Cryo Pump

"Model:CRYO-U4H"is a cryopump that uses a two-stage type GM cryocooler, and It is capable of high vacuum pumping.
A wide range of products from small- to large-type are available according to the applications including FPD, semiconductors, electronic equipment, optics, and R&D.

"Model:CRYO-U6H"is a cryopump that uses a two-stage type GM cryocooler, and It is capable of high vacuum pumping.
A wide range of products from small- to large-type are available according to the applications including FPD, semiconductors, electronic equipment, optics, and R&D.

"Model:CRYO-U8H"is a cryopump that uses a two-stage type GM cryocooler, and It is capable of high vacuum pumping.
A wide range of products from small- to large-type are available according to the applications including FPD, semiconductors, electronic equipment, optics, and R&D.

"Model:CRYO-U8H-U"is a cryopump that uses a two-stage type GM cryocooler, and It is capable of high vacuum pumping.
A wide range of products from small- to large-type are available according to the applications including FPD, semiconductors, electronic equipment, optics, and R&D.

"Model:CRYO-U8HL"is a cryopump that uses a two-stage type GM cryocooler, and It is capable of high vacuum pumping.
A wide range of products from small- to large-type are available according to the applications including FPD, semiconductors, electronic equipment, optics, and R&D.

"Model:CRYO-U8HSP"is a cryopump that uses a two-stage type GM cryocooler, and It is capable of high vacuum pumping.
A wide range of products from small- to large-type are available according to the applications including FPD, semiconductors, electronic equipment, optics, and R&D.

"Model:CRYO-U10HSP"is a cryopump that uses a two-stage type GM cryocooler, and It is capable of high vacuum pumping.
A wide range of products from small- to large-type are available according to the applications including FPD, semiconductors, electronic equipment, optics, and R&D.

"Model:CRYO-U12H" is a cryopump that uses a two-stage type GM cryocooler, and It is capable of high vacuum pumping.
A wide range of products from small- to large-type are available according to the applications including FPD, semiconductors, electronic equipment, optics, and R&D.

"Model:CRYO-U12HL"is a cryopump that uses a two-stage type GM cryocooler, and It is capable of high vacuum pumping.
A wide range of products from small- to large-type are available according to the applications including FPD, semiconductors, electronic equipment, optics, and R&D.

"Model:CRYO-U12HSP"is a cryopump that uses a two-stage type GM cryocooler, and It is capable of high vacuum pumping.
A wide range of products from small- to large-type are available according to the applications including FPD, semiconductors, electronic equipment, optics, and R&D.

"Model:CRYO-U16"is a cryopump that uses a two-stage type GM cryocooler, and It is capable of high vacuum pumping.
A wide range of products from small- to large-type are available according to the applications including FPD, semiconductors, electronic equipment, optics, and R&D.

"Model:CRYO-U16P"is a cryopump that uses a two-stage type GM cryocooler, and It is capable of high vacuum pumping.
A wide range of products from small- to large-type are available according to the applications including FPD, semiconductors, electronic equipment, optics, and R&D.

"Model:CRYO-U20P"is a cryopump that uses a two-stage type GM cryocooler, and It is capable of high vacuum pumping.
A wide range of products from small- to large-type are available according to the applications including FPD, semiconductors, electronic equipment, optics, and R&D.

"Model:CRYO-U20H"is a cryopump that uses a two-stage type GM cryocooler, and It is capable of high vacuum pumping.
A wide range of products from small- to large-type are available according to the applications including FPD, semiconductors, electronic equipment, optics, and R&D.

"Model:CRYO-U22P"is a cryopump that uses a two-stage type GM cryocooler, and It is capable of high vacuum pumping.
A wide range of products from small- to large-type are available according to the applications including FPD, semiconductors, electronic equipment, optics, and R&D.

"Model:CRYO-U22WB"is a cryopump that uses a two-stage type GM cryocooler, and It is capable of high vacuum pumping.
A wide range of products from small- to large-type are available according to the applications including FPD, semiconductors, electronic equipment, optics, and R&D.

"Model:CRYO-U22H"is a cryopump that uses a two-stage type GM cryocooler, and It is capable of high vacuum pumping.
A wide range of products from small- to large-type are available according to the applications including FPD, semiconductors, electronic equipment, optics, and R&D.

