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Ion Pump
PST
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Sputter ion pumps are used to create ultra-high vacuum for various analyzers and accelerators.
ULVAC's sputter ion pumps aredesigned to apply new elements and optimize magnetic fields for improving evacuation characteristics at ultra-high and extremely high vacuum.
ULVAC's sputter ion pumps aredesigned to apply new elements and optimize magnetic fields for improving evacuation characteristics at ultra-high and extremely high vacuum.
Features
- Available for ultimate pressure (10-9Pa order) ULVAC achieved the order with
test dome complying with ISO standards. - Double the pumping performance achieved by the inert gas enhanced pumping model (type AU)
(compared with the ULVAC's conventional pumps) - High pumping speed attained the ultra-high vacuum
- Pumping down to ultra-high vacuum in a short period of time
- Top-notch pumping characteristics in ultra high vacuum
(discharging maintained down to the ultra-high vacuum)
Applications
- Accelerators
- Electron microscopes
- Electron drawing device
- Precision analyzers which dislike vibration
Specifications
| Model | PST-030CU | PST-030AU | PST-050CU | PST-050AU | PST-100CX | PST-100AX | |
| Target gas | Standard gas | Inert gas | Standard gas | Inert gas | Standard gas | Inert gas | |
| Pumping speed* (Regenerating evacuation speed) |
0.03m3/s (N2 gas pumping) |
0.013m3/s (Ar gas pumping) |
0.045m3/s (N2 gas pumping) |
0.016m3/s (Ar gas pumping) |
0.10m3/s (N2 gas pumping) |
0.05m3/s (Ar gas pumping) |
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| Ultimate pressure | 10-9Pa | ||||||
| Operating pressure*3 | <8.0×10-3Pa | <5.0 x 10-3Pa | |||||
| Inner volume | 0.67 X 10-3m3 | 1.3x10-3m3 | 3.3x10-3m3 | ||||
| Element number | CU sell×1 | AU sell×1式 | CU sell×1 | AU sell×1 | CX sell×1 | AX sell×1 | |
| Connection flange type | UFC070 | UFC114 | UFC152 | ||||
| Applied voltage | DC+7.5kV | ||||||
| Power for heater |
Single phase | No setting | AC200V, 300W | AC200V, 320W | |||
| Bake-out temparature | 250℃ | ||||||
| Weight | 9.5 kg | 12kg | 37kg | ||||
| Dimension | W x H x D | 103×183×187 mm | 153×204×241mm | 155×336×340mm | |||
| Operating environment |
Temparature | 5~40℃ | |||||
| Humidity | 85% or less(without condensation) | ||||||
| Pump fixing bolt hole | 4 points-M5 Depth 10mm |
4 points-M8 Depth 6mm |
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| Recommended controller | GST-07L-B | ||||||
* Value when using GST-07L.
| Model | PST-110AU | PST-200CXII | PST-200AXII | PST-400CXII | PST-400AXII | |
| Target gas | Standard gas | Standard gas | Inert gas | Standard gas | Inert gas | |
| Pumping speed* (Regenerating evacuation speed) |
0.11m3/s (N2 gas pumping) |
0.2m3/s (N2 gas pumping) |
0.02m3/s (Ar gas pumping) |
0.36m3/s (N2 gas pumping) |
0.19m3/s (Ar gas pumping) |
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| Ultimate pressure | 10-9Pa | 10-10Pa | ||||
| Operating pressure*3 | <4.5x10-3Pa | <3.8x10-3Pa | <3.0x10-3Pa | |||
| Inner volume | 6.5x10-3m3 | 11x10-3m3 | 14x10-3m3 | |||
| Element number | AU sellx1 | CX sell×2 | AX sell×2 | CX sell×4 | AX sell×4 | |
| Connection flange type | UFC152 | UFC203 | ||||
| Applied voltage | DC+7.5kV | |||||
| Power for heater |
Single phase | No setting | AC200V, 600W | AC200V, 800W | ||
| Bake-out temparature | 250℃ | |||||
| Weight | 36.5kg | 65kg | 124kg | |||
| Dimension | W x H x D | 171×387×293mm | 296×361×376mm | 296×544×376mm | ||
| Operating environment |
Temparature | 5~40℃ | ||||
| Humidity | 85% or less(without condensation) | |||||
| Pump fixing bolt hole | 4 points-M6 Depth 15mm |
4 points-M8 Depth 15mm |
6 points-M8 Depth 15mm |
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| Recommended controller | GST-07L-B | |||||
* Value when using GST-07L.
Controller of PST series
| Model | GST-07L-B | |
| Input specification | Input voltage, current |
AC100～115V±10% ・ 50/60Hz～3.0A |
| AC200～240V±10% ・ 50/60Hz～1.5A | ||
| Leakage current | 6mA以下 | |
| Input voltage reshuffing |
Manual(Operation with the power supply inside DIP switch) | |
| Output specification | Rated voltage | DC+7.5kV |
| Output current | Rated current | Less than DC30mA |
| Output polarity | Positive polarity | |
| Output properties | Constant voltage characteristic | |
| Display method | Digital display (7-segment LEDs） | |
| Display contents | Output current | 1µA～30mA(Automatic selection of two ranges: mA, µA) |
| Output voltage | 0.0～7.5 kV DC | |
| Pressure display | 1×10-8～1×10-2 Pa | |
| 1×10-10～1×10-4 mbar | ||
| Pressure set point | 2 points | |
| Protection functions | Error display/various protection functions are available | |
| High voltage(HV) output shutdown(ERR. 0 to 8 light) | ||
| Restoration after power failure | Automatic restroration after power failure is available when the HV-ON switch is ON. |
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| External control functions | Various input/output functions are available(with REMOTE connector), RS-232C communication control is equipped. |
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| Monitor terminal | Output of signals proportionate to 7-segment panel display, DC 0 to 10V full scale for each range |
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| Allowable load impedance 100kΩ or more. | ||
| REMOTE/LOCAL | Switchable on the front control panel | |
| Cooling method | Foreced air cooling | |
| Weight | Body | 4.0kg |
| Dimensions | W×H×D | 200 x 99 x 370 mm (excluding rack mounting fixtures) |
| Ambient operating conditions |
Temperature | 0 to 40℃ |
| Humidity | Less than 85% (not condensing) | |
| Applicable standard | CE, cTUVus | |
Pumping Speed Curves
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Dimension drawing
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