Cryo Pump C40R
ULVAC CRYOGENICS
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This product is necessary to operate the cryopump.
Compressed helium gas is sent to a refrigerator, and high-temperature helium gas that is returned from the refrigerator is cooled and circulated.
Compressed helium gas is sent to a refrigerator, and high-temperature helium gas that is returned from the refrigerator is cooled and circulated.
Specification
| Power supply（ACV×Φ×Hz） | 200×3×50 220×3×60 |
| Power KW（50/60Hz） | 6.5/8.0 |
| Cooling method Water flow rate（L/min）(20℃) | 5.5 |
| Weight（Kg） | 130 |
*Cooling water inlet/outlet Rc 3/8
Dimensions (mm)
