High Vacuum Pump

ULVAC vacuum pumps are developed based on abundant technology and experience in the vacuum field. We have a lineup of vacuum pumps for all areas, conditions, and applications such as Turbo Molecular Pumps, Cryopumps and Sputter Ion Pumps.

Pump Type

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Ultimate Pressure

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1.0×10-10 1.0×10-8 1.0×10-6 1.0×10-4 1.0×10-2 1.0 1.0×102 1.0×103
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7.5×10-13 7.5×10-11 7.5×10-9 7.5×10-7 7.5×10-5 7.5×10-3 7.5×10-1 7.5
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1.0×10-12 1.0×10-10 1.0×10-8 1.0×10-6 1.0×10-4 1.0×10-2 1.0 1.0×101
(単位) Pa Torr mbar

Pumping Speed

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0 100 500 2000 3000 4000 5000 10000 50000 70000
(単位) L/s

Product type

Flange

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