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Vacuum Pumping System
VTS-350M/X
アルバック機工
DEPOX series / Turbo molecular pump + Scroll pump
It is the small high vacuum pumping system which stored compactly required apparatus, such as a main pump, backing pump, valve piping, an electric system, and a pressure measurement port, in the mount.
DEPOX series is preparing four types with which the composition of an exhaust system differs.
Handling is easy and ideal for an experiment.
DEPOX series is preparing four types with which the composition of an exhaust system differs.
Handling is easy and ideal for an experiment.
Features
- The vacuum chamber can be opened without stopping the main pump.
- Maintenance is easy, because it is made of few parts included a three way valve.
- Improved system scalability by using new rack which can install optional items such as vacuum gauge.
- It is easily moving vacuum pumping system with casters.
- The safety of the installation can be secured with adjusters.
Specification
|
Model
|
VTS-350M/X |
|
Ultimate pressure
|
10-４Pa 10-５Pa（LN2) |
|
Main pump
|
Turbo molecular pump(air cooling) 345 L/sec |
|
Backing pump
|
Scroll pump 250 L/min |
|
Main valve
|
100A Butterfly valve |
|
Sub valve
|
Three way valve |
|
Inlet flange
|
VG-100 |
|
Weight
|
135kg |
|
External dimensions （W×D×H）
|
730mm(W)×584mm(D)×804mm(H) |
|
※Ionization vacuum gauge ? Pirani vacuum gauge ? LN cold trap ? Conversion flange ? Oil mist trap are options.
|
Utility
|
Model
|
VTS-350M/X |
|
Power required
|
Single phase 100V 0.9kVA |
|
Ground terminal
|
D grade （ground resistance/100MΩ or less） |
|
Connection
|
Vinyl cabtyre cable (with R3.5-4 ring tongue terminals) 4m |
Dimension drawing
Exhaust System Drawing
