Cryo Pump CRYO-U8HL
ULVAC CRYOGENICS
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CRYO-U series is a cryopump that uses a two-stage type GM cryocooler, and It is capable of high vacuum pumping.
A wide range of products from small- to large-type are available according to the applications including FPD, semiconductors, electronic equipment, optics, and R&D.
A wide range of products from small- to large-type are available according to the applications including FPD, semiconductors, electronic equipment, optics, and R&D.
Features
- Completely compatible with CTI cryopump CT-8.
- Hydrogen emission characteristics are superior to CT-8
- Multiple operation (up to 3 units)
Specifications
| Pumping speeds(20℃) | Nitrogen | L/s | 1,700 |
| Hydrogen | 2,700 | ||
| Argon | 1,400 | ||
| Water | 4,000 | ||
| Ultimate pressure | Pa(Torr) | 10-7(10-9) | |
| Maximum flow rate | Argon | Pa・L/s(Torr・L/s) | 1.2×103(8.9) |
| Pumping capacity | Argon | Pa・L(Torr・L) | 1.0×108(7.6×105) |
| Hydrogen | 1.0×106(7.6×103) | ||
| Cooldown time (Power cycle) |
min(Hz) | 100/90(50/60) | |
| Mounting flange | UVG-200,6BANSI,UFC-253 | ||
| Compressor unit | C10T,C10AT | ||
| Weight | Kg | 20.8 | |
*Maintenance intervals：16,000 hours
