Cryo Pump CRYO-U10HSP
ULVAC CRYOGENICS
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CRYO-U series is a cryopump that uses a two-stage type GM cryocooler, and It is capable of high vacuum pumping.
A wide range of products from small- to large-type are available according to the applications including FPD, semiconductors, electronic equipment, optics, and R&D.
A wide range of products from small- to large-type are available according to the applications including FPD, semiconductors, electronic equipment, optics, and R&D.
Features
- Optimal for sputtering applications
- Argon capacity is 2 times of existing model (U10H).
- Extended intervals between regenerations means higher tool availability.
- Multiple connections (up to 3) can be made.
Specification
| Pumping speeds(20℃) | Nitrogen | L/s | 2,400 |
| Hydrogen | 3,600 | ||
| Argon | 2,000 | ||
| Water | 6,900 | ||
| Ultimate pressure | Pa(Torr) | 10-7(10-9) | |
| Maximum flow rate | Argon | Pa・L/s(Torr・L/s) | 1.30×103(9.8) |
| Pumping speed | Argon | Pa・L(Torr・L) | 2.0×108(1.5×106) |
| 1.2×106(9.0×103) | |||
| Cooldown time (Power cycles) |
min(Hz) | 120/110(50/60) | |
| Mounting flange | UVG-250,10BANSI | ||
| compressor unit | C15T | ||
| Weight | Kg | 36.0 | |
*Maintenance interval：16,000 hours
*Moveable base is option
Dimensions (mm)
