Introduction of vacuum equipments manufactured by ULVAC Group.

MS series is a vacuum pump which is categorized as screw type dry vacuum pump.
Corrosion resistance and powder exhaust are improved as process resistance model based on traditional LS series.
This model is designed for the process of using corrosion gas and powder exhausting.

High pumping speed and Low power consumption dry vacuum pump.
LS series is selectable from 4 different pumping speed(120-1200m3/h) by depending on the application.

Uniformity of high temperature distribution. It is possible to exhaust the sublimates generated by CVD and etching processes in a gaseous state.

Uniformity of low temperature distribution. The optimum pump for the evacuation of LL chamber, in addition to the PVD processes, in which reduction of exhaust time is important to up the throughput.

Based on many years of experience with the LR/HR Series ULVAC has introduced the GR Series Dry Vacuum pump with a simple and clean design for general industrial applications.

Dry Vacuum Pump CR series Ver.B is an air-cooled roots type dry vacuum pump. IT complies with international standard(CE,cTUVus).Stable operation and extended lifetime are possible because there is no oil inside of the pump head and no contact between rotor and cylinder.
Features

This is an optional product to reduce pumping noise when using a dry pump.

ECO-SHOCK is a revolutionary dry pump accessory that can dramatically reduce power consumption
by attaching to the dry pump exhaust line

Six-stage / with Thermostat

Six-stage / with Thermostat

This is a vacuum pump that evacuates by the eccentric motion of the spiral wall (orbiting scroll) facing the fixed spiral wall (fixed scroll).

Double wrap / terminal only (without cord) with switch / with thermal protector / with air flash

Double wrap / terminal only (without cord) with switch / with thermal protector / with air flash

Single wrap / terminal only (without cord) with switch / with thermal protector / with air flash

Single wrap / terminal only (without cord) with switch / with thermal protector / with air flash

Vacuum Pump Suction and Exhaust Filter
This filter can trap acidic gas, oil mist effectively by using ion-exchanged resin fiber. Filter can be placed both vacuum and exhaust side and filter can be replaceable.

Vacuum Pump Suction and Exhaust Filter
This filter can trap acidic gas, oil mist effectively by using ion-exchanged resin fiber. Filter can be placed both vacuum and exhaust side and filter can be replaceable.

This is a vacuum pump that evacuates by the reciprocating motion of a rubber thin film (diaphragm). Simple structure and easy handling. DTC series is a high corrosion resistant type.

This is a vacuum pump that evacuates by the reciprocating motion of a rubber thin film (diaphragm). Simple structure and easy handling. DTC series is a high corrosion resistant type.

Single-stage / with cord, and switch / with thermal protector

Two-stage / DC motor equipped / with interlock protection / with overcurrent protection

Standard type / Two-stages / with power cord / with switch / with thermal protector

Two-stage / with thermal protector / cord with

Standard type / Two-stages / with power cord / with switch / with thermal protector

Standard type / Two-stages / with power cord / with switch / with thermal protector

Standard type / Two-stages / with power cord / with switch / with thermal protector

Standard type / Two-stages / with power cord / with switch / with thermal protector

Single-stage / with cord, and switch / with thermal protector

Single-stage / DC motor equipped / with interlock protection / with overcurrent protection

Standard type / Single-stages / with power cord / with switch / with thermal protector

Standard type / 1-stage exhaust system / with thermal protector / with motor lead wire crimp terminal

Built-in type / Single-stage / with cord, and switch / with thermal protector/Unloader valve option

Built-in type / Single-stage / with cord, and switch / with thermal protector/Unloader valve option

Built-in type / Single-stage / with cord, and switch / with thermal protector/Unloader valve option

Built-in type / Single-stage / with cord, and switch / with thermal protector/Unloader valve option

High vacuum type / Three-stages / with power cord / with switch / with thermal protector

High vacuum chemical type / Three-stages / with power cord / with switch / with thermal protector

This is a vacuum pump that evacuates by the reciprocating motion of a rubber thin film (diaphragm). Simple structure and easy handling. DTC series is a high corrosion resistant type.

This is a vacuum pump that evacuates by the reciprocating motion of a rubber thin film (diaphragm). Simple structure and easy handling. DTC series is a high corrosion resistant type.

This is a vacuum pump that evacuates by the reciprocating motion of a rubber thin film (diaphragm). Simple structure and easy handling. DTC series is a high corrosion resistant type.

