Optional Parts Maintenace Kit Model:DAT-100S
ULVAC
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These are consumable parts and need to be replaced regularly.
Dimension Diagram and Correspondence Table
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Maintenance Kit List
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Remarks
Parts replacement cycle differs depending on how it has been used. Please refer to the Instruction Manual for the regular inspection, replacement cycle.
Please call us in case if you have no technical knowledge nor the experience of disassemble/reassemble.
Compatible mode : DAT-100S
