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Screw Type Dry Vacuum Pump
MS
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MS series is a vacuum pump which is categorized as screw type dry vacuum pump.
Corrosion resistance and powder exhaust are improved as process resistance model based on traditional LS series.
This model is designed for the process of using corrosion gas and powder exhausting.
Features
- Corrosion resistance by treating special coating for main parts such as rotor shaft and cylinder
- High performance of powder exhausting by applying ULVAC's unique design rotor shaft
- Realize continuous pumping near atmospheric pressure
Applications
- Vacuum system for semiconductor and electronic device manufacturing equipment
Etching, Ashing, Plasma cleaning, etc. - Vacuum system for furnace
Sintering, Carburizing, etc. - Vacuum system for Li-ion battery manufacturing equipment
Electrode drying, Degassing, Vacuum injection, etc. - Vacuum system for medical and food
Freeze dry, Vacuum dry, etc.
＊MS1200A is available separately with additional control board and sensors.Please contact us for details.
Specifications
| Model | MS120A | MS600A | MS1200A | |
| Max.pumping speed *1 | m3/h | 115 | 560 | 980 |
| Ultimate pressure | Pa | ≦0.6 | ≦0.1 | |
| Power supply | 200V Class：3Phase, 50/60Hz, AC200-240V±10% or 400V Class：3Phase, 50/60Hz, AC380-480V±10% | |||
| Power consumption *2 | kW | 2.4 | 3.1 | 3.1 |
| Cooling water flow rate | L/min | >4.0 | ||
| Purge gas flow rate *1 | SLM | 0~50 | ||
| Max.water vapor tolerance *1*3 | kg/h | 1.5 | ||
| Noise *2 | dB(A) | 61 | 62 | 64 |
| Inlet port | KF50(Horizontal) / VG50(Vertical) | ISO-F-80 | ISO-F-100 | |
| Outlet port | KF40 | |||
| Weight *4 | kg | 139 | 241 | 264 |
| Applicable standard | CE、cTUVus | |||
| Standard accessory | Quick manual, Power connector, Waterproof cable clamp, Remote connector, Guard for power connector, Silencer | |||
| Pump head option | Power supply：200V Class or 400V Class Material of seal：FKM or FFKM |
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| External option | Packege Exhaust port, Earthquake-proof Bracket, LR compatible Unit(Inlet, Remote), Purge gas valve | |||
*1：reference value
*2：At ultimate pressure (reference only)
*3：Max.water vapor tolerance is a value when purge gas is used.
*4：Including a silencer
Pumping Speed Curves
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Dimension drawing
