Oil Rotary Vacuum Pump
VS Series
VS
アルバック
VS series is a single-stage rotary vane oil rotary vacuum pump coupled with a direct-drive motor. VS series is a single-stage rotary vane oil rotary vacuum pump coupled with a direct-drive motor.
VS1501/VS2401 :
ULVAC's simplified design gives this lightweight pump the features of compact size along with low vibration operation. The substantial reduction in vibration can help reduce the costs associated with having to perform special foundation work in facilities where vibration can be problematic. Additionally, enhancements in both the oil circulation and cooling systems result in increased stability of pumping performance at high inlet pressures. Outstanding for reptitive pumping tasks such as Automated Leak Testing.
VS650B/VS750B :
With pumping speeds up to 750 m3/h and even higher displacements possible when coupled with a mechanical booster pump offers some of the best single-stage performance on the market. Designed for low-vibration operation, these pumps are available with water or air cooling to eliminate the need for costly facilities changes. The VS650B/750B is an all-in-one pumping powerhouse built for a wide variety of applications and suitable for installation in any facility as-is.
Features
- High efficiency multi voltage motor (IE-3) which enable to use 200-240 / 380-460 V.High efficiency multi voltage motor (IE-3) which enable to use 200-240 / 380-460 V.
- Lower vibration structure compared with Rotary plunger model. Suitable when installing at upper floor.
- Forced oil circulation makes pumping performance stable even near atmospheric pressure. Suitable for repetitive and consecutive operation between atmospheric and vacuum.
- Selectable from air and water cooled type. Oil cooler is used for oil temperature cooling for a air cooled model.
- Equipped with a cartridge-type oil mist filter inside the oil tank.
- Cleaning of the inside of the oil tank and replacement of the oil mist filter are easy.
Applications
・Evaporation, sputtering, ion plating
・Vacuum drying, freeze drying, vacuum degassing
・Leak test system
・Gas exchange, filling, vacuum insulating
・Heat treatment, melting furnace
・Other various kinds of vacuum systems
Specifications
| Model | VS1501 | VS2401 | ||||
| Designed pumping speed | 50Hz | m3/h L/min cfm |
150 / 2,500 / 88.2 | 240 / 4,000 / 141.2 | ||
| 60Hz | 180 / 3,000 / 105.9 | 288 / 4,800 / 169.4 | ||||
| Ultimate pressure *1 | GP Close | Pa / Torr / mbar |
≦ 5.3 / 3.9x10-2 / 5.3x10-2 | |||
| GP Open | ≦ 80 / 0.6 / 0.8 | |||||
| Motor *2 | Type of motor | Totally enclosed fan cooled 3 phase induction motor | ||||
| Energy efficiency class | IE3 | |||||
| Power | kW (poles) |
5.5 ( 4 ) | 7.5 ( 4 ) | |||
| Voltage | 50Hz | V | 200～240 / 380～415 | |||
| 60Hz | 200～240 / 380～460 | |||||
| Oil |
ULVOIL R-72
|
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| Oil capacity | L | 8.0 ～ 10.5 | ||||
| Cooling method | Water cooled | |||||
| Cooling water | Primary side pressure | Mpa | ≦ 0.5 | |||
| Inlet /outlet differential pressure |
Mpa | ≦ 0.1 | ||||
| Cooling water capacity | L/min | 4 | 5 | |||
| Cooling water temperature | ℃ | 5 ～ 30 | ||||
| Inlet port connection JIS B 2290 | VG80 equivalent | |||||
| Outlet port connection JIS B 2290 | VG50 equivalent | |||||
| External dimension WxDxH | mm | 333x919x460 | 333x1039x460 | |||
| Weight *3 | kg | 240 | 280 | |||
| Applicable standard | - | |||||
| Standard accessory | A dose of oil, a set of manual | |||||
| Option | TM-3 ( for VS ) | TM-4 ( for VS ) | ||||
| Oil mist trap, gas ballast valve, Oil return mechanism |
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Note)This specification uses SI measurement units. Conversion to non-SI units is as follows :
5.3 Pa = 4 × 10-2 Torr
*1 Measured with a Pirani gauge. ( Apprx. 5.3 x 10-1 Pa when measured with a McLeod vacuum gauge. )
*2 Factory shipment setup is 200V class Δ delta connection.