Standard type / Two-stage exhaust system / Thermal protector built-in / Power supply code

Standard type / Single-stage exhaust system / Thermal protector built-in / Power supply cord

Pressurized type / 1 step exhaust system / built-in thermal protector / Power supply cord

Standard type / 1 step exhaust system / built-in thermal protector

Standard type / One-stage exhaust system / Thermal protector built-in / Power supply code

Standard type / 1 step exhaust system / built-in thermal protector / with input terminal block (without cord)

Standard type / 1 step exhaust system / built-in thermal protector / with input terminal block (without cord)

VS650B／VS750B is classified as a rotary vane type Oil Rotary Vacuum pump. Air or water cooling can be selected, and even larger displacements can be achieved by combining with a mechanical booster pump. In addition, stable exhaust performance is obtained by the Oil mist separator and Oil return mechanism which is build-in into the pump. In addition, it is designed with an easy maintainability for oil and element filter exchanges.

VS1501/VS2401 is classified as a single-stage rotary vane type oil vacuum pump.
The water-cooled and forced oil supply system ensures stable pumping performance even under heavy loads.
They are also designed for easy maintenance with a large oil level indicator.

VS300A-W is classified as a rotary vane type Oil Rotary Vacuum pump. Smallest footprint in the class and allows the direct mounting of Mechanical booster pump. In addition, stable exhaust performance is obtained by the Oil mist separator and Oil return mechanism which is build-in into the pump. In addition, it is designed with an easy maintainability for oil and element filter exchanges.

PVD series is a compact, double-stage rotary vane oil rotary vacuum pump coupled with belt-driven motor.
From the reliability and ease of use over the years, is a small belt-driven oil rotary vacuum pump has gotten used to a lot of customers.
From the low-speed rotation, it performs a quiet and stable exhaust characteristics.

VD series is a Double stage rotary vane type direct-driven oil rotary vacuum pump equipped
withULVAC's original multi-voltage motor.
This dual stage rotary vane mechanical vacuum achieves lower ultimate pressure.
Design optimization and wide option realized quiet operation and so this pump is
suitable for a wide range of applications.

The PKS series models are extremely durable, large oil rotary vacuum pumps with very stable pumping characteristics. High-grade cast iron is used, providing strength and resistance to abrasion. They are used in many applications, in areas ranging from the metal and automotive industries, to the chemical, pharmaceutical and food industries.

When an oil rotary pump is started at atmospheric pressure, and operated during low vacuum operation, the pump oil is exhausted along with the exhaust gas that is being pumped. This oil-laden exhaust mist, which consists of tiny oil droplets, appears as "smoke" exiting from the exhaust port of the pump. The TM and TMX series oil mist traps help to ensure a clean working environment and protect indoor equipment from contamination that would otherwise be caused by this oil mist.

When an oil rotary pump is started at atmospheric pressure, and operated during low vacuum operation, the pump oil is exhausted along with the exhaust gas that is being pumped. This oil-laden exhaust mist, which consists of tiny oil droplets, appears as "smoke" exiting from the exhaust port of the pump. The TM and TMX series oil mist traps help to ensure a clean working environment and protect indoor equipment from contamination that would otherwise be caused by this oil mist.

When an oil rotary pump is started at atmospheric pressure, and operated during low vacuum operation, the pump oil is exhausted along with the exhaust gas that is being pumped. This oil-laden exhaust mist, which consists of tiny oil droplets, appears as "smoke" exiting from the exhaust port of the pump. The TM and TMX series oil mist traps help to ensure a clean working environment and protect indoor equipment from contamination that would otherwise be caused by this oil mist.

When an oil rotary pump is started at atmospheric pressure, and operated during low vacuum operation, the pump oil is exhausted along with the exhaust gas that is being pumped. This oil-laden exhaust mist, which consists of tiny oil droplets, appears as "smoke" exiting from the exhaust port of the pump. The TM and TMX series oil mist traps help to ensure a clean working environment and protect indoor equipment from contamination that would otherwise be caused by this oil mist.

When an oil rotary pump is started at atmospheric pressure, and operated during low vacuum operation, the pump oil is exhausted along with the exhaust gas that is being pumped. This oil-laden exhaust mist, which consists of tiny oil droplets, appears as "smoke" exiting from the exhaust port of the pump. The TM and TMX series oil mist traps help to ensure a clean working environment and protect indoor equipment from contamination that would otherwise be caused by this oil mist.

When an oil rotary pump is started at atmospheric pressure, and operated during low vacuum operation, the pump oil is exhausted along with the exhaust gas that is being pumped. This oil-laden exhaust mist, which consists of tiny oil droplets, appears as "smoke" exiting from the exhaust port of the pump. The TM and TMX series oil mist traps help to ensure a clean working environment and protect indoor equipment from contamination that would otherwise be caused by this oil mist.

