VPC-051|Vacuum Pumping System|High Vacuum Pump|Products|ULVAC SHOWCASE

Vacuum Pumping System

VPC-051

アルバック機工

VPC series / Oil diffusion pump (air cooling) + Oil rotary vacuum pump

It is a small type high vacuum pumping system that necessary parts are compactly placed in a pipe-framed stand.
It is easy to handle, maintain, and suitable for experiment.

Features

  • Installation in a little space is possible by compact size at a table type.
  • The vacuum chamber can be opened without stopping the main pump.
  • Cooling water of an oil diffusion pump is unnecessary because of an air cooling type.

Specification

 Models VPC-051
Ultimate pressure
7.0×10-4Pa
1.5×10-4Pa(LN2)
Main pump
Oil diffusion pump(air cooling) 50 L/sec
Backing pump
Oil Rotary pump 20 L/min
Main valve
25A Butterfly valve
Sub valve
Three way valve
Inlet flange
VG-25
Weight
20kg
External dimensions (W×D×H)
350mm(W)×320mm(D)×461mm(H)
Ionization vacuum gauge ? Pirani vacuum gauge ? LN cold trap ? Conversion flange ? Oil mist trap are options.

 Models VPC-051
Power required
Single phase 100V 0.63kVA
Ground terminal
D grade (ground resistance/100MΩ or less)
Connection
Vinyl cabtyre cable (with a plug) 2m

Oil diffusion pump

ph_dpf050.jpg

Model DPF-050
Ultimate pressure 10-5Pa
Maximum evacuation capacity 50L/sec
Critical back-pressure 13Pa
Required power Single phase 100V 0.25kW
Recommended oil SY 20cc
Weight 1.8kg
Inlet flange VG-25
Outlet flange Φ14mm
Cooling method
Air cooling

Dimension drawing

zu_vpc051.gif

Exhaust System Drawing

zu_vpc051_haiki.gif

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Instruction Manuals and Specifications Download

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