TCN-2ω

アルバック販売

能简单地评估纳米薄膜的热传导率。
在2ω测量中，是测量纳米薄膜厚度方向的热传导率的世界唯一的商用设备。
与其他方式相比，能简单地进行试料的制作和测量。

特点

测量纳米级薄膜的导热系数
样品准备简单

用途

适合热设计所需薄膜的热导率评估（半导体器件薄膜，有机薄膜，Low-k薄膜）
也可以评估热电转换材料的薄膜

规格

Measurement Properties	RT
Sample size	W10 × L10 ～ 20 × t0.3 ～ 1 (mm) (Substrate)
Measurement Atomosphere	Vacuum

专利和标准

热性能测量方法（日本专利第5426115号）

Measurement principle

Metal thin film is heated by the periodic heating method with the basic frequency ( f / Hz). As a result, the response frequency with the thermal energy, 2 f / Hz, is equal to two times as large as the basic one. In the case of the film composed of metal thin film (0) – thin film (1) – substrate (s) as shown in Figure, the temperature increase T(0) on the upper surface for the metal thin film can be calculated on the basis of one-dimensional heat conduction model. Assuming that the energy completely arrived at the bottom substrate, T(0) is following the equation,

（λ / W m^-1 K^-1, C / J K^-1 m^-3, q/ W m^-3, d / m , ω (=2πf ) / s^-1）

We note that the real part (in-phase amplitude) contains the information for the thin film. Assuming that the thermal energy completely arrives at the bottom substrate, the in-phase amplitude is proportional to (2ω)^-0.5. Thermal conductivity for the thin film (λ₁) is estimated from
(m:slope, n: intercept）