When an oil rotary pump is started at atmospheric pressure, and operated during low vacuum operation, the pump oil is exhausted along with the exhaust gas that is being pumped. This oil-laden exhaust mist, which consists of tiny oil droplets, appears as "smoke" exiting from the exhaust port of the pump. The TM and TMX series oil mist traps help to ensure a clean working environment and protect indoor equipment from contamination that would otherwise be caused by this oil mist.

When an oil rotary pump is started at atmospheric pressure, and operated during low vacuum operation, the pump oil is exhausted along with the exhaust gas that is being pumped. This oil-laden exhaust mist, which consists of tiny oil droplets, appears as "smoke" exiting from the exhaust port of the pump. The TM and TMX series oil mist traps help to ensure a clean working environment and protect indoor equipment from contamination that would otherwise be caused by this oil mist.

When an oil rotary pump is started at atmospheric pressure, and operated during low vacuum operation, the pump oil is exhausted along with the exhaust gas that is being pumped. This oil-laden exhaust mist, which consists of tiny oil droplets, appears as "smoke" exiting from the exhaust port of the pump. The TM and TMX series oil mist traps help to ensure a clean working environment and protect indoor equipment from contamination that would otherwise be caused by this oil mist.

When an oil rotary pump is started at atmospheric pressure, and operated during low vacuum operation, the pump oil is exhausted along with the exhaust gas that is being pumped. This oil-laden exhaust mist, which consists of tiny oil droplets, appears as "smoke" exiting from the exhaust port of the pump. The TM and TMX series oil mist traps help to ensure a clean working environment and protect indoor equipment from contamination that would otherwise be caused by this oil mist.

2-stage exhaust system / with backflow prevention / with gas ballast mechanism / with thermal protector / with switch / input terminal (without cord)

2-stage exhaust system / with backflow prevention function / with gas ballast mechanism / input terminal (without cord)

2-stage evacuation system / with backflow prevention / with gas ballast mechanism / with thermal protector / with switch / with input terminal (without cord)

2-stage exhaust system / with backflow prevention function / with gas ballast mechanism / input terminal (without cord)

2-stage evacuation system / with backflow prevention / with gas ballast mechanism / with thermal protector / with switch / with input terminal (without cord)

Two-stage / terminal only (without cord) / Without thermal protector

Two-stage / with cord, and switch/with thermal protector

Two-stage / with cord, and switch/with thermal protector

Chemical type / 2-stage evacuation system / with reverse flow prevention mechanism / with gas ballast mechanism / with thermal protector / with power supply cord with plug / with switch

Chemical type / 2-stage evacuation system / with reverse flow prevention mechanism / with gas ballast mechanism / with thermal protector / with power supply cord with plug / with switch

Chemical type / 2-stage exhaust system / with reverse flow prevention mechanism / with gas ballast mechanism / with thermal protector / with switch / with terminal only cord

The oil mist trap can collect oil smoke (oil mist) discharged during operation of the oil rotary pump and automatically collect it into the vacuum pump.

Oil rotary pump Oil smoke from the exhaust port is generated especially at around atmospheric pressure. The oil may contaminate the atmosphere due to oil splashes, but this is solved by installing this oil trap.

It is also possible to replace only the element (filter).

The oil mist trap can collect oil smoke (oil mist) discharged during operation of the oil rotary pump and automatically collect it into the vacuum pump.

Oil rotary pump Oil smoke from the exhaust port is generated especially at around atmospheric pressure. The oil may contaminate the atmosphere due to oil splashes, but this is solved by installing this oil trap.

It is also possible to replace only the element (filter).

The oil mist trap can collect oil smoke (oil mist) discharged during operation of the oil rotary pump and automatically collect it into the vacuum pump.

Oil rotary pump Oil smoke from the exhaust port is generated especially at around atmospheric pressure. The oil may contaminate the atmosphere due to oil splashes, but this is solved by installing this oil trap.

It is also possible to replace only the element (filter).

Pipe connection-type oil-mist trap. When the pipe is connected, the suction gas can be discharged into the exhaust duct.
When the pipe is connected, it can be used as a normal oil-mist trap if the top cap is attached.

Exchange of only an element (filter) is also possible.

It is a pipe connection type oil mist trap. By connecting piping, the sucked gas can be exhausted to the exhaust duct.
When not piping, attach the upper cap and use it as a regular Oil mist trap.

It is also possible to replace only the element (filter).

Used to change screw diameter G3/4to G1 when you want to put an Oil-mist trap (OMT, OMI) onyour exhaust port screw G3/4 pump.