Please change it to Y connection if working voltage is 400V class.
*3 This is the net weight when the Totally enclosed fan cooled 3 phase induction motor is assembled.
| Model | VS650B-A | VS650B-W | VS750B-A | VS750B-W | VS650B-WL *1 |
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| Designed pumping speed |
50Hz | m3/h L/min cfm |
650 / 10833 /383 | 750 / 12500 / 441 |
600 / 10,000 / 353 |
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| 60Hz | 750 / 12500 / 441 | n/a | |||||||
| Ultimate pressure *2 |
GP Close | Pa | ≦ 8 / ≦ 6x10-2 / ≦ 8x10-2 | ||||||
| GP Open | ≦ 70 / ≦ 0.52 / ≦ 0.7 | ||||||||
| Maximum water vapor tolerance |
GP Open |
50Hz |
Pa /Torr /mbar |
4,500 / 33.8 / 45 |
2500 / 18.8 / 25 |
5,500 / 41.4 / 55 |
2,500 / 18.8 / 25 |
2,500 / 18.8 / 25 |
|
| 60Hz | 5,500 / 41.4 / 55 | 2,500 / 18.8 / 25 | n/a | ||||||
| Maximum water vapor capacity |
GP Open |
50Hz | g/h | 17 | 11 | 24 | 13 | 11 | |
| 60Hz | 24 | 13 | n/a | ||||||
| Motor *3 | Type of motor | Totally enclosed fan cooled 3 phase induction motor | |||||||
| Energy efficiency class | IE3 | ||||||||
| Power | kW (poles) |
22 ( 4 ) | |||||||
| Voltage | 50Hz | V | 200 ～ 240 / 380 ～ 415 | ||||||
| 60Hz | 200 ～ 240 / 380 ～ 460 | n/a | 200 ～ 240 / 380 ～ 460 |
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| Oil | ULVOIL R-72 | ||||||||
| Oil capacity | L | 23 ～ 27 | 25 ～ 30 | 23 ～ 27 | 25 ～ 30 | 25 ～ 30 | |||
| Cooling method | Air cooled | Water cooled | Air cooled | Water cooled | Water cooled | ||||
| Cooling water |
Primary side pressure |
Mpa | - | ≦ 0.5 | - | ≦ 0.5 | ≦ 0.5 | ||
| Inlet/outlet differential pressure |
Mpa | - | ≦ 0.1 | - | ≦ 0.1 | ≦ 0.1 | |||
| Cooling water capacity |
L/min | - | ≦ 3.0 | - | ≦ 3.0 | ≦ 3.0 | |||
| Cooling water temperature |
℃ | - | 5 ～ 30 | - | 5 ～ 30 | 5 ～ 30 | |||
| Inlet connection | DN 100 ISO-K ( VG100 Optional ) | ||||||||
| Outlet connection | DN 100 ISO-K ( VG100 Optional ) | ||||||||
| External dimensions W×D×H |
mm |
1490×905 ×705 |
1490×841 ×705 |
1490×905 ×705 |
1490×841 ×705 |
1490 ×841×705 |
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| Weight | kg | 806 | 800 | 802 | 796 | 820 | |||
| Applicable standard | - | ||||||||
| Standard accessory | A dose of oil, a set of manual | ||||||||
| Option |
Oil mist trap, other oil types, gas ballast valve, ISO flange, |
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Note)This specification uses SI measurement units. Conversion to non-SI units is as follows :
8.0 Pa = 6 × 10-2 Torr
*1 VS650B-WL is required to specify the frequency from 50 Hz or 60Hz.
Same exhaust speed will be achieved at 50 Hz/ 60 Hz by motor pulley changes.
*2 Measured with a Pirani gauge. ( Apprx. 0.8 Pa when measured with a McLeod vacuum gauge. )
*3 Factory shipment setup is 200V class Δ delta connection.
Please change it to Y connection if working voltage is 400V class.
Pumping Speed Curves
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Dimension drawing
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