Deposition-Controller

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The CRTM series of crystal deposition controllers are products developed based on a wealth of experience. In particular, the CRTM-R1 series employs a unique "Impedance method" to improve film thickness measurement performance. This allows for a more stable deposition process and provides high-quality deposition. For organic processes, the use of the dedicated CRTM-R1-EL machine allows for long-term stable deposition.

Deposition-Controller
CRTM-R1
New Product
ULVAC has developed the new quartz crystal deposition controllers based on our longtime experience and technologies. Contributes to improved quality and reliability in vapor deposition processes.

Deposition-Controller
CRTM-R1-EL
New Product
CRTM-R1-EL is a crystal deposition monitor optimized for the organic EL deposition process. New measurement method provides excellent resolution and rate stability.

Deposition-Controller
CRTM-6000G
The CRTM-6000G is a deposition controller with excellent cost / performance features.
Unit offer a wide depostion control range for single as well as multilayer films.