The main housing of this product is made of stainless steel and uses a filter element made of glass wool.
KF-25 clamp and Centerring needed for installation.
Since this is a closed type structure, the filter cannot be changed.

The main housing of this product is made of stainless steel and uses a filter element made of glass wool.
KF-25 clamp and Centerring needed for installation.
Since this is a closed type structure, the filter cannot be changed.

It is an air intake filter that incorporates a special filter in the stainless steel Body.

There are two types, one to prevent reverse diffusion of oil into the vacuum piping and the other to prevent mixing of powder into the vacuum pump. KF-25 clamp is required for installation.

The filter can not be replaced because it is sealed

It is an air intake filter that incorporates a special filter in the stainless steel Body.

There are two types, one to prevent reverse diffusion of oil into the vacuum piping and the other to prevent mixing of powder into the vacuum pump. KF-25 clamp is required for installation.

The filter can not be replaced because it is sealed

This is the SUCTION FILTER which special filter is built-in into the stainless body.
There are 2 types; Prevent counter flow of oil diffusion into the vacuum pipe (OFI-050C, 200C) and prevent particles into the vacuum pump. (OFI-050V, 200V)
Since this is a closed type, the filter cannot be changed.

It is an air intake filter that incorporates a special filter in the stainless steel Body.

There are two types, one to prevent reverse diffusion of oil into the vacuum piping and the other to prevent mixing of powder into the vacuum pump. KF-25 clamp is required for installation.

The filter can not be replaced because it is sealed

Optional suction pipe parts for changing the suction port diameters of vacuum pumps.
Various types are provided to meet different types of port diameters including hose port types, KF flange types, R screw types and adapters.
Refer to the table to select a suitable pipe.

Optional suction pipe parts for changing the suction port diameters of vacuum pumps.
Various types are provided to meet different types of port diameters including hose port types, KF flange types, R screw types and adapters.
Refer to the table to select a suitable pipe.

Optional suction pipe parts for changing the suction port diameters of vacuum pumps.
Various types are provided to meet different types of port diameters including hose port types, KF flange types, R screw types and adapters.
Refer to the table to select a suitable pipe.

Optional suction pipe parts for changing the suction port diameters of vacuum pumps.
Various types are provided to meet different types of port diameters including hose port types, KF flange types, R screw types and adapters.
Refer to the table to select a suitable pipe.

Optional suction pipe parts for changing the suction port diameters of vacuum pumps.
Various types are provided to meet different types of port diameters including hose port types, KF flange types, R screw types and adapters.
Refer to the table to select a suitable pipe.

Optional suction pipe parts for changing the suction port diameters of vacuum pumps.
Various types are provided to meet different types of port diameters including hose port types, KF flange types, R screw types and adapters.
Refer to the table to select a suitable pipe.

Optional suction pipe parts for changing the suction port diameters of vacuum pumps.
Various types are provided to meet different types of port diameters including hose port types, KF flange types, R screw types and adapters.
Refer to the table to select a suitable pipe.

Optional suction pipe parts for changing the suction port diameters of vacuum pumps.
Various types are provided to meet different types of port diameters including hose port types, KF flange types, R screw types and adapters.
Refer to the table to select a suitable pipe.

Optional suction pipe parts for changing the suction port diameters of vacuum pumps.
Various types are provided to meet different types of port diameters including hose port types, KF flange types, R screw types and adapters.
Refer to the table to select a suitable pipe.

Optional suction pipe parts for changing the suction port diameters of vacuum pumps.
Various types are provided to meet different types of port diameters including hose port types, KF flange types, R screw types and adapters.
Refer to the table to select a suitable pipe.

Optional suction pipe parts for changing the suction port diameters of vacuum pumps.
Various types are provided to meet different types of port diameters including hose port types, KF flange types, R screw types and adapters.
Refer to the table to select a suitable pipe.

Optional suction pipe parts for changing the suction port diameters of vacuum pumps.
Various types are provided to meet different types of port diameters including hose port types, KF flange types, R screw types and adapters.
Refer to the table to select a suitable pipe.

Optional suction pipe parts for changing the suction port diameters of vacuum pumps.
Various types are provided to meet different types of port diameters including hose port types, KF flange types, R screw types and adapters.
Refer to the table to select a suitable pipe.

Optional suction pipe parts for changing the suction port diameters of vacuum pumps.
Various types are provided to meet different types of port diameters including hose port types, KF flange types, R screw types and adapters.
Refer to the table to select a suitable pipe.

Optional suction pipe parts for changing the suction port diameters of vacuum pumps.
Various types are provided to meet different types of port diameters including hose port types, KF flange types, R screw types and adapters.
Refer to the table to select a suitable pipe.

