C40R

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This product is necessary to operate the cryopump.
Compressed helium gas is sent to a refrigerator, and high-temperature helium gas that is returned from the refrigerator is cooled and circulated.

Specification

Power supply（ACV×Φ×Hz）	200×3×50 220×3×60
Power KW（50/60Hz）	6.5/8.0
Cooling method Water flow rate（L/min）(20℃)	5.5
Weight（Kg）	130

*Cooling water inlet/outlet Rc 3/8

Dimensions (mm)

該非判定結果報告書 Download

SDS Download

Accessories and Consumables

Cryo Pump

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Instruction Manuals and Specifications Download

Applications Download

Technical drawings Download

Technical Data Download

Cryopumps
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CRYOPUMP - Usage instructions
Cryopump - Safety Instructions
Cryopump - Trouble shooting
Cryopumps - Seven key points for maintenance
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World's Largest Cryopump ( 52 type) starts operation at the satellite equipment test site
Rapid low-temperature regeneration ... Reduction of regeneration time
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