Turbo Molecular Pump Model: VPT-060
ULVAC
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A dry, compact, high-vacuum exhaust system in which the necessary equipment such as turbo molecular pump, dry vacuum pump, valve piping, and electrical system are compactly configured in a base frame.
Suitable for clean vacuum environment in semiconductor, analysis, inspection, science and chemistry, and pharmaceutical fields.
Suitable for clean vacuum environment in semiconductor, analysis, inspection, science and chemistry, and pharmaceutical fields.
Features
- It is a completely dry exhaust unit.
- The Setup space is compact.
Specification
| 50Hz | 60Hz | |
|---|---|---|
| Ultimate pressure | 10-5 Pa | |
| Weight | 17 kg | |
| Inlet flange | ISO63（Option：KF-40） | |
| Ambient temperature | 8 - 38 ℃ | |
| External dimensions | 340 mm(W) × 340 mm(L) × 355 mm(H) | |
| RoHS directive | ✓ | |
*Depending on the conditions of use, performance may be degraded.
Dimension drawing
