Screw Type Dry Vacuum Pump Model:LS
ULVAC
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Model:LS is selectable from 4 different pumping speed(120-1200m3/h) by depending on the application.
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LS120A
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LS300A
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LS600A
Features
- 'High pumping speed
High pumping speed at near atmospheric pressure, and pumping down time can be drastically reduced - Low power consumption
ECO-SHOCK technology realizes low power consumption. (C Type)
Power consumption at the ultimate pressure is the industry-leading 0.6kW or less.(LS120A-C) - Built-in silencer achieves the noise level 61dB(A) or less.
- Low running-cost
No shaft sealing gas.
*Purge gas is available with L Type. - Pumping speed120~1200m3/h Class *With mecanical booster pump
Optimum model is selectable by depending on the application
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Applications
C type : Clean process (LS***A-C)
Feature : Low power consumption model (with built-in ECO-SHOCK)
Applications : For clean process such as air and N2 G14 Sputtering / Vapor deposition /
Lamination / Load lock room / TMP backing pump etc.
L type : Light process (LS***A-L)
Features :Light process model (with surface treatment and purge function)
Applications : For light process such as steam and volatile liquid medicine / Vacuum drying /
Freezedrying / Ashing / General industrial use etc.
Specifications
| Model | （C：C Type） （L：L Type） |
LS120A | LS300A | LS600A | LS1200A | |||||
| C | L | C | L | C | L | C | L | |||
| Max.pumping speed | m3/h | 120 | 380 | 600 | 1000 | |||||
| Ultimate pressure | Pa | ≦0.6 | ≦0.1 | |||||||
| Power supply | 200V Class：3Phase,50/60Hz,AC200-240V or 400V Class：3Phase,50/60Hz,AC380-480V | |||||||||
| Power consumption *1 | kW | 0.6 | 2.0 | 1.0 | 2.5 | 1.3 | 2.6 | 1.3 | 2.7 | |
| Cooling water flow rate |
L/min | >2.0 | >4.0 | |||||||
| Purge gas flow rate *2 |
SLM | ‐ | 0～50 | ‐ | 0～50 | ‐ | 0～50 | ‐ | 0～50 | |
| Max.water vapor tolerance *3 |
kg/h | ‐ | 1.5 | ‐ | 1.5 | ‐ | 1.5 | ‐ | 1.5 | |
| Noise *1 | dB(A) | 61 | 61 | 62 | 64 | |||||
| Inlet port | Inlet port KF50(Horizontal)／ VG50(Vertical) |
ISO-F-50 | ISO-F-80 | ISO-F-100 | ||||||
| Outlet port | KF40 | KF40 | KF40 | KF40 | ||||||
| Weight | kg | 142 | 220 | 242 | 266 | |||||
| Applicable standard | CE、cTUVus | |||||||||
| Standard accessory | Power connector, Waterproof cable clamp, Remote connector, Guard for power connector | |||||||||
| Pump head option | Power supply：200V Class or 400V Class, Material of seal：FFKM(L type only) | |||||||||
| External option | MBP inlet flange adaptor, Packege Exhaust port, Earthquake-proof Bracket, LR compatible Unit(Inlet, Remote), Purge gas valve |
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*1： At ultimate pressure (reference only)
*2： Purge gas is not available with C Type.
*3： Max.water vapor tolerance is a value when purge gas is used.
Note)C type is not leakless.
