Cryo Pump CRYO-U22P
ULVAC CRYOGENICS
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CRYO-U series is a cryopump that uses a two-stage type GM cryocooler, and It is capable of high vacuum pumping.
A wide range of products from small- to large-type are available according to the applications including FPD, semiconductors, electronic equipment, optics, and R&D.
A wide range of products from small- to large-type are available according to the applications including FPD, semiconductors, electronic equipment, optics, and R&D.
Specification
| Pumping speed(20℃) | Nitrogen | L/s | 11,500 |
| Hydrogen | 14,000 | ||
| Argon | 9,700 | ||
| Water | 39,000 | ||
| Ultimate pressure | Pa(Torr) | 10-7 (10-9) | |
| Maximum flow | Argon | Pa・L/s(Torr・L/s) | 1.7×103 (12.8) |
| Pumping capacity | Argon | Pa・L(Torr・L) | 5.8×108 (4.4×106) |
| Hydrogen | 6.0×106 (4.5×104) | ||
| Cooldown time (Power recycle) |
min(Hz) | 180/170 (50/60) | |
| Mounting flange | UVG-550 | ||
| Compressor unit | C30PVRT | ||
| Weight | Kg | 115.0 | |
*Maintenance interval：16,000 hours
Dimensions (mm)
