VS

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VS series is a single-stage rotary vane oil rotary vacuum pump coupled with a direct-drive motor. VS series is a single-stage rotary vane oil rotary vacuum pump coupled with a direct-drive motor.

VS1501/VS2401 :
ULVAC's simplified design gives this lightweight pump the features of compact size along with low vibration operation. The substantial reduction in vibration can help reduce the costs associated with having to perform special foundation work in facilities where vibration can be problematic. Additionally, enhancements in both the oil circulation and cooling systems result in increased stability of pumping performance at high inlet pressures. Outstanding for reptitive pumping tasks such as Automated Leak Testing.

VS650B/VS750B :
With pumping speeds up to 750 m3/h and even higher displacements possible when coupled with a mechanical booster pump offers some of the best single-stage performance on the market. Designed for low-vibration operation, these pumps are available with water or air cooling to eliminate the need for costly facilities changes. The VS650B/750B is an all-in-one pumping powerhouse built for a wide variety of applications and suitable for installation in any facility as-is.

Features

High efficiency multi voltage motor (IE-3) which enable to use 200-240 / 380-460 V.High efficiency multi voltage motor (IE-3) which enable to use 200-240 / 380-460 V.
Lower vibration structure compared with Rotary plunger model. Suitable when installing at upper floor.
Forced oil circulation makes pumping performance stable even near atmospheric pressure. Suitable for repetitive and consecutive operation between atmospheric and vacuum.
Selectable from air and water cooled type. Oil cooler is used for oil temperature cooling for a air cooled model.
Equipped with a cartridge-type oil mist filter inside the oil tank.
Cleaning of the inside of the oil tank and replacement of the oil mist filter are easy.

Applications

・Evaporation, sputtering, ion plating
・Vacuum drying, freeze drying, vacuum degassing
・Leak test system
・Gas exchange, filling, vacuum insulating
・Heat treatment, melting furnace
・Other various kinds of vacuum systems

Specifications

Model				VS1501	VS2401
Designed pumping speed		50Hz	m³/h L/min cfm	150 / 2,500 / 88.2	240 / 4,000 / 141.2
		60Hz		180 / 3,000 / 105.9	288 / 4,800 / 169.4
Ultimate pressure *1	GP Close		Pa / Torr / mbar	≦ 5.3 / 3.9x10^-2 / 5.3x10^-2
	GP Open			≦ 80 / 0.6 / 0.8
Motor *2	Type of motor			Totally enclosed fan cooled 3 phase induction motor
	Energy efficiency class			IE3
	Power		kW (poles)	5.5 ( 4 )	7.5 ( 4 )
	Voltage	50Hz	V	200～240 / 380～415
		60Hz		200～240 / 380～460
Oil				ULVOIL R-72
Oil capacity			L	8.0 ～ 10.5
Cooling method				Water cooled
Cooling water	Primary side pressure		Mpa	≦ 0.5
	Inlet /outlet differential pressure		Mpa	≦ 0.1
	Cooling water capacity		L/min	4	5
	Cooling water temperature		℃	5 ～ 30
Inlet port connection JIS B 2290				VG80 equivalent
Outlet port connection JIS B 2290				VG50 equivalent
External dimension WxDxH			mm	333x919x460	333x1039x460
Weight *3			kg	240	280
Applicable standard				-
Standard accessory				A dose of oil, a set of manual
Option				TM-3 ( for VS )	TM-4 ( for VS )
				Oil mist trap, gas ballast valve, Oil return mechanism

Note)This specification uses SI measurement units. Conversion to non-SI units is as follows :
　　5.3 Pa = 4 × 10^-2 Torr
*1 Measured with a Pirani gauge. ( Apprx. 5.3 x 10^-1 Pa when measured with a McLeod vacuum gauge. )
*2 Factory shipment setup is 200V class Δ delta connection.
　 Please change it to Y connection if working voltage is 400V class.
*3 This is the net weight when the Totally enclosed fan cooled 3 phase induction motor is assembled.

