Cryo Pump
CRYO-U10H
アルバック・クライオ
Features
Running costs can be lowered by multiple operation (two units)
For experimental equipments and medium-size production facilities.
Specification
Pumping speeds(20℃) | Nitrogen | L/s | 2,400 |
Hydrogen | 3,600 | ||
Argon | 2,000 | ||
Water | 6,900 | ||
Ultimate pressure | Pa(Torr) | 10-7(10-9) | |
Maximum flow rate | Argon | Pa・L/s(Torr・L/s) | 8.0×102(6.0) |
Pumping capacity | Argon | Pa・L(Torr・L) | 1.0×108(7.8×105) |
Hydrogen | 6.7×105(5.0×103) | ||
Cooldown time (Power cycles) |
min(Hz) | 110/100(50/60) | |
Mounting flange | UVG-250 | ||
Compressor unit | C15R | ||
weight | Kg | 29.0 |
*Maintenance interval:16,000 hours
*Moveable base is option
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Accessories and Consumables
Instruction Manuals and Specifications Download
Applications Download
Technical drawings Download
Technical Data Download
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Cryopumps
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Vacuum gauge - Selection guide
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CRYOPUMP - Usage instructions
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Cryopump - Safety Instructions
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Cryopump - Trouble shooting
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Cryopumps - Seven key points for maintenance
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Launch of Cryogenic trap using a helium refrigerator to replace CFC substitute cold trap
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World's Largest Cryopump ( 52 type) starts operation at the satellite equipment test site
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Rapid low-temperature regeneration ... Reduction of regeneration time
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Applications and examples of effective use of Super Traps