Rocking Piston Type Dry Vacuum Pump
- Compact size with large displacement.
- Dry vacuum pump using no oil in the gas contact area.
- Rich lineup available to suit your application.
- Safety design with built-in automatic reset type thermal protector.
- Operation is possible from atmospheric pressure.
- Continuous operation in all pressure zones is possible./li>
- Simple structure and easy maintenance.
- Vacuum chuck, vacuum tweezers.
- Semiconductor industry. (Handler, Mounter)
- FPD industry. (Bonder)
- Printing machine.
- Injection molding.
- Adsorption and transfer.
※2：Power supply plug and Power supply code are not included.
※TUV Certification: A high-quality product that complies with European standards as assessed by an international third party that conducts product safety testing and certification.
※cTUVus Certification: A high quality product that complies with Canadian and US standards as assessed by an international third party that conducts product safety testing and certification.
※3：It is a vertical dedicated model with a small installation space.
1. The pump is stopped when the lord is operated, and the pump can’t be operated just after that. In this case, please return the atmospheric pressure the inside of the pump.
2. The pump will not often operate normally if it is used with corrosive gases, organic solvents, liquids, or condensed gases (eg steam). The pump will not often operate normally if it is used with gases containing particles or dust etc.
3. Cup packing that is the sliding material of the pump will be worn out by operating, and microscopic particles result from wear of component. Moreover, wear is promoted because the sliding material is weak in moisture, and the pump life decreases if the vacuum gas is moisture. Please suck neither moisture nor condensed gas (steam etc.).
4. It is a pump only in the room. Please do not set it up in the place, that rain and water splash, and outdoors.
Pumping Speed Curves
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