Multi-Stage Roots Type Dry Vacuum Pump Model: ECO-SHOCK
ULVAC
For more information on ULVAC products, purchase, and/or consideration, click here.
by attaching to the dry pump exhaust line
Features
- Energy saving
Max.80% reduction of power consumption of the dry pump.
Also, ECO-SHOCK enable to save the cost of air conditioning because it helps to reduce heat generation from the pump.
* ECHO-SHOCK is not available for the pump which evacuates flammable and
toxic corrosive gas spiecies. - Pump performance improovement
Reduce the noise level while pumping.
No reduction of pumping performance at all pressure range.
Most effective for long continuous pumping time less than 1000Pa.
*ECO-SHOCK is capable to use with the dry pump that exhaust port can be in vacuum condition. - Simple installation
Applications
- Dry vacuum pumps for evacuating iner gases such as air, nitrogen or argon.
- Dry vacuum pumps used with sputtering or loading / unloading chambers.
Specifications
| Model | ES10 | ES4A | |||
| Power supply | Specification | 100 to 220 VAC, 50 / 60 Hz, single-phase | AC200 - 220V±5% 50/60Hz single-phase | ||
| Power consumption |
65W *1 | 400W | |||
| Control | Input | Remote start / stop (DC 24V contact with voltage) Non-voltage contact with contact capacity of 2.0 A Min. required. *2 |
|||
| Output | Overcurrent alarm output (non-voltage contact) Contact capacity : DC 24V, 1.0 A |
Activation checker, Energy saving checker, Main unit alarm, Over-current alarm |
|||
| Display | Display of operation time | Display Running time, Activation checker, Energy saving checker, Main unit alarm, Over-current alarm |
|||
| Dimensions | Eco-Shock | 175mm x 310mm x 240mm | 250mm x 475mm x 373mm | ||
| Valve unit | Φ66mm×110mm(NW40) *3 | Option | |||
| Weight | Eco-Shock：8.3kg Valve unit：800g | ||||
| Connection | Connection port |
G1/4" (INLET, OUTLET) The connector has been installed. |
Φ16mm tube connector (Recommend for tubing length of 1.5m less) |
||
*1: Pressure is at ultimate puressure and gas for shaft seal and gas ballast are 0Pam3/s
*2: Pin jumper connection is required to operate the manual Start/Stop by circuit protector.(for ES4A)
*3: Valve unit for ES4A is attached when you order ES4A.
Effects
ES4A
| ULVAC pump model | LR1800 | LR3601-R | ||
| Pumping speed *1 | Mechanical booster pump | 1784 m3/hr (29700 L/min) | 3200 m3/hr (53333 L/min) | |
| Dry pump | 237 m3/hr (3950 L/min) | 440 m3/hr (7333 L/min) | ||
| Average power consumption *2 *3 |
At ultimate pressure |
Without ES4A | 6.0 kW | 7.8 kW |
| With ES4A | 2.7 kW | 3.2 kW | ||
| Power save | 55 % | 59 % | ||
| At repeatable pumping *4 |
Without ES4A | 7.2 kW | 9.6 kW | |
| With ES4A | 5.7 kW | 6.3 kW | ||
| Power save | 21 % | 34 % | ||
*1 At 60Hz power
*2 At Seal Gas 5SLM
*3 Include ES4A Power
*4 Measure example of 300L chamber repeatedly air exhaust in the tact of 60 seconds.
ES10
| Model | LR60 | LR90 | LR180 |
| Evacuation speed*1 | 1300L/min | 2100L/min | 3980L/min |
| Measured power Consumption*2 | 2.1kW | 3.6kW | 6.6kW |
| Measured power consumption with ECO-SHOCK attached *2 *3 *4 |
0.7kW | 1.0kW | 1.6kW |
| Power reduction rate | 67% | 72% | 76% |
*1 At 60Hz power.
*2 Power consumption at ultimate pressure.
*3 Including power consumption of ECO-SHOCK.
*4 Reading at ultimate pressure, with shaft seal and gas ballast at 0Pa・m3/s.
These valves change slightly depending on the gas flow at ballast and shaft seal.
Dimension drawing
Valve unit dimension drawing
|
|
 |
