Oil Rotary Vacuum Pump

VS Series

VS

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VS series is a single-stage rotary vane oil rotary vacuum pump coupled with a direct-drive motor. VS series is a single-stage rotary vane oil rotary vacuum pump coupled with a direct-drive motor.



VS1501/VS2401 :
ULVAC's simplified design gives this lightweight pump the features of compact size along with low vibration operation. The substantial reduction in vibration can help reduce the costs associated with having to perform special foundation work in facilities where vibration can be problematic. Additionally, enhancements in both the oil circulation and cooling systems result in increased stability of pumping performance at high inlet pressures. Outstanding for reptitive pumping tasks such as Automated Leak Testing.



VS650B/VS750B :
With pumping speeds up to 750 m3/h and even higher displacements possible when coupled with a mechanical booster pump offers some of the best single-stage performance on the market. Designed for low-vibration operation, these pumps are available with water or air cooling to eliminate the need for costly facilities changes. The VS650B/750B is an all-in-one pumping powerhouse built for a wide variety of applications and suitable for installation in any facility as-is.

Features

      • High efficiency multi voltage motor (IE-3) which enable to use 200-240 / 380-460 V.High efficiency multi voltage motor (IE-3) which enable to use 200-240 / 380-460 V.
      • Lower vibration structure compared with Rotary plunger model. Suitable when installing at upper floor.
      • Forced oil circulation makes pumping performance stable even near atmospheric pressure. Suitable for repetitive and consecutive operation between atmospheric and vacuum.
      • Selectable from air and water cooled type. Oil cooler is used for oil temperature cooling for a air cooled model.
      • Equipped with a cartridge-type oil mist filter inside the oil tank.
      • Cleaning of the inside of the oil tank and replacement of the oil mist filter are easy.

Applications

・Evaporation, sputtering, ion plating
・Vacuum drying, freeze drying, vacuum degassing
・Leak test system
・Gas exchange, filling, vacuum insulating
・Heat treatment, melting furnace
・Other various kinds of vacuum systems

Specifications

Model VS1501 VS2401
Designed pumping speed 50Hz m3/h
L/min
cfm
150 / 2,500 / 88.2 240 / 4,000 / 141.2
60Hz 180 / 3,000 / 105.9 288 / 4,800 / 169.4
Ultimate pressure *1 GP Close Pa /
Torr /
mbar
≦ 5.3 / 3.9x10-2 / 5.3x10-2
GP Open ≦ 80 / 0.6 / 0.8
Motor *2 Type of motor Totally enclosed fan cooled 3 phase induction motor
Energy efficiency class IE3
Power kW
(poles)
5.5 ( 4 ) 7.5 ( 4 )
Voltage 50Hz V 200~240 / 380~415
60Hz 200~240 / 380~460
Oil
ULVOIL R-72
Oil capacity L 8.0 ~ 10.5
Cooling method Water cooled
Cooling water Primary side pressure Mpa ≦ 0.5
Inlet /outlet differential
pressure
Mpa ≦ 0.1
Cooling water capacity L/min 4 5
Cooling water temperature 5 ~ 30
Inlet port connection JIS B 2290 VG80 equivalent
Outlet port connection JIS B 2290 VG50 equivalent
External dimension WxDxH mm 333x919x460 333x1039x460
Weight *3 kg 240 280
Applicable standard -
Standard accessory A dose of oil, a set of manual
Option TM-3 ( for VS ) TM-4 ( for VS )
Oil mist trap, gas ballast valve,
Oil return mechanism

Note)This specification uses SI measurement units. Conversion to non-SI units is as follows :
  5.3 Pa = 4 × 10-2 Torr
*1 Measured with a Pirani gauge. ( Apprx. 5.3 x 10-1 Pa when measured with a McLeod vacuum gauge. )
*2 Factory shipment setup is 200V class Δ delta connection.
  Please change it to Y connection if working voltage is 400V class.
*3 This is the net weight when the Totally enclosed fan cooled 3 phase induction motor is assembled.

Model VS650B-A VS650B-W VS750B-A VS750B-W VS650B-WL
*1
Designed
pumping speed
50Hz m3/h
L/min
cfm
650 / 10833 /383 750 / 12500 / 441

600 /

10,000 / 353

60Hz 750 / 12500 / 441 n/a
Ultimate
pressure *2
GP Close Pa ≦ 8 / ≦ 6x10-2 / ≦ 8x10-2
GP Open ≦ 70 / ≦ 0.52 / ≦ 0.7
Maximum
water vapor
tolerance
GP
Open
50Hz

Pa

/Torr

/mbar

4,500 /

33.8 / 45

2500 /

18.8 / 25

5,500 /

41.4 / 55

2,500 /

18.8 / 25

2,500 /

18.8 /

25

60Hz 5,500 / 41.4 / 55 2,500 / 18.8 / 25 n/a
Maximum
water vapor
capacity
GP
Open
50Hz g/h 17 11 24 13 11
60Hz 24 13 n/a
Motor *3 Type of motor Totally enclosed fan cooled 3 phase induction motor
Energy efficiency class IE3
Power kW
(poles)
22 ( 4 )
Voltage 50Hz V 200 ~ 240 / 380 ~ 415
60Hz 200 ~ 240 / 380 ~ 460 n/a 200 ~ 240 /
380 ~ 460
Oil ULVOIL R-72
Oil capacity L 23 ~ 27 25 ~ 30 23 ~ 27 25 ~ 30 25 ~ 30
Cooling method Air cooled Water cooled Air cooled Water cooled Water cooled
Cooling
water
Primary side
pressure
Mpa - ≦ 0.5 - ≦ 0.5 ≦ 0.5
Inlet/outlet
differential
pressure
Mpa - ≦ 0.1 - ≦ 0.1 ≦ 0.1
Cooling water
capacity
L/min - ≦ 3.0 - ≦ 3.0 ≦ 3.0
Cooling water
temperature
- 5 ~ 30 - 5 ~ 30 5 ~ 30
Inlet connection DN 100 ISO-K ( VG100 Optional )
Outlet connection DN 100 ISO-K ( VG100 Optional )
External dimensions
W×D×H
mm

1490×905

×705

1490×841

×705

1490×905

×705

1490×841

×705

1490

×841×705

Weight kg 806 800 802 796 820
Applicable standard -
Standard accessory A dose of oil, a set of manual
Option

Oil mist trap, other oil types, gas ballast valve, ISO flange,
special type for special application ( spec H and R )

Note)This specification uses SI measurement units. Conversion to non-SI units is as follows :
  8.0 Pa = 6 × 10-2 Torr
*1 VS650B-WL is required to specify the frequency from 50 Hz or 60Hz.
  Same exhaust speed will be achieved at 50 Hz/ 60 Hz by motor pulley changes.
*2 Measured with a Pirani gauge. ( Apprx. 0.8 Pa when measured with a McLeod vacuum gauge. )
*3 Factory shipment setup is 200V class Δ delta connection.
  Please change it to Y connection if working voltage is 400V class.

Pumping Speed Curves

  • VS1501

    VS1501_curve.png

  • VS2401
    VS2401_curve.png
  • VS650BVS650B_curve_e (1).png

Dimension drawing

  • VS1501,VS2401
VS1501_size.png
  • VS650
VS650_size.png

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