Multi-Stage Roots Type Dry Vacuum Pump Model: GR
ULVAC
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Based on many years of experience with the "Model:LR/HR" ULVAC has introduced the "Model:GR" Dry Vacuum pump with a simple and clean design for general industrial applications.
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GR60
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GR90
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GR180
Features
- Particularly useful for high load applications such as repeated pump down between atmospheric pressure and vacuum and continuous running in the high pressure range.
- Useful for load/unload lock chambers which require high throughput.
- A universal induction motor is used. An explosion proof motor is available as an option.
- Applying multi voltage motor
Applications
- Clean gas vacuum pumping such as air, inert gas.
- Load/unload lock chambers of various types of deposition equipment.
- General industrial applications such as vacuum dryer, vacuum gas exchange in vacuum heat insulation and gas charging, vacuum degassing, etc.
Specifications
| Model | GR60A | GR90A | GR180A | |||||
| Max.pumping speed |
50Hz | m3/h(L/min) | 62(1030) | 112(1860) | 183(3100) | |||
| 60Hz | m3/h(L/min) | 80(1333) | 126(2100) | 237(3850) | ||||
| Ultimate pressure *1 | Pa | 5.0 | ||||||
| Maximum inlet pressure | Atmospheric pressure | |||||||
| Maximum exhaust pressure | Pa | 1.0 to Atmospheric pressure | ||||||
| Inlet port | VG50 | VG80 | ||||||
| Outlet port | NW40 | |||||||
| Surface treatment | 〇 | |||||||
| Motor | Output [kW] | 2.2 | 3.7 | 7.5 | ||||
| Voltage [V] | 50Hz | 200 - 240/380 - 415 | ||||||
| 60Hz | 200 - 240/380 - 460 | |||||||
| Weight | kg | 128 | 188 | 268 | ||||
| Cooling water | Supply pressure |
MPa | 0.1 - 0.3 | |||||
| In/Out difference pressure |
MPa | >0.1 | ||||||
| Temperature | ℃ | 10 - 30 *2 | ||||||
| Flow rate | L/min | >5.0 | ||||||
| N2 | Primary side supply pressure |
MPa | 0.1 - 0.5 | |||||
| Secondary side regulated pressure *3 |
MPa | 0.05 to 0.1 (at running) | ||||||
| Shaft | SLM | 5.0 *4 | ||||||
*1 Ultimate pressure is the value when the nitrogen gas (shaft seal gas) is at 5.0SLM.
*2 Non condensing.
*3 Value indicated on pressure gauge is adjusted by a gas regulator.
*4 Flow rate of nitrogen gas (shaft seal gas) is fixed at 5.0SLM.
Accessory
| Model | Material | Surface treatment |
Weight (kg) | Flange Connection |
GR60A | GR90A | GR180A | |
| Silencer | RS-01+ kit A |
SUS304 | GBB treatment |
4.1 | KF40 | 〇 | 〇 | - |
| RS-01+ kit C |
SUS304 | GBB treatment |
8.3 | KF40 | - | - | 〇 | |
Pumping Speed Curves
Dimension drawing
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