Rough&Middle Vacuum Pump
ULVAC vacuum pumps are developed based on abundant technology and experience in the vacuum field. In addition to Oil Rotary Vacuum Pumps, Dry Vacuum Pumps also have a lineup for all areas, conditions, and applications, including Roots, Diaphragms, and Pistons.
Pump Type
- Select series
- Select condition
- Screw Type Dry Vacuum Pump
- Multi-Stage Roots Type Dry Vacuum Pump
- Scroll Type Dry Vacuum Pump
- Diaphragm Type Dry Vacuum Pump
- Rocking Piston Type Dry Vacuum Pump
- Oil Rotary Vacuum Pump
- Mechanical Booster Pump
- Vacuum Pumping System
- Vacuum Pump Oil
- Optional Parts
Product type
Committed
Brand
0 Items
Products
- Rough&Middle Vacuum Pump
- High Vacuum Pump
- Vacuum Gauge
- Gas Analyzer(Process Gas Monitor)
- Leak Detector
- High Speed Spectroscopic Ellipsometer
- Deposition Controller
- Vacuum Valve
- Power supply for plasma generation
- Vacuum-deposition electron beam source
- Vacuum transfer robot
- Small Film Forming Equipment
- Refrigerator (CRYO)
- Heat Treatment And Thermal Properties