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RF电源 / 匹配切换机

RFS-N 系列

RFS-1310N

アルバック

RFS-N系列是输出频率13.56MHz、功率0.5kW/1/kW/3kW/5kW的等离子工艺用RF电源。装载高效率RF放大器实现了小型·轻量化。另外,RF电源内置自动匹配控制器功能,仅从主机单元就可以对RF电源进行电力控制及匹配系统控制。

特点

  • 高效率
    配有高功率转换效率的RF电路以节省能量。
  • 快速自动匹配
    快速算法实现快速自动匹配。
  • RF电源内置自动匹配功能
    只有主机才能进行匹配系统控制。
    可通过内置控制器手动控制RF电源和匹配器
  • 灵活的控制
    外部模拟控制,可实现串联通信控制。
  • 可靠性高
    对作为设备制造商所积累的设计经验。

用途

  • 溅射设备
  • CVD设备
  • 等离子蚀刻设备
  • RF离子源
  • 中和剂

规格

[Power generator]

Model RFS-1305N RFS-1310N RFS-1330N RFS-1350N
Input Spec Input rated voltage AC200 to 220V
Input voltage fluctuation range AC180~242V
Phase, frequency 1phase 50/60Hz 3phase 50/60Hz
Input connector Bayonet netlock round connector
DCA3102E16-10P-D
Bayonet netlock round connector
DCA3102E22-22P-D
Input capacity 1.2 kVA or less 1.8 kVA or less 5 kVA以 or less 8 kVA or less
Input current 10A or less 25A or less 30A or less
Leak current 5mA or less
Output Spec Oscillating frequency 13.56MHz
Rated traveling-wave power 500W(50Ω load) 1000W(50Ω load) 3000W(50Ω load) 5000W(50Ω load)
Maximum reflected wave power 100W 500W
Output impedance 50Ω
Harmonic distortion ratio -35dB or less (Rated output, Continuous mode)
Output connector N type HN type DIN 7/16
Cont Control method Power control mode
Control precision Rated output ±2% or less(Rated power 10~100%)
Cooling method Air-cooling Water-cooling
No cooling water required Flow rate 4L/min Flow rate 6L/min
Control guarantee range Rated power 10 to 100%
Demensions W x D x H 240mm x 495mm x 150mm
(excepting projection portion)
480mm × 500mm × 150mm
(excepting projection portion)
Weight 11kg 23kg

[Matching box]

Model MBX-1305N MBX-1310N MBX-1330N MBX-1350N
RF input Input frequency 13.56MHz
Rated power 30~500W 30~1000W 30~3000W 50~5000W
Input connector N type HN type DIN 7/16 type
RF output Allowable output voltage 2.5kVpp or less / 2.5kVdc or less 5.0kVpp or less / 2.5kVdc or less 10kVpp or less / 2.5kVdc or less
Allowable output current 30A or less 80A or less 120A or less
Load impedance Real part: 0.5Ω ≦ R ≦ 10.0Ω
(Only the range of regulation voltage and current)
Residual reflected wave power Big either input travelling wave power 0.3% or less or 10W or less Big either input travelling wave power 0.3% or less or 30W or less Big either input travelling wave power 0.3% or less or 50W or less
Cooling system Air-cooling Air-cooling + Water-cooling (Flow rate 2L/min)
Demensions W x D x H 375mm x 250mm x 120mm(excepting projection portion) 375mm x 250mm x 170mm
(excepting projection portion)
450mm x 500mm x 248mm
(excepting projection portion)
Weight Approx. 8kg Approx. 10kg Approx. 21kg

* Operating ambient temperature 10 to 40℃ (non condensing)
* Operating environment, direct sunlight, heat、dust, avoid a vibration, do not contain corrosive gas

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