Mechanical Booster Pump
PMB-D
アルバック
Features
- Possible to run with air-cooled depending on use condition. Continuous operation under 200Pa. Pumping time to reach 200Pa needs to be within 10 minutes.
- Possible to select multiple voltage motor (either 200V class or multiple voltage) Compatible with universal motor and optional explosion proof motor can be equipped. Compatible with high efficiency regulation (IE2/GB3/EPAct).
- Excellent corrosion resistance surface treatment (Optional: T type) High surface hardness and excellent corrosion resistance. The surfaces of all main parts have undergone anodic oxide coating to provide excellent corrosion resistance and surface rigidity. This can restrain scratch and corrosion inside of the pump.
- Atmospheric pressure start type effective for pumping time shortening (option: inverter) Because the pump can start at the same time of roughing pump, pumping time can be shorter comparing with standard type.
- International standard for western market (Compliant with CE and cTUVus)
Applications
- Evaporation, sputtering, ion plating
- Vacuum drying, freeze drying, vacuum degassing,Analytical instruments, leak test system
- Gas exchange, filling, vacuum insulating,Heat treatment, melting furnace
- Other various kinds of vacuum system
Specifications
Model *1 | PMB100D | PMB300D | PMB600D | PMB1200D | PMB2400D | |||
Maximum pumping speed |
50 Hz |
95 m3/h (1,580 L/min) |
280 m3/h (4,670 L/min) |
500 m3/h (8,330 L/min) |
1,000 m3/h (16,667 L/min) |
2,000 m3/h (33330 L/min) |
2,500 m3/h (41,667 L/min) |
|
60 Hz |
115 (1,920) | 330 (5,500) | 600 (10,000) | 1200 (20,000) | 2,400 (40,000) | 3,100 (51,667) | ||
Maximum suction pressure |
50 Hz |
9.3×103 Pa | 1.2×103 Pa | 1.3×103 Pa | 2.0×103/8.0×102 Pa | |||
60 Hz |
6.2×103 Pa | 9.3×102 Pa | 1.1×103 Pa | 1.5×103/6.7×102 Pa | ||||
Maximum allowable differential pressure |
50 Hz |
8.0×103 Pa | 4.0×103 Pa | 7.3×103 Pa | 3.5×103/4.7×103 Pa | |||
60 Hz |
5.6×103 Pa | 3.3×103 Pa | 6.0×103 Pa | 3.0×103/4.7×103 Pa | ||||
Ultimate Pressure *2 | 4.0×10-1 Pa | 6.7×10-1 Pa | ||||||
Allowable drive pressure |
~1.0×105 Pa (Atmospheric pressure start type) | |||||||
Motor *3 |
Power | 0.4 kW (2 poles) |
0.75 kW (2 poles) |
2.2 kW (2 poles) |
3.7 kW (2 poles) |
7.5 kW (2 poles) |
||
200V class |
50 Hz |
200 V | ー | |||||
60 Hz |
200 V/220 V | ー | ||||||
Multiple voltage |
50 Hz |
220~240 V / 380~415 V | 200~240 V/380~415 V | |||||
60 Hz |
208~240 V/ 380~460 V | 200~240 V/380~460 V | ||||||
Oil *4 | ULVOIL R-42 | |||||||
Oil capacity | 0.35 L | 0.7 L | 1.5 L | 1.9 L | 4 L | |||
Cooling method *5 | Air-cooling | Air-cooling/Water-cooling | ||||||
Cooling water |
Primary side pressure |
ー | 0.3 Mpa | |||||
Inlet/outlet differential pressure |
ー | 0.05 Mpa | ||||||
Volume | ー | 2 L/min | 3 L/min | |||||
Water temprature *6 |
ー | 5~30 ℃ | ||||||
Inlet connection JIS-B-2290 |
VG50 equivalent |
VG80 equivalent | VG100 equivalent |
VG200 equivalent | ||||
Outlet connection JIS-B-2290 |
VF50 equivalent |
VF80 equivalent | VF200 equivalent | |||||
Dimensions W×D×H *7 |
267×576× 180 mm |
321×685× 260 mm |
362×784× 320 mm |
417×970× 340 mm |
520×1260×460 mm | |||
Weight | 26 kg | 51 kg | 82 kg | 115 kg | 260 kg | |||
Standard roughing pump |
VD401 | VD601 | VD901 | VS2401 | PKS-070B | VS650B | ||
Applicable standard |
CE, cTUVus | |||||||
Option | Surface treatment, Adapter flange, Explosion proof motor, Atmospheric pressure start type (Inverter), Lubrication oil, Lubrication chamber evacuation port, Horizontal exhaust direction type (PMB2400D only) |
|||||||
Atmospheric pressure start type Inverter specification/voltage |
I2,A2/200V~240V(50Hz/60Hz) 200V class | |||||||
I4,A4/380V~480V(50Hz/60Hz) 400V class |
Note)This specification uses SI measurement units. Conversion to non-SI units is as follows :
4.0 x 10-1Pa = 3.0 × 10-3 Torr
*1 Standard model are without surface treatment (Anodic oxidation coatings).
Optionaly, with surface treatment model is able to select.
*2 Measured by Pirani vacuum gauge using a standard backing pump and standard vacuum oil.
( Apprx. 4.0×10-2 Pa when measured with a McLeod vacuum gauge. )
*3 Only PMB100D is able to choose the motor of 200V class or Multiple voltage.
Multi-voltage selection for explosion-proof motor is not available.
*4 Oil for Air-cooled specifications is R-72. Oil option : Optionaly, Mineral oil (R-72),
Fluorine oil (J25F) type is able to select.
*5 By the selection of inverter mounting model, the operation of entire pressure range will be capable.
When ordering the inverter specifications, Specify Air-cooled or Water-cooled specifications.
Air-cooled operation is not possible to drive with a water-cooled inverter.
For PMB600D, 1200D and 2400D, continuous operation more than 1 hour at pressure range of
300 Pa to 4,000 Pa may cause damage to the pump.
Select water cooling type in case to use in such condition.
*6 Use in an environment where there is no condensation.
*7 For other dimensions, visit ULVAC web and refer to the posted CAD data.
Pumping Speed Curves
Dimension drawing
PMB100D | PMB300D | PMB600D | PMB1200D | PMB2400D | |
W | 267 | 321 | 362 | 417 | 520 |
D | 576 | 685 | 784 | 970 | 1260 |
H | 180 | 260 | 320 | 340 | 460 |