External dimensions W×D×H mm			170×514×240	170×536×265
Applicable standard			CE
Standard accessory			A dose of oil, a set of manual
Recommended oil mist trap (Optional)			TMX-1 + adapter flange
Options			Oil mist trap