Cryo Pump CRYO-U22H
ULVAC CRYOGENICS
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CRYO-U series is a cryopump that uses a two-stage type GM cryocooler, and It is capable of high vacuum pumping.
A wide range of products from small- to large-type are available according to the applications including FPD, semiconductors, electronic equipment, optics, and R&D.
A wide range of products from small- to large-type are available according to the applications including FPD, semiconductors, electronic equipment, optics, and R&D.
Features
- Suitable for large deposition systems.
- Larger pumping speed for water.
Specification
| Pumping speeds(20℃) | Nitrogen | L/s | 17,000 |
| Hydrogen | 25,000 | ||
| Argon | 14,000 | ||
| Water | 39,000 | ||
| Ultimate pressure | Pa(Torr) | 10-7 (10-9) | |
| Maximum flow rate | Argon | Pa・L/s(Torr・L/s) | 4.1×103 (31) |
| Pumping capacity | Argon | Pa・L(Torr・L) | 8.1×108 (6.1×106) |
| Hydrogen | 8.5×106 (6.4×104) | ||
| Cooldown time (Power cycle) |
min(Hz) | 150/135 (50/60) | |
| Mounting flange | UVG-550 | ||
| Compressor unit | C30VRT×2 | ||
| Weight | Kg | 125.0 | |
*Maintenance interval：16,000 hours
U22H,U30H fall under category of export contol products
Corresponds to export control product suach as strategic time
Please take nessecary procedure for Export permisson from Japan goverment
Dimension (Unit:mm)
