Cryo Pump Model:CRYO-U8H
ULVAC CRYOGENICS
Print/Download
For more information on ULVAC products, purchase, and/or consideration, click here.
"Model:CRYO-U8H"is a cryopump that uses a two-stage type GM cryocooler, and It is capable of high vacuum pumping.
A wide range of products from small- to large-type are available according to the applications including FPD, semiconductors, electronic equipment, optics, and R&D.
A wide range of products from small- to large-type are available according to the applications including FPD, semiconductors, electronic equipment, optics, and R&D.
Features
- Light-weight and compact. A large number have already been shipped. Our standard cryopump.
- For experimental systems and small-size equipments.
- Multiple operation (up to 3 units)
- Ultra-high vacuum (10-8 Pa or lower)
Specification
| Pumping speed(20℃) | Nitrogen | L/s | 1,700 |
| Hydrogen | 2,700 | ||
| Argon | 1,400 | ||
| Water | 4,000 | ||
| Ultimate pressure | Pa(Torr) | 10-7(10-9) | |
| Maximum flow rate | Argon | Pa・L/s(Torr・L/s) | 1.2×103(8.9) |
| Pumping capacity | Argon | Pa・L(Torr・L) | 1.0×108(7.6×105) |
| Hydrogen | 1.0×106(7.6×103) | ||
| Cooldown time (Power cycle) |
min(Hz) | 100/90(50/60) | |
| Mounting flange | UVG-200,6BANSI,UFC-253 | ||
| Compressor unit | C10T,C10AT | ||
| Weight | Kg | 20.8 | |
*Maintenance interval：16,000 hours
Dimensions (unit:mm)
