UTM-MS

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New Product

This is a turbomolecular pump with a separate controller that uses magnetic bearings.We have a lineup of models with pumping speeds of 300 to 4000 L/s. The controller unit can monitor the operating status and supports various communication standards.

Features

Separated pump body and controller
The controller can monitor the operating status and support various communication standards.
Free mounting direction
Free mounting direction makes the system design flexible.
Pumping speed 300L/s to 4000L/s class lineup
Pump rotation variable from 25% to 100%
Enabling the pressure adjustment in a chamber by changing the rotation speed.
High durability and safety
Safety confirmation tests are passed, such as air rushing-in test and touch down test.

Applications

Main vacuum pumping system for equipment
- Semiconductor equipmen
- Evaporator,Sputtering syste
- Analytical equipment,Experimental device and etc.
Main vacuum pumping system for the light processes that do not generate side reaction products.
General use for high vacuum evacuation system.

Specifications

Table 1

Model			UTM300A-MS		UTM400A-MS		UTM800A-MS		UTM1000A-MS
Inlet port			VG100 / ICF152		VG150 / ICF203				VG200 / ICF253
Outlet port			KF25				KF40
Cooling method			Water cooling	Air cooling	Water cooling	Air cooling	Water cooling	Air cooling	Water cooling	Air cooling
Ultimate pressure *1		Pa	10^-7				10^-8
Pumping speed *2	N2	L/s	320		420		800		1080
	Ar	L/s	ー
	He	L/s	340		360		800		930
	H2	L/s	320		340		700		790
Compression rate	N2		1×10⁹
	He		8×10⁴
	H2		1×10⁴				4×10³
Max inlet pressure *3		Pa	200	1.3	200	1.3	400	1.3	400	1.3
Max outlet pressure *3		Pa	400	40	400	40	665	40	665	40
Rotation speed		rpm	45000				35000
Start-up time			5minutes or less
Mounting position			In any desired direction
Surface treatment			Nickel plating
Cooling water	Flow rate	L/min	1～3	ー	1～3	ー	1～3	ー	1～3	ー
	Pressure	MPaG	02～0.5	ー	02～0.5	ー	02～0.5	ー	02～0.5	ー
Noise		dB(A)	60
Weight		kg	14				33		32
Recommended backing pump			200L/minor more				500L/minor more
Controller	Composition		Separate type
	Input electric power		Single phase AC200 〜240V ±10%（ 50/60Hz ±2Hz）
	Max power		0.55				1.0
	Speed variation		Speed is variable between 25% and 100% of the rated speed.（ set as 0.1%）
	Communication		Contact
			Serial：RS-232C / RS-485
	Weight	kg	8

*1：digit number is expressed.
*2：Without a protective net.
*3：Max inlet pressure and Max outlet pressure cannot be satisfied at same time.

Table 2

Model			UTM1300A-MS	UTM1500A-MS	UTM2400A-MS	UTM3400A-MS	UTM4300A-MS
Inlet port			VG200 / ICF253	VG250		VG300 / VG350	VG350
Outlet port			KF40
Cooling method			Water cooling
Ultimate pressure *1		Pa	10^-7
Pumping speed *2	N2	L/s	1300	1500	2100	3200	4400
	Ar	L/s	ー		2000	3100	4200
	He	L/s	1050	1200	2240	3100	ー
	H2	L/s	750	800	1770	2200	2600
Compression rate	N2		6×10⁸		1×10⁹
	He		1×10⁴		7×10⁴	1×10⁵	3×10⁴
	H2		1×10³		3×10³	6×10³	2×10³
Max inlet pressure *3		Pa	133		40
Max outlet pressure *3		Pa	270		270
Rotation speed		rpm	30300		27000	27600	24000
Start-up time			7minutes or less		11minutes or less	12minutes or less	18minutes or less
Mounting position			In any desired direction
Surface treatment			Nickel plating
Cooling water	Flow rate	L/min	1～3		2～4
	Pressure	MPaG	02～0.5
Noise		dB(A)	60		57	60
Weight		kg	39	42	70	84	105
Recommended backing pump			600L/minor more		1300L/minor more	1500L/minor more
Controller	Composition		Separate type
	Input electric power		Single phase AC200 〜240V ±10%（ 50/60Hz ±2Hz）
	Max power		1.0		1.5
	Speed variation		Speed is variable between 25% and 100% of the rated speed.（ set as 0.1%）
	Communication		Contact
			Serial：RS-232C / RS-485
	Weight	kg	8

*1：digit number is expressed.
*2：Without a protective net.
*3：Max inlet pressure and Max outlet pressure cannot be satisfied at same time.