Model				VS650B-A	VS650B-W	VS750B-A	VS750B-W	VS650B-WL *1
Designed pumping speed		50Hz	m³/h L/min cfm	650 / 10833 /383		750 / 12500 / 441		600 / 10,000 / 353
		60Hz		750 / 12500 / 441		n/a
Ultimate pressure *2	GP Close		Pa	≦ 8 / ≦ 6x10^-2 / ≦ 8x10^-2
	GP Open			≦ 70 / ≦ 0.52 / ≦ 0.7
Maximum water vapor tolerance	GP Open	50Hz	Pa /Torr /mbar	4,500 / 33.8 / 45	2500 / 18.8 / 25	5,500 / 41.4 / 55	2,500 / 18.8 / 25	2,500 / 18.8 / 25
		60Hz		5,500 / 41.4 / 55	2,500 / 18.8 / 25	n/a
Maximum water vapor capacity	GP Open	50Hz	g/h	17	11	24	13	11
		60Hz		24	13	n/a
Motor *3	Type of motor			Totally enclosed fan cooled 3 phase induction motor
	Energy efficiency class			IE3
	Power		kW (poles)	22 ( 4 )
	Voltage	50Hz	V	200 ～ 240 / 380 ～ 415
		60Hz		200 ～ 240 / 380 ～ 460		n/a		200 ～ 240 / 380 ～ 460
Oil				ULVOIL R-72
Oil capacity			L	23 ～ 27	25 ～ 30	23 ～ 27	25 ～ 30	25 ～ 30
Cooling method				Air cooled	Water cooled	Air cooled	Water cooled	Water cooled
Cooling water	Primary side pressure		Mpa	-	≦ 0.5	-	≦ 0.5	≦ 0.5
	Inlet/outlet differential pressure		Mpa	-	≦ 0.1	-	≦ 0.1	≦ 0.1
	Cooling water capacity		L/min	-	≦ 3.0	-	≦ 3.0	≦ 3.0
	Cooling water temperature		℃	-	5 ～ 30	-	5 ～ 30	5 ～ 30
Inlet connection				DN 100 ISO-K ( VG100 Optional )
Outlet connection				DN 100 ISO-K ( VG100 Optional )
External dimensions W×D×H			mm	1490×905 ×705	1490×841 ×705	1490×905 ×705	1490×841 ×705	1490 ×841×705
Weight			kg	806	800	802	796	820
Applicable standard				-
Standard accessory				A dose of oil, a set of manual
Option				Oil mist trap, other oil types, gas ballast valve, ISO flange, special type for special application ( spec H and R )

Note)This specification uses SI measurement units. Conversion to non-SI units is as follows :
　　8.0 Pa = 6 × 10^-2 Torr
*1 VS650B-WL is required to specify the frequency from 50 Hz or 60Hz.
　 Same exhaust speed will be achieved at 50 Hz/ 60 Hz by motor pulley changes.
*2 Measured with a Pirani gauge. ( Apprx. 0.8 Pa when measured with a McLeod vacuum gauge. )
*3 Factory shipment setup is 200V class Δ delta connection.
　 Please change it to Y connection if working voltage is 400V class.

Pumping Speed Curves

VS1501	VS2401
VS650B

Dimension drawing

VS1501,VS2401

VS650

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Features

High efficiency multi voltage motor (IE-3) which enable to use 200-240 / 380-460 V.High efficiency multi voltage motor (IE-3) which enable to use 200-240 / 380-460 V.
Lower vibration structure compared with Rotary plunger model. Suitable when installing at upper floor.
Forced oil circulation makes pumping performance stable even near atmospheric pressure. Suitable for repetitive and consecutive operation between atmospheric and vacuum.
Selectable from air and water cooled type. Oil cooler is used for oil temperature cooling for a air cooled model.
Equipped with a cartridge-type oil mist filter inside the oil tank.
Cleaning of the inside of the oil tank and replacement of the oil mist filter are easy.

