Cryo Pump CRYO-U4H
ULVAC CRYOGENICS
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CRYO-U series is a cryopump that uses a two-stage type GM cryocooler, and It is capable of high vacuum pumping.
A wide range of products from small- to large-type are available according to the applications including FPD, semiconductors, electronic equipment, optics, and R&D.
A wide range of products from small- to large-type are available according to the applications including FPD, semiconductors, electronic equipment, optics, and R&D.
Features
- Excellent pumping performance for a 4-inch cryopump
- High pumping speed improves the pumping efficiency and productivity.
- Ideal for sputtering process of semiconductor manufacturing, or other small scale equipments
- Up to four units can be run by one compressor.
- Customized design is available to fit your needs.
Specification
| Pumping speed20℃) | Nitrogen | L/s | 450 |
| Hydrogen | 500 | ||
| Argon | 370 | ||
| Water | 1,100 | ||
| Ultimate pressure | Pa | 10-7 | |
| Maximum flow rate | Argon | Pa・L/s | 1.3×103 |
| Pumping capacity | Argon | Pa・L | 1.0×107 |
| Hydrogen | 1.5×105 | ||
| Cooldown time | min(50/60Hz) | 45/50 | |
| Weight | Kg | 14.5 | |
Dimensions (unit:mm)
