Cryo Pump RBH-22P
ULVAC CRYOGENICS
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This product is easy to install and can shorten the time of regeneration certainly.
It promotes the evaporation of the moisture that is exhausted and helps to shorten the time of temperature rise and roughing time when the cryopump regenerates.
It promotes the evaporation of the moisture that is exhausted and helps to shorten the time of temperature rise and roughing time when the cryopump regenerates.
Features
The RBH can minimize warm up time, promote water evaporation and shorten roughing time. By using the RBH band heater, regeneration can be performed effectively and completely.
Installation in the cryopump is easily done, even in a narrow space.
Specification
| Type | Cryopump model | External dimension(mm) | Current(A) | Fuse | |
| Max | Normal | （A) | |||
| RBH-6 | U6H | 170×495 | 1.3 | 0.2 | 5 |
| RBH-8 | U8H | 170×650 | 1.5 | 0.4 | 5 |
| U8H-U | |||||
| RBH-8HSP | U8HSP | 170×790 | 2.7 | 0.4 | 5 |
| RBH-10 | U10H | 170×850 | 2.7 | 0.4 | 5 |
| RBH-12 | U12H | 190×940 | 2.9 | 0.6 | 5 |
| U12HSP | |||||
| RBH-16 | U16 | 260×1,290 | 5.0 | 0.9 | 10 |
| U16P | |||||
| RBH-20 | U20P | 260×1,665 | 7.5 | 1.5 | 10 |
| U20H | |||||
| RBH-22P | U22P | 320×1,900 | 8.3 | 1.7 | 20 |
| RBH-22 | U22H | 302×1,900 | 11.5 | 2.0 | 20 |
| RBH-30 | U30H | 320×2,525 | 14.6 | 2.7 | 30 |
Voltage:AC200V、single phase 50/60Hz（usable with AC100V）
