Vacuum Pumping System Model: VTS-350M/X
ULVAC KIKO
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It is the small high vacuum pumping system which stored compactly required apparatus, such as a main pump, backing pump, valve piping, an electric system, and a pressure measurement port, in the mount.
"Model:VTS-350M/X"is preparing four types with which the composition of an exhaust system differs.
Handling is easy and ideal for an experiment.
"Model:VTS-350M/X"is preparing four types with which the composition of an exhaust system differs.
Handling is easy and ideal for an experiment.
Features
- The vacuum chamber can be opened without stopping the main pump.
- Maintenance is easy, because it is made of few parts included a three way valve.
- Improved system scalability by using new rack which can install optional items such as vacuum gauge.
- It is easily moving vacuum pumping system with casters.
- The safety of the installation can be secured with adjusters.
Specification
| Model | VTS-350M/X |
| Ultimate pressure | 10-４Pa |
| 10-５Pa（LN2) | |
| Main pump | Turbo molecular pump(air cooling) 345 L/sec |
| Backing pump | Scroll pump 250 L/min |
| Main valve | 100A Butterfly valve |
| Sub valve | Three way valve |
| Inlet flange | VG-100 |
| Weight | 135kg |
| External dimensions （W×D×H） | 730mm(W)×584mm(D)×804mm(H) |
|
※Ionization vacuum gauge ? Pirani vacuum gauge ? LN cold trap ? Conversion flange ? Oil mist trap are options.
|
Utility
| Model | VTS-350M/X |
| Power required | Single phase 100V 0.9kVA |
| Ground terminal | D grade （ground resistance/100MΩ or less） |
| Connection | Vinyl cabtyre cable (with R3.5-4 ring tongue terminals) 4m |
Dimension drawing
Exhaust System Drawing