"Model:CRYO-U30H"is a cryopump that uses a two-stage type GM cryocooler, and It is capable of high vacuum pumping.
A wide range of products from small- to large-type are available according to the applications including FPD, semiconductors, electronic equipment, optics, and R&D.

This product is necessary to operate the cryopump.
Compressed helium gas is sent to a refrigerator, and high-temperature helium gas that is returned from the refrigerator is cooled and circulated.

This product is necessary to operate the cryopump.
Compressed helium gas is sent to a refrigerator, and high-temperature helium gas that is returned from the refrigerator is cooled and circulated.

This product is necessary to operate the cryopump.
Compressed helium gas is sent to a refrigerator, and high-temperature helium gas that is returned from the refrigerator is cooled and circulated.

This product is necessary to operate the cryopump.
Compressed helium gas is sent to a refrigerator, and high-temperature helium gas that is returned from the refrigerator is cooled and circulated.

This product is necessary to operate the cryopump.
Compressed helium gas is sent to a refrigerator, and high-temperature helium gas that is returned from the refrigerator is cooled and circulated.

This product is necessary to operate the cryopump.
Compressed helium gas is sent to a refrigerator, and high-temperature helium gas that is returned from the refrigerator is cooled and circulated.

This product is necessary to operate the cryopump.
Compressed helium gas is sent to a refrigerator, and high-temperature helium gas that is returned from the refrigerator is cooled and circulated.

This product is necessary to operate the cryopump.
Compressed helium gas is sent to a refrigerator, and high-temperature helium gas that is returned from the refrigerator is cooled and circulated.

This product is necessary to operate the cryopump.
Compressed helium gas is sent to a refrigerator, and high-temperature helium gas that is returned from the refrigerator is cooled and circulated.

This product is necessary to operate the cryopump.
Compressed helium gas is sent to a refrigerator, and high-temperature helium gas that is returned from the refrigerator is cooled and circulated.

This product is a Dry N2 gas purge unit for regeneration.
It certainly shortens the time of temperature rise.

This product is a Dry N2 gas purge unit for regeneration.
It certainly shortens the time of temperature rise.

This product is a Dry N2 gas purge unit for regeneration.
It certainly shortens the time of temperature rise.

This product is easy to install and can shorten the time of regeneration certainly.
It promotes the evaporation of the moisture that is exhausted and helps to shorten the time of temperature rise and roughing time when the cryopump regenerates.

This product is easy to install and can shorten the time of regeneration certainly.
It promotes the evaporation of the moisture that is exhausted and helps to shorten the time of temperature rise and roughing time when the cryopump regenerates.

This product is easy to install and can shorten the time of regeneration certainly.
It promotes the evaporation of the moisture that is exhausted and helps to shorten the time of temperature rise and roughing time when the cryopump regenerates.

This product is easy to install and can shorten the time of regeneration certainly.
It promotes the evaporation of the moisture that is exhausted and helps to shorten the time of temperature rise and roughing time when the cryopump regenerates.

This product is easy to install and can shorten the time of regeneration certainly.
It promotes the evaporation of the moisture that is exhausted and helps to shorten the time of temperature rise and roughing time when the cryopump regenerates.

This product is easy to install and can shorten the time of regeneration certainly.
It promotes the evaporation of the moisture that is exhausted and helps to shorten the time of temperature rise and roughing time when the cryopump regenerates.

This product is easy to install and can shorten the time of regeneration certainly.
It promotes the evaporation of the moisture that is exhausted and helps to shorten the time of temperature rise and roughing time when the cryopump regenerates.

This product is easy to install and can shorten the time of regeneration certainly.
It promotes the evaporation of the moisture that is exhausted and helps to shorten the time of temperature rise and roughing time when the cryopump regenerates.

This product is easy to install and can shorten the time of regeneration certainly.
It promotes the evaporation of the moisture that is exhausted and helps to shorten the time of temperature rise and roughing time when the cryopump regenerates.

This product is easy to install and can shorten the time of regeneration certainly.
It promotes the evaporation of the moisture that is exhausted and helps to shorten the time of temperature rise and roughing time when the cryopump regenerates.

This product is a temperature display of cryopumps.
It is connected to the cryo-thermocouple thermometer MBS-C and displays the temperature of the cryopump digitally.

This product is a temperature display of cryopumps.
It is connected to the cryo-thermocouple thermometer MBS-C and displays the temperature of the cryopump digitally.