Cryo Pump Model: CRYO-U10H
ULVAC CRYOGENICS
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Features
Running costs can be lowered by multiple operation (two units)
For experimental equipments and medium-size production facilities.
Specification
| Pumping speeds(20℃) | Nitrogen | L/s | 2,400 |
| Hydrogen | 3,600 | ||
| Argon | 2,000 | ||
| Water | 6,900 | ||
| Ultimate pressure | Pa(Torr) | 10-7(10-9) | |
| Maximum flow rate | Argon | Pa・L/s(Torr・L/s) | 8.0×102(6.0) |
| Pumping capacity | Argon | Pa・L(Torr・L) | 1.0×108(7.8×105) |
| Hydrogen | 6.7×105(5.0×103) | ||
| Cooldown time (Power cycles) |
min(Hz) | 110/100(50/60) | |
| Mounting flange | UVG-250 | ||
| Compressor unit | C15R | ||
| weight | Kg | 29.0 | |
*Maintenance interval：16,000 hours
*Moveable base is option