該非判定結果報告書 Download

SDS Download

Accessories and Consumables

Instruction Manuals and Specifications Download

Applications Download

Technical drawings Download

Technical Data Download

Features

Separated pump body and controller
The controller can monitor the operating status and support various communication standards.

Free mounting direction
Free mounting direction makes the system design flexible.

Pumping speed 300L/s to 4000L/s class lineup

Pump rotation variable from 25% to 100%
Enabling the pressure adjustment in a chamber by changing the rotation speed.

High durability and safety
Safety confirmation tests are passed, such as air rushing-in test and touch down test.

Specifications

Table 1

Model			UTM300A-MS		UTM400A-MS		UTM800A-MS		UTM1000A-MS
Inlet port			VG100 / ICF152		VG150 / ICF203				VG200 / ICF253
Outlet port			KF25				KF40
Cooling method			Water cooling	Air cooling	Water cooling	Air cooling	Water cooling	Air cooling	Water cooling	Air cooling
Ultimate pressure *1		Pa	10^-7				10^-8
Pumping speed *2	N2	L/s	320		420		800		1080
	Ar	L/s	ー
	He	L/s	340		360		800		930
	H2	L/s	320		340		700		790
Compression rate	N2		1×10⁹
	He		8×10⁴
	H2		1×10⁴				4×10³
Max inlet pressure *3		Pa	200	1.3	200	1.3	400	1.3	400	1.3
Max outlet pressure *3		Pa	400	40	400	40	665	40	665	40
Rotation speed		rpm	45000				35000
Start-up time			5minutes or less
Mounting position			In any desired direction
Surface treatment			Nickel plating
Cooling water	Flow rate	L/min	1～3	ー	1～3	ー	1～3	ー	1～3	ー
	Pressure	MPaG	02～0.5	ー	02～0.5	ー	02～0.5	ー	02～0.5	ー
Noise		dB(A)	60
Weight		kg	14				33		32
Recommended backing pump			200L/minor more				500L/minor more
Controller	Composition		Separate type
	Input electric power		Single phase AC200 〜240V ±10%（ 50/60Hz ±2Hz）
	Max power		0.55				1.0
	Speed variation		Speed is variable between 25% and 100% of the rated speed.（ set as 0.1%）
	Communication		Contact
			Serial：RS-232C / RS-485
	Weight	kg	8

*1：digit number is expressed.
*2：Without a protective net.
*3：Max inlet pressure and Max outlet pressure cannot be satisfied at same time.

Table 2

Model			UTM1300A-MS	UTM1500A-MS	UTM2400A-MS	UTM3400A-MS	UTM4300A-MS
Inlet port			VG200 / ICF253	VG250		VG300 / VG350	VG350
Outlet port			KF40
Cooling method			Water cooling
Ultimate pressure *1		Pa	10^-7
Pumping speed *2	N2	L/s	1300	1500	2100	3200	4400
	Ar	L/s	ー		2000	3100	4200
	He	L/s	1050	1200	2240	3100	ー
	H2	L/s	750	800	1770	2200	2600
Compression rate	N2		6×10⁸		1×10⁹
	He		1×10⁴		7×10⁴	1×10⁵	3×10⁴
	H2		1×10³		3×10³	6×10³	2×10³
Max inlet pressure *3		Pa	133		40
Max outlet pressure *3		Pa	270		270
Rotation speed		rpm	30300		27000	27600	24000
Start-up time			7minutes or less		11minutes or less	12minutes or less	18minutes or less
Mounting position			In any desired direction
Surface treatment			Nickel plating
Cooling water	Flow rate	L/min	1～3		2～4
	Pressure	MPaG	02～0.5
Noise		dB(A)	60		57	60
Weight		kg	39	42	70	84	105
Recommended backing pump			600L/minor more		1300L/minor more	1500L/minor more
Controller	Composition		Separate type
	Input electric power		Single phase AC200 〜240V ±10%（ 50/60Hz ±2Hz）
	Max power		1.0		1.5
	Speed variation		Speed is variable between 25% and 100% of the rated speed.（ set as 0.1%）
	Communication		Contact
			Serial：RS-232C / RS-485
	Weight	kg	8

*1：digit number is expressed.
*2：Without a protective net.
*3：Max inlet pressure and Max outlet pressure cannot be satisfied at same time.