Specifications

Model				VS1501	VS2401
Designed pumping speed		50Hz	m³/h L/min cfm	150 / 2,500 / 88.2	240 / 4,000 / 141.2
		60Hz		180 / 3,000 / 105.9	288 / 4,800 / 169.4
Ultimate pressure *1	GP Close		Pa / Torr / mbar	≦ 5.3 / 3.9x10^-2 / 5.3x10^-2
	GP Open			≦ 80 / 0.6 / 0.8
Motor *2	Type of motor			Totally enclosed fan cooled 3 phase induction motor
	Energy efficiency class			IE3
	Power		kW (poles)	5.5 ( 4 )	7.5 ( 4 )
	Voltage	50Hz	V	200～240 / 380～415
		60Hz		200～240 / 380～460
Oil				ULVOIL R-72
Oil capacity			L	8.0 ～ 10.5
Cooling method				Water cooled
Cooling water	Primary side pressure		Mpa	≦ 0.5
	Inlet /outlet differential pressure		Mpa	≦ 0.1
	Cooling water capacity		L/min	4	5
	Cooling water temperature		℃	5 ～ 30
Inlet port connection JIS B 2290				VG80 equivalent
Outlet port connection JIS B 2290				VG50 equivalent
External dimension WxDxH			mm	333x919x460	333x1039x460
Weight *3			kg	240	280
Applicable standard				-
Standard accessory				A dose of oil, a set of manual
Option				TM-3 ( for VS )	TM-4 ( for VS )
				Oil mist trap, gas ballast valve, Oil return mechanism

Model				VS650B-A	VS650B-W	VS750B-A	VS750B-W	VS650B-WL *1
Designed pumping speed		50Hz	m³/h L/min cfm	650 / 10833 /383		750 / 12500 / 441		600 / 10,000 / 353
		60Hz		750 / 12500 / 441		n/a
Ultimate pressure *2	GP Close		Pa	≦ 8 / ≦ 6x10^-2 / ≦ 8x10^-2
	GP Open			≦ 70 / ≦ 0.52 / ≦ 0.7
Maximum water vapor tolerance	GP Open	50Hz	Pa /Torr /mbar	4,500 / 33.8 / 45	2500 / 18.8 / 25	5,500 / 41.4 / 55	2,500 / 18.8 / 25	2,500 / 18.8 / 25
		60Hz		5,500 / 41.4 / 55	2,500 / 18.8 / 25	n/a
Maximum water vapor capacity	GP Open	50Hz	g/h	17	11	24	13	11
		60Hz		24	13	n/a
Motor *3	Type of motor			Totally enclosed fan cooled 3 phase induction motor
	Energy efficiency class			IE3
	Power		kW (poles)	22 ( 4 )
	Voltage	50Hz	V	200 ～ 240 / 380 ～ 415
		60Hz		200 ～ 240 / 380 ～ 460		n/a		200 ～ 240 / 380 ～ 460
Oil				ULVOIL R-72
Oil capacity			L	23 ～ 27	25 ～ 30	23 ～ 27	25 ～ 30	25 ～ 30
Cooling method				Air cooled	Water cooled	Air cooled	Water cooled	Water cooled
Cooling water	Primary side pressure		Mpa	-	≦ 0.5	-	≦ 0.5	≦ 0.5
	Inlet/outlet differential pressure		Mpa	-	≦ 0.1	-	≦ 0.1	≦ 0.1
	Cooling water capacity		L/min	-	≦ 3.0	-	≦ 3.0	≦ 3.0
	Cooling water temperature		℃	-	5 ～ 30	-	5 ～ 30	5 ～ 30
Inlet connection				DN 100 ISO-K ( VG100 Optional )
Outlet connection				DN 100 ISO-K ( VG100 Optional )
External dimensions W×D×H			mm	1490×905 ×705	1490×841 ×705	1490×905 ×705	1490×841 ×705	1490 ×841×705
Weight			kg	806	800	802	796	820
Applicable standard				-
Standard accessory				A dose of oil, a set of manual
Option				Oil mist trap, other oil types, gas ballast valve, ISO flange, special type for special application ( spec H and R )