C30VR

アルバック・クライオ

This product is necessary to operate the cryopump.
Compressed helium gas is sent to a refrigerator, and high-temperature helium gas that is returned from the refrigerator is cooled and circulated.

Specification

Voltage（ACV×Φ×Hz）	200×3×50 220×3×60
Power KW（50/60Hz）	5.0/6.0
Cooling method water flow rate（L/min）(20℃)	Water cool 5.5
Weight（Kg）	127

*Adsorber replacement cycle：24,000 hours
*Cooling water inlet/ outlet　Rc 3/8

Dimensions (mm)

該非判定結果報告書 Download

SDS Download

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C30VR

Specification

Dimensions (mm)

該非判定結果報告書 Download

SDS Download

Accessories and Consumables

Instruction Manuals and Specifications Download

Applications Download

Technical drawings Download

Technical Data Download

Specification

Dimensions (mm)