CRYO-U22P

アルバック・クライオ

CRYO-U series is a cryopump that uses a two-stage type GM cryocooler, and It is capable of high vacuum pumping.
A wide range of products from small- to large-type are available according to the applications including FPD, semiconductors, electronic equipment, optics, and R&D.

Specification

Pumping speed(20℃)	Nitrogen	L/s	11,500
	Hydrogen		14,000
	Argon		9,700
	Water		39,000
Ultimate pressure	Pa(Torr)		10^-7(10^-9)
Maximum flow	Argon	Pa・L/s(Torr・L/s)	1.7×10³(12.8)
Pumping capacity	Argon	Pa・L(Torr・L)	5.8×10⁸(4.4×10⁶)
Pumping capacity	Hydrogen	Pa・L(Torr・L)	6.0×10⁶(4.5×10⁴)
Cooldown time (Power recycle)	min(Hz)		180/170 (50/60)
Mounting flange			UVG-550
Compressor unit			C30PVRT
Weight		Kg	115.0

*Maintenance interval：16,000 hours

Dimensions (mm)

該非判定結果報告書 Download

SDS Download

Accessories and Consumables

Cryo Pump

Regeneration Gas Purge PR Unit PR1A Regeneration Gas Purge PR Unit PR2A Regeneration Gas Purge PR Unit PR3A Band Heater RBH-6 Band Heater RBH-8 Band Heater RBH-8HSP Band Heater RBH-10 Band Heater RBH-12 Band Heater RBH-16 Band Heater RBH-20 Band Heater RBH-22 Band Heater BH-22P Band Heater RBH-30

CRYO-U22P

Specification

Dimensions (mm)

該非判定結果報告書 Download

SDS Download

Accessories and Consumables

Instruction Manuals and Specifications Download

Applications Download

Technical drawings Download

Technical Data Download

Specification

Dimensions (mm)