溅射离子泵 Model:GST-07L-B

ULVAC

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GST-07L-B是一种溅射离子泵控制器，功能完善，可靠性高。它是ULVAC丰富的技术储备和在超高真空领域久经考验的长期积累的产物。

特点

小型・轻量
搭载CPU实现多功能化。
单个装置可以控制所有离子溅射泵（Model:PST）。
通讯设备标准配件
外部通信控制功能是标准配置，因此可以进行远程控制和自动操作。
XHV対応
自动启动电路和软件启动功能可最大限度地减少泵电池的污染（→专利1340297和其他申请待定）
安全功能改进
具有操作开关的防错功能和各种保护的互锁功能。采用高氟橡胶树脂高压电缆，具有优异的耐热性，耐寒性和电气特性。
限制使用指定的有害物质（RoHS指令）。
符合CE标志

用途

加速器
电子显微镜
分析机器

规格

Attachable pump		Actor pump (all models in PST series)
Operating pressure		10^-2 to 10^-4Pa or lower
Display ranges	Display method	Digital display (on 7-segment LEDs）
	Display contents
	a）Output current display	Automatic selection of 2 ranges: mA, μA (linear display)
	b）Output voltage display	0.0 to 7.5 kV (H or L) (1-range linear display)
	c）Pressure display	Pa, mbr (1×10^-8～1×10^-2Pa) (1×10^-10～1×10^-4mbar)
Output release voltage		DC+7.5kV (2points, high and low, selectable using front panel switch; high/low voltage setting adjustable from approx.1.0 to 7.5kV using trimmer)
Output current		Less than DC31mA
Input voltage/current		AC100～115V±10% ・ 50/60Hz～3.0A AC200～240V±10% ・ 50/60Hz～1.5A
MONITOR terminal output signal		Output of signals proportionate to 7-segment panel display,DC 0 to 10V full scale for each range, more than 100kΩ
Pressure setting point		2 points
REMOTE/LOCAL		Selectable using from panel switch
External control functions		Various input/output functions provided (REMOTE connector provided) (Remote, RS-232C communication control)
Protection functions		Error display/various protection functions provided High voltage(HV) output shutdown ERR 0 to 5 light Timer setting for startup protection (adjustable from 1 to 255 minutes) Automatic reserving after power failure (HV hold switch operation)
Ambient operating conditions	Temperature	0～40℃
	Humidity	Less than 85% (no dew)
Accessories		Output cable (5m), input cable (3m)
Weight		Main unit: approx. 4kg, cables: approx. 1.0kg (standard)
Dimensions W x H x D		240 x 99 x 370 mm {200 x 99 x 370 mm (Except rack mounting bracket)}

规格

Attachable pump		Actor pump (all models in PST series)
Operating pressure		10^-2 to 10^-4Pa or lower
Display ranges	Display method	Digital display (on 7-segment LEDs）
	Display contents
	a）Output current display	Automatic selection of 2 ranges: mA, μA (linear display)
	b）Output voltage display	0.0 to 7.5 kV (H or L) (1-range linear display)
	c）Pressure display	Pa, mbr (1×10^-8～1×10^-2Pa) (1×10^-10～1×10^-4mbar)
Output release voltage		DC+7.5kV (2points, high and low, selectable using front panel switch; high/low voltage setting adjustable from approx.1.0 to 7.5kV using trimmer)
Output current		Less than DC31mA
Input voltage/current		AC100～115V±10% ・ 50/60Hz～3.0A AC200～240V±10% ・ 50/60Hz～1.5A
MONITOR terminal output signal		Output of signals proportionate to 7-segment panel display,DC 0 to 10V full scale for each range, more than 100kΩ
Pressure setting point		2 points
REMOTE/LOCAL		Selectable using from panel switch
External control functions		Various input/output functions provided (REMOTE connector provided) (Remote, RS-232C communication control)
Protection functions		Error display/various protection functions provided High voltage(HV) output shutdown ERR 0 to 5 light Timer setting for startup protection (adjustable from 1 to 255 minutes) Automatic reserving after power failure (HV hold switch operation)
Ambient operating conditions	Temperature	0～40℃
	Humidity	Less than 85% (no dew)
Accessories		Output cable (5m), input cable (3m)
Weight		Main unit: approx. 4kg, cables: approx. 1.0kg (standard)
Dimensions W x H x D		240 x 99 x 370 mm {200 x 99 x 370 mm (Except rack mounting bracket)}