CRYO-U8HL

アルバック・クライオ

CRYO-U series is a cryopump that uses a two-stage type GM cryocooler, and It is capable of high vacuum pumping.
A wide range of products from small- to large-type are available according to the applications including FPD, semiconductors, electronic equipment, optics, and R&D.

Features

Completely compatible with CTI cryopump CT-8.
Hydrogen emission characteristics are superior to CT-8
Multiple operation (up to 3 units)

Specifications

Pumping speeds(20℃)	Nitrogen	L/s	1,700
	Hydrogen		2,700
	Argon		1,400
	Water		4,000
Ultimate pressure	Pa(Torr)		10^-7(10^-9)
Maximum flow rate	Argon	Pa・L/s(Torr・L/s)	1.2×10³(8.9)
Pumping capacity	Argon	Pa・L(Torr・L)	1.0×10⁸(7.6×10⁵)
Pumping capacity	Hydrogen	Pa・L(Torr・L)	1.0×10⁶(7.6×10³)
Cooldown time (Power cycle)	min(Hz)		100/90(50/60)
Mounting flange			UVG-200,6^BANSI,UFC-253
Compressor unit			C10T,C10AT
Weight		Kg	20.8

*Maintenance intervals：16,000 hours

該非判定結果報告書 Download

SDS Download

Accessories and Consumables

Cryo Pump

Regeneration Gas Purge PR Unit PR1A Regeneration Gas Purge PR Unit PR2A Regeneration Gas Purge PR Unit PR3A Band Heater RBH-6 Band Heater RBH-8 Band Heater RBH-8HSP Band Heater RBH-10 Band Heater RBH-12 Band Heater RBH-16 Band Heater RBH-20 Band Heater RBH-22 Band Heater BH-22P Band Heater RBH-30

CRYO-U8HL

Features

Specifications

該非判定結果報告書 Download

SDS Download

Accessories and Consumables

Instruction Manuals and Specifications Download

Applications Download

Technical drawings Download

Technical Data Download

Features

Specifications