High Vacuum Pump｜Products｜ULVAC SHOWCASE

High Vacuum Pump

ULVAC vacuum pumps are developed based on abundant technology and experience in the vacuum field. We have a lineup of vacuum pumps for all areas, conditions, and applications such as Turbo Molecular Pumps, Cryopumps and Sputter Ion Pumps.

Pump Type

  • Select series
  • Select condition
  • Cryo Pump
  • Super Trap
  • Turbo Molecular Pump
  • Ion Pump
  • Oil Diffusion Ejector Pump
  • Vacuum Pumping System

Ultimate Pressure

※Scroll through the Table
Do not
select		 1.0×10-10 1.0×10-8 1.0×10-6 1.0×10-4 1.0×10-2 1.0 1.0×102 1.0×103
Do not
select		 7.5×10-13 7.5×10-11 7.5×10-9 7.5×10-7 7.5×10-5 7.5×10-3 7.5×10-1 7.5
Do not
select		 1.0×10-12 1.0×10-10 1.0×10-8 1.0×10-6 1.0×10-4 1.0×10-2 1.0 1.0×101
（単位） Pa Torr mbar

Pumping Speed

※Scroll through the Table
0 100 500 2000 3000 4000 5000 10000 50000 70000
（単位） L/s

Product type

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