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Vacuum Pumping System
VFR-200M/X
アルバック機工
It is the small high vacuum pumping system which stored compactly required apparatus, such as a main pump, backing pump, valve piping, an electric system, and a pressure measurement port, in the mount.
DEPOX series is preparing four types with which the composition of an exhaust system differs.
Handling is easy and ideal for an experiment.
DEPOX series is preparing four types with which the composition of an exhaust system differs.
Handling is easy and ideal for an experiment.
Features
- The vacuum chamber can be opened without stopping the main pump.
- Maintenance is easy, because it is made of few parts included a three way valve.
- Improved system scalability by using new rack which can install optional items such as vacuum gauge.
- Cooling water of an oil diffusion pump is unnecessary because of an air cooling type.
- It is easily moving vacuum pumping system with casters.
- The safety of the installation can be secured with adjusters.
Specification
|
Model
|
VFR-200M/X |
|
Ultimate pressure
|
10-４Pa 10-５Pa（LN2) |
|
Main pump
|
Oil diffusion pump(air cooling) 200 L/sec |
|
Backing pump
|
Oil Rotary pump 100 L/min |
|
Main valve
|
65A Butterfly valve |
|
Sub valve
|
Three way valve |
|
Inlet flange
|
VG-65 |
|
Weight
|
120kg |
|
External dimensions （W×D×H）
|
730mm(W)×584mm(D)×804mm(H) |
|
※Ionization vacuum gauge ? Pirani vacuum gauge ? LN cold trap ? Conversion flange ? Oil mist trap are options.
|
Utility
| Model | VFR-200M/X |
|
Power required
|
Single phase 100V 1.4kVA |
|
Ground terminal
|
D grade （ground resistance/100MΩ or less） |
|
Connection
|
Vinyl cabtyre cable (with R3.5-4 ring tongue terminals) 4m |
Oil diffusion pump
| Model | DPF-200 |
|
Ultimate pressure
|
10-5Pa |
|
Maximum evacuation capacity
|
200L/sec |
|
Critical back-pressure
|
20Pa |
|
Required power
|
Single phase 100V 0.45kW |
|
Recommended oil
|
SX 70cc |
|
Weight
|
5kg |
|
Inlet flange
|
VG-65 |
|
Outlet flange
|
Φ27mm |
|
Cooling method
|
Air cooling |
Dimension drawing
Exhaust System Drawing
