Cryo Pump CRYO-U20P
ULVAC CRYOGENICS
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CRYO-U series is a cryopump that uses a two-stage type GM cryocooler, and It is capable of high vacuum pumping.
A wide range of products from small- to large-type are available according to the applications including FPD, semiconductors, electronic equipment, optics, and R&D.
A wide range of products from small- to large-type are available according to the applications including FPD, semiconductors, electronic equipment, optics, and R&D.
Features
- Suitable for large deposition systems and other production equipment.
- Suitable for batch type large deposition systems.
Specification
| Pumping speeds(20℃) | Nitrogen | L/s | 10,000 |
| Hydrogen | 18,000 | ||
| Argon | 8,400 | ||
| Water | 29,000 | ||
| Ultimate pressure | Pa(Torr) | 10-7(10-9) | |
| Maximum flow rate | Argon | Pa・L/s(Torr・L/s) | 1.1×103(8.7) |
| Pumping capacity | Argon | Pa・L(Torr・L) | 5.8×108(4.4×106) |
| Hydrogen | 4.6×106(3.4×104) | ||
| Cooldown time (Power cycle) |
min(Hz) | 180/160(50/60) | |
| Mounting flange | UVG-500 | ||
| Compressor unit | C30VRT | ||
| Weight | Kg | 69.0 | |
*Maintenanc e interval：16,000 hours
Dimension (Unit:mm)
