CRYO-U10HSP

アルバック・クライオ

CRYO-U series is a cryopump that uses a two-stage type GM cryocooler, and It is capable of high vacuum pumping.
A wide range of products from small- to large-type are available according to the applications including FPD, semiconductors, electronic equipment, optics, and R&D.

Features

Optimal for sputtering applications
Argon capacity is 2 times of existing model (U10H).
Extended intervals between regenerations means higher tool availability.
Multiple connections (up to 3) can be made.

Specification

Pumping speeds(20℃)	Nitrogen	L/s	2,400
	Hydrogen		3,600
	Argon		2,000
	Water		6,900
Ultimate pressure	Pa(Torr)		10^-7(10^-9)
Maximum flow rate	Argon	Pa・L/s(Torr・L/s)	1.30×10³(9.8)
Pumping speed	Argon	Pa・L(Torr・L)	2.0×10⁸(1.5×10⁶)
Pumping speed		Pa・L(Torr・L)	1.2×10⁶(9.0×10³)
Cooldown time (Power cycles)	min(Hz)		120/110(50/60)
Mounting flange			UVG-250,10^BANSI
compressor unit			C15T
Weight		Kg	36.0

*Maintenance interval：16,000 hours
*Moveable base is option

Dimensions (mm)

該非判定結果報告書 Download

SDS Download

Accessories and Consumables

Cryo Pump

Regeneration Gas Purge PR Unit PR1A Regeneration Gas Purge PR Unit PR2A Regeneration Gas Purge PR Unit PR3A Band Heater RBH-6 Band Heater RBH-8 Band Heater RBH-8HSP Band Heater RBH-10 Band Heater RBH-12 Band Heater RBH-16 Band Heater RBH-20 Band Heater RBH-22 Band Heater BH-22P Band Heater RBH-30

CRYO-U10HSP

Features

Specification

Dimensions (mm)

該非判定結果報告書 Download

SDS Download

Accessories and Consumables

Instruction Manuals and Specifications Download

Applications Download

Technical drawings Download

Technical Data Download

Features

Specification

Dimensions (mm)