Rough&Middle Vacuum Pump

ULVAC vacuum pumps are developed based on abundant technology and experience in the vacuum field. In addition to Oil Rotary Vacuum Pumps, Dry Vacuum Pumps also have a lineup for all areas, conditions, and applications, including Roots, Diaphragms, and Pistons.

Pump Type

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Ultimate Pressure

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1.0×10-2 1.0×10-1 1.0 10.0 1.0×102 1.0×103 1.0×104 1.0×105
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select
7.5×10-5 7.5×10-4 7.5×10-3 7.5×10-2 7.5×10-1 7.5 7.5×101 7.5×102
Do not
select
1.0×10-4 1.0×10-3 1.0×10-2 1.0×10-1 1.0 1.0×101 1.0×102 1.0×103
(単位) Pa Torr mbar

Maximum Pumping Speed

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0 50 100 500 1000 3000 5000 10000 50000 105000
0 3 6 30 60 180 300 600 3000 6300
(単位) L/min m3/h

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