An adaptor used to replace a KF-25 suction pipe with M20 female.
You can use KF-25 adaptor on KF-25 suction pipe devices without removing the standard suction pipe.
Applicable suction pipes
Hose port suction pipe (dia.8, dia.12, dia.15, dia.18, dia.22), A-type suction pipe / B-type suction pipe / C-type suction type

An adaptor used to replace a KF-25 suction pipe with M20 female.
You can use KF-25 adaptor on KF-25 suction pipe devices without removing the standard suction pipe.
Applicable suction pipes
Hose port suction pipe (dia.8, dia.12, dia.15, dia.18, dia.22), A-type suction pipe / B-type suction pipe / C-type suction type

An adaptor used to replace a KF-25 suction pipe with M20 female.
You can use KF-25 adaptor on KF-25 suction pipe devices without removing the standard suction pipe.
Applicable suction pipes
Hose port suction pipe (dia.8, dia.12, dia.15, dia.18, dia.22), A-type suction pipe / B-type suction pipe / C-type suction type

Optional exhaust pipe parts for changing the exhaust port diameter of vacuum pumps.
Various types are provided to meet different types of port diameters including hose port types and KF flange types.
Refer to the table to select a suitable pipe.

Optional exhaust pipe parts for changing the exhaust port diameter of vacuum pumps.
Various types are provided to meet different types of port diameters including hose port types and KF flange types.
Refer to the table to select a suitable pipe.

Optional exhaust pipe parts for changing the exhaust port diameter of vacuum pumps.
Various types are provided to meet different types of port diameters including hose port types and KF flange types.
Refer to the table to select a suitable pipe.

Optional exhaust pipe parts for changing the exhaust port diameter of vacuum pumps.
Various types are provided to meet different types of port diameters including hose port types and KF flange types.

Optional exhaust pipe parts for changing the exhaust port diameter of vacuum pumps.
Various types are provided to meet different types of port diameters including hose port types and KF flange types.
Refer to the table to select a suitable pipe.

Optional exhaust pipe parts for changing the exhaust port diameter of vacuum pumps.
Various types are provided to meet different types of port diameters including hose port types and KF flange types.
Refer to the table to select a suitable pipe.

The PMB series Ver. D is a wide use mechanical booster pump with multiple voltage motor (high efficiency). It is possible to run with air-cooled depending on use condition. And surface treatment and atmospheric operation type are selectable as option.

By using together with dry vacuum pumps, oil rotary vacuum pumps or water-sealed vacuum pumps, mechanical booster pumps can increase pumping speed in the range between 10kPa to 0.1 Pa, where roughing pump pumping speed drops. The PRC series is designed for semiconductor and liquid crystal display processes which especially require cleanliness. Atmospheric pressure start type can be selected as option.

By using together with dry vacuum pumps, oil rotary vacuum pumps or water-sealed vacuum pumps, mechanical booster pumps can increase pumping speed in the range between 10kPa to 0.1 Pa, where roughing pump pumping speed drops.

Toots type / Display by Actual Pumping Speed / With protective functions

YMV series is a frame unit for combining a mechanical booster pump and an oil rotary vacuum pump.
4 types of frame units in accordance with the pump exhaust amount have prepared.
It has an independent frame design that emphasizes the pump maintainability, making ideal for production usage.
Note: Mechanical booster pump and oil rotary vacuum pump needs to be purchased separately.

It is the small high vacuum pumping system which made a mechanical booster pump, an oil rotary vacuum pump, and piping unify compactly.
Handling and maintenance check are easy and ideal for an experiment.

The vacuum pump oil SMR-100 has a low viscosity so that it has good startability even when it is cold. Change the oil as often as possible to achieve full pump performance.

※ Do not use any pump oil other than our specification. The performance of the vacuum pump can not be achieved if oil not specified is used.
Note) Vacuum pump oil degrades with operation and causes performance shortage. Check regularly for oil loss and contamination, and replace or replace.

The genuine vacuum pump oil "ULVOIL" not only brings out the full performance of the vacuum pump, but also reduces the total cost including the extension of the pump life and maintenance period of the pump, and the operating cost.

Corrosion resistant pump Please use SO-M which has excellent corrosion resistance for GCD series.
SO-M is a synthetic oil and is most suitable for the GCD series.

※ Do not use any pump oil other than our specification. The performance of the vacuum pump can not be achieved if oil not specified is used.
Note) Vacuum pump oil degrades with operation and causes performance shortage. Check regularly for oil loss and contamination, and replace or replace

Vacuum desiccator provided by the manufacturer of the vacuum pump.