CRYO-U8H

アルバック・クライオ

CRYO-U series is a cryopump that uses a two-stage type GM cryocooler, and It is capable of high vacuum pumping.
A wide range of products from small- to large-type are available according to the applications including FPD, semiconductors, electronic equipment, optics, and R&D.

Features

Light-weight and compact. A large number have already been shipped. Our standard cryopump.
For experimental systems and small-size equipments.
Multiple operation (up to 3 units)
Ultra-high vacuum (10-8 Pa or lower)

Specification

Pumping speed(20℃)	Nitrogen	L/s	1,700
	Hydrogen		2,700
	Argon		1,400
	Water		4,000
Ultimate pressure	Pa(Torr)		10^-7(10^-9)
Maximum flow rate	Argon	Pa・L/s(Torr・L/s)	1.2×10³(8.9)
Pumping capacity	Argon	Pa・L(Torr・L)	1.0×10⁸(7.6×10⁵)
Pumping capacity	Hydrogen	Pa・L(Torr・L)	1.0×10⁶(7.6×10³)
Cooldown time (Power cycle)	min(Hz)		100/90(50/60)
Mounting flange			UVG-200,6^BANSI,UFC-253
Compressor unit			C10T,C10AT
Weight		Kg	20.8

*Maintenance interval：16,000 hours

Dimensions (unit:mm)

該非判定結果報告書 Download

SDS Download

Accessories and Consumables

Cryo Pump

Regeneration Gas Purge PR Unit PR1A Regeneration Gas Purge PR Unit PR2A Regeneration Gas Purge PR Unit PR3A Band Heater RBH-6 Band Heater RBH-8 Band Heater RBH-8HSP Band Heater RBH-10 Band Heater RBH-12 Band Heater RBH-16 Band Heater RBH-20 Band Heater RBH-22 Band Heater BH-22P Band Heater RBH-30

CRYO-U8H

Features

Specification

Dimensions (unit:mm)

該非判定結果報告書 Download

SDS Download

Accessories and Consumables

Instruction Manuals and Specifications Download

Applications Download

Technical drawings Download

Technical Data Download

Features

Specification

Dimensions (unit:mm)