CRYO-U8H-U

アルバック・クライオ

CRYO-U series is a cryopump that uses a two-stage type GM cryocooler, and It is capable of high vacuum pumping.
A wide range of products from small- to large-type are available according to the applications including FPD, semiconductors, electronic equipment, optics, and R&D.

Features

Interchangeable with the CT-8 from CTI.
High hydrogen pumping capacity.
Multiple operation (up to 3 units)

Specifications

Pumping speeds(20degrees)	Nitrogen	L/s	1,700
	Hydrogen		2,700
	Argon		1,400
	Water		4,000
Ultimate pressure	Pa(Torr)		10^-7(10^-9)
Maximum throughput	Argon	Pa・L/s(Torr・L/s)	1.2×10³(8.9)
Pumping capacity	Argon	Pa・L(Torr・L)	1.0×10⁸(7.6×10⁵)
Pumping capacity	Hydrogen	Pa・L(Torr・L)	1.0×10⁶(7.6×10³)
Cooldown time	min(Hz)		100/90(50/60)
Mounting flange			UVG-200,6^BANSI,UFC-253
Compressor unit			C10T,C10AT
Weight of cryopump		Kg	20.8

*Maintenance interval: every 16,000 hours

該非判定結果報告書 Download

SDS Download

Accessories and Consumables

Cryo Pump

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CRYO-U8H-U

Features

Specifications

該非判定結果報告書 Download

SDS Download

Accessories and Consumables

Instruction Manuals and Specifications Download

Applications Download

Technical drawings Download

Technical Data Download

Features

Specifications