Here are the components handled by ULVAC Group.
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Rough&Middle Vacuum Pump
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High Vacuum Pump
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Vacuum Gauge
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Gas Analyzer（Process Gas Monitor）
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Leak Detector
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High Speed Spectroscopic Ellipsometer
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Deposition Controller
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Vacuum Valve
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Power supply for plasma generation
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Vacuum-deposition electron beam source
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Vacuum transfer robot
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Small Film Forming Equipment
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Refrigerator (CRYO)
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Heat Treatment And Thermal Properties
Hot items
News
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2023.08.25
Notice - New Release | Oil Rotary Pump VS300A-W
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