Cryo Pump C30VR
ULVAC CRYOGENICS
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This product is necessary to operate the cryopump.
Compressed helium gas is sent to a refrigerator, and high-temperature helium gas that is returned from the refrigerator is cooled and circulated.
Compressed helium gas is sent to a refrigerator, and high-temperature helium gas that is returned from the refrigerator is cooled and circulated.
Specification
| Voltage（ACV×Φ×Hz） | 200×3×50 220×3×60 |
| Power KW（50/60Hz） | 5.0/6.0 |
| Cooling method water flow rate（L/min）(20℃) | Water cool 5.5 |
| Weight（Kg） | 127 |
*Adsorber replacement cycle：24,000 hours
*Cooling water inlet/ outlet Rc 3/8
Dimensions (mm)
