Cryo Pump Model: CRYO-U20H
ULVAC CRYOGENICS
Print/Download
For more information on ULVAC products, purchase, and/or consideration, click here.
"Model:CRYO-U20H"is a cryopump that uses a two-stage type GM cryocooler, and It is capable of high vacuum pumping.
A wide range of products from small- to large-type are available according to the applications including FPD, semiconductors, electronic equipment, optics, and R&D.
A wide range of products from small- to large-type are available according to the applications including FPD, semiconductors, electronic equipment, optics, and R&D.
Specification
| Pumping speed(20℃) | Nitrogen | L/s | 10,000 |
| Hydrogen | 18,000 | ||
| Argon | 8,400 | ||
| Water | 29,000 | ||
| Ultimate pressure | Pa(Torr) | 10-7(10-9) | |
| Maximum flow | Argon | Pa・L/s(Torr・L/s) | 1.7×103(12.8) |
| Pumping capacity | Argon | Pa・L(Torr・L) | 5.8×108(4.4×106) |
| Hydrogen | 4.6×106(3.4×104) | ||
| Colddown time (Power cycle) |
min(Hz) | 160/140(50/60) | |
| Mounting flange | UVG-500,20BANSI,ISO-500 | ||
| Compressor unit | C30PVRT | ||
| Weight | Kg | 72.0 | |
*Maintenance interval：16,000 hours
Dimensions (mm)
