Oil Rotary Vacuum Pump
- High efficiency (IE3) multiple voltage motor fully developed by ULVAC
A single motor can cover a wide range voltage, 200 to 240V / 380 to 460V.
- Forced oil circulation system
Pumping speed is stable even around atmospheric pressure. It is suitable for repeat and continuous running between atmospheric pressure and vacuum.
- Various options are available for special application
3 types, type A, B and H, are available in addition to standard type for special application.
- Evaporation, sputtering, and ion plating
- Analytical instrument and leak test system
- Gas exchange, liquid filling
- Vacuum dry, freeze dry, vacuum deaeration, and vacuum insulation
- Vacuum chuck and vacuum molding
- Other vacuum equipments
|Designed pumping speed
m3/h /L/min / cfm
|Ultimate pressure Pa/Torr/mbar *1||GP close||0.67/5×10-3/6.7×10-3|
|Maximum water vapor tolerance Pa/Torr/mbar||GP open||50
|Maximum water vapor capacity g/h||GP open||50
|Motor||Type||Totally enclosed fan cooled 3 phase induction motor|
|Energy efficiency class||IE3|
|kw/HP(number of poles)||1.5(4)||1.5(4)||2.2(4)||3.7(4)|
|200～240 / 380～415|
|200～240 / 380～460|
|Oil capacity L||1.0～2.5||2.5～4.0|
|Cooling method||Air cooled|
|Inlet||VG40 equivalency / KF40 (optional)||VG50 equivalency / KF50 (optional)|
|Outlet||VG40 equivalency / KF40 (optional)|
|External dimensions W×D×H mm||210×660×324||210×680×324||280×761×371||280×831×371|
|Standard accessory||A dose of oil, a set of manual|
|Recommended oil mist trap (Optional) *5||TM201: for low load operation
TM401: for high load operation
|TM401: for low load operation
TM-2: for high load operation
|Options||Oil mist trap, other oil types, gas ballast valve, ISO flange, explosion-resistant motor, special type for special application (spec A, B and H)|
*1 Measured with a Pirani gauge. (Apprx. 6.7X10-2Pa when measured with a McLeod vacuum gauge.)
*2 VD90C is not allowed the continuous operation in the inlet pressure at 1,000Pa or more. VD90C maximum water vapor tolerance / maximum water vapor capacity (in the continuous operation) : 1000Pa / 600g/h
*3 Increased safety explosion-resistant motor and pressure proof explosion-resistant motor are available as an option.
*4 Factory shipment setup is 200V class Δ delta connection. Please change it to Y connection if working voltage is 400V class.
*5 High load operation means repeat pumping down between atmospheric pressure and vacuum in short term or long time operation at 10,000 Pa (75 Torr) or higher.
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