VD60C

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VD series is a direct-drive oil rotary pump with high efficiency (IE3) multi-voltage motor fully developed by ULVAC. This dual stage rotary vane mechanical vacuum achieves lower ultimate pressure. Design optimization realized quiet operation and so this pump is suitable for a wide range of applications.

Features

High efficiency (IE3) multiple voltage motor fully developed by ULVAC
A single motor can cover a wide range voltage, 200 to 240V / 380 to 460V.
Forced oil circulation system
Pumping speed is stable even around atmospheric pressure. It is suitable for repeat and continuous running between atmospheric pressure and vacuum.
Various options are available for special application
3 types, type A, B and H, are available in addition to standard type for special application.

Applications

Evaporation, sputtering, and ion plating
Analytical instrument and leak test system
Gas exchange, liquid filling
Vacuum dry, freeze dry, vacuum deaeration, and vacuum insulation
Vacuum chuck and vacuum molding
Other vacuum equipments

Specifications

Model			VD30C	VD40C	VD60C	VD90C
Designed pumping speed m³/h /L/min / cfm		50 Hz	30/500/17.66	40/670/23.54	60/1000/35.31	90/1500/52.97
		60 Hz	36/600/21.29	48/800/28.25	72/1200/42.38	108/1800/63.57
Ultimate pressure Pa/Torr/mbar *1		GP close	0.67/5×10^-3/6.7×10^-3
		GP open	6.7/5×10^-2/6.7×10^-2
Maximum water vapor tolerance Pa/Torr/mbar	GP open	50 Hz	1300/9.8/13.0	1360/10.2/13.6	1320/9.9/13.2	970/7.3/9.7
		60 Hz	1400/10.5/14.0	1760/13.2/17.6	2800/21.0/28.0	2820 *2/21.2/28.2
Maximum water vapor capacity g/h	GP open	50 Hz	190	270	430	480
		60 Hz	250	410	1100	1650 *2
Motor	Type		Totally enclosed fan cooled 3 phase induction motor
	Energy efficiency class		IE3
	kw/HP(number of poles)		1.5(4)	1.5(4)	2.2(4)	3.7(4)
	Voltage *4	50 Hz	200～240 / 380～415
		60 Hz	200～240 / 380～460
Oil			ULVOIL R-7
Oil capacity L			1.0～2.5		2.5～4.0
Cooling method			Air cooled
Inlet			VG40 equivalency / KF40 (optional)		VG50 equivalency / KF50 (optional)
Outlet			VG40 equivalency / KF40 (optional)
Weight kg			58	60	90	113
External dimensions W×D×H mm			210×660×324	210×680×324	280×761×371	280×831×371
Applicable standard			CE
Standard accessory			A dose of oil, a set of manual
Recommended oil mist trap (Optional) *5			TM201: for low load operation TM401: for high load operation		TM401: for low load operation TM-2: for high load operation
Options			Oil mist trap, other oil types, gas ballast valve, ISO flange, explosion-resistant motor, special type for special application (spec A, B and H)

*1　Measured with a Pirani gauge. (Apprx. 6.7X10^-2Pa when measured with a McLeod vacuum gauge.)
*2　VD90C is not allowed the continuous operation in the inlet pressure at 1,000Pa or more. VD90C maximum water vapor tolerance / maximum water vapor capacity (in the continuous operation) : 1000Pa / 600g/h
*3　Increased safety explosion-resistant motor and pressure proof explosion-resistant motor are available as an option.
*4　Factory shipment setup is 200V class Δ delta connection. Please change it to Y connection if working voltage is 400V class.
*5 High load operation means repeat pumping down between atmospheric pressure and vacuum in short term or long time operation at 10,000 Pa (75 Torr) or higher.

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Specifications

Model			VD30C	VD40C	VD60C	VD90C
Designed pumping speed m³/h /L/min / cfm		50 Hz	30/500/17.66	40/670/23.54	60/1000/35.31	90/1500/52.97
		60 Hz	36/600/21.29	48/800/28.25	72/1200/42.38	108/1800/63.57
Ultimate pressure Pa/Torr/mbar *1		GP close	0.67/5×10^-3/6.7×10^-3
		GP open	6.7/5×10^-2/6.7×10^-2
Maximum water vapor tolerance Pa/Torr/mbar	GP open	50 Hz	1300/9.8/13.0	1360/10.2/13.6	1320/9.9/13.2	970/7.3/9.7
		60 Hz	1400/10.5/14.0	1760/13.2/17.6	2800/21.0/28.0	2820 *2/21.2/28.2
Maximum water vapor capacity g/h	GP open	50 Hz	190	270	430	480
		60 Hz	250	410	1100	1650 *2
Motor	Type		Totally enclosed fan cooled 3 phase induction motor
	Energy efficiency class		IE3
	kw/HP(number of poles)		1.5(4)	1.5(4)	2.2(4)	3.7(4)
	Voltage *4	50 Hz	200～240 / 380～415
		60 Hz	200～240 / 380～460
Oil			ULVOIL R-7
Oil capacity L			1.0～2.5		2.5～4.0
Cooling method			Air cooled
Inlet			VG40 equivalency / KF40 (optional)		VG50 equivalency / KF50 (optional)
Outlet			VG40 equivalency / KF40 (optional)
Weight kg			58	60	90	113
External dimensions W×D×H mm			210×660×324	210×680×324	280×761×371	280×831×371
Applicable standard			CE
Standard accessory			A dose of oil, a set of manual
Recommended oil mist trap (Optional) *5			TM201: for low load operation TM401: for high load operation		TM401: for low load operation TM-2: for high load operation
Options			Oil mist trap, other oil types, gas ballast valve, ISO flange, explosion-resistant motor, special type for special application (spec A, B and H)