Cryo Pump

RBH-16

アルバック・クライオ

This product is easy to install and can shorten the time of regeneration certainly.
It promotes the evaporation of the moisture that is exhausted and helps to shorten the time of temperature rise and roughing time when the cryopump regenerates.

Features

The RBH can minimize warm up time, promote water evaporation and shorten roughing time. By using the RBH band heater, regeneration can be performed effectively and completely.
Installation in the cryopump is easily done, even in a narrow space.

Standard specification

Type	Cryopump model	External dimension (mm)	Current(A)		Fuse
			Max	Normal	（A)
RBH-6	U6H	170×495	1.3	0.2	5
RBH-8	U8H	170×650	1.5	0.4	5
	U8H-U
RBH-8HSP	U8HSP	170×790	2.7	0.4	5
RBH-10	U10H	170×850	2.7	0.4	5
RBH-12	U12H	190×940	2.9	0.6	5
	U12HSP
RBH-16	U16	260×1,290	5.0	0.9	10
	U16P
RBH-20	U20P	260×1,665	7.5	1.5	10
	U20H
RBH-22P	U22P	320×1,900	8.3	1.7	20
RBH-22	U22H	302×1,900	11.5	2.0	20
RBH-30	U30H	320×2,525	14.6	2.7	30

Voltage:AC200V、single phase 50/60Hz（usable with AC100V）

該非判定結果報告書 Download

SDS Download

Accessories and Consumables

Cryo Pump

Regeneration Gas Purge PR Unit PR1A Regeneration Gas Purge PR Unit PR2A Regeneration Gas Purge PR Unit PR3A Band Heater RBH-6 Band Heater RBH-8 Band Heater RBH-8HSP Band Heater RBH-10 Band Heater RBH-12 Band Heater RBH-16 Band Heater RBH-20 Band Heater RBH-22 Band Heater BH-22P Band Heater RBH-30

RBH-16

Features

Standard specification

該非判定結果報告書 Download

SDS Download

Accessories and Consumables

Instruction Manuals and Specifications Download

Applications Download

Technical drawings Download

Technical Data Download

Features

Standard specification