Cryo Pump CRYO-U22WB
ULVAC CRYOGENICS
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CRYO-U series is a cryopump that uses a two-stage type GM cryocooler, and It is capable of high vacuum pumping.
A wide range of products from small- to large-type are available according to the applications including FPD, semiconductors, electronic equipment, optics, and R&D.
A wide range of products from small- to large-type are available according to the applications including FPD, semiconductors, electronic equipment, optics, and R&D.
Specifications
| Pumping speeds(20℃) | Nitrogen | L/s | 13,000 |
| Hydrogen | 16,500 | ||
| Argon | 11,000 | ||
| Water | 39,000 | ||
| Ultimate pressure | Pa(Torr) | 10-7 (10-9) | |
| Maximum flow | Argon | Pa・L/s(Torr・L/s) | 3.5×103 (26) |
| Pumping capacity | Argon | Pa・L(Torr・L) | 8.1×108 (6.1×106) |
| Hydrogen | 8.5×106 (6.4×104) | ||
| Cooldown time (Power cycles) |
min(Hz) | 165/150 (50/60) | |
| Mounting flange | UVG-550 | ||
| Compressor unit | C30PMVRT×1 | ||
| Weight | Kg | 125.0 | |
*Maintenance interval：16,000 hours
Dimensions (mm)
