Cryo Pump CRYO-U6H
ULVAC CRYOGENICS
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CRYO-U series is a cryopump that uses a two-stage type GM cryocooler, and It is capable of high vacuum pumping.
A wide range of products from small- to large-type are available according to the applications including FPD, semiconductors, electronic equipment, optics, and R&D.
A wide range of products from small- to large-type are available according to the applications including FPD, semiconductors, electronic equipment, optics, and R&D.
Features
- Light-weight and compact. Our smallest standard product.
- Suitable for small vacuum systems in the laboratory.
- Multiple operation (up to 3 units)
- Ultra-high vacuum (10-8Pa or lower)
Specification
| Pumping speed(20℃) | Nitrogen | L/s | 750 |
| Hydrogen | 1,100 | ||
| Argon | 620 | ||
| Water | 2,100 | ||
| Ultimate pressure | Pa(Torr) | 10-7(10-9) | |
| Maximum flow rate | Argon | Pa・L/s(Torr・L/s) | 1.1×103(7.9) |
| Pumping capacity | Argon | Pa・L(Torr・L) | 5.6×107(4.2×105) |
| Hydrogen | 3.1×105(2.3×103) | ||
| Cooldown time (Power cycles) | min(Hz) | 80/70(50/60) | |
| Mounting flange | UVG-150,UFC-203 | ||
| compressor unit | C10T,C10AT | ||
| Weight | Kg | 19 | |
*Maintenance interval：16,000 hours
Dimensions (unit:mm)
