Vacuum Pumping System Model: VFR-200M/X
ULVAC KIKO
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It is the small high vacuum pumping system which stored compactly required apparatus, such as a main pump, backing pump, valve piping, an electric system, and a pressure measurement port, in the mount.
"Model:VFR-200M/X" is preparing four types with which the composition of an exhaust system differs.
Handling is easy and ideal for an experiment.
"Model:VFR-200M/X" is preparing four types with which the composition of an exhaust system differs.
Handling is easy and ideal for an experiment.
Features
- The vacuum chamber can be opened without stopping the main pump.
- Maintenance is easy, because it is made of few parts included a three way valve.
- Improved system scalability by using new rack which can install optional items such as vacuum gauge.
- Cooling water of an oil diffusion pump is unnecessary because of an air cooling type.
- It is easily moving vacuum pumping system with casters.
- The safety of the installation can be secured with adjusters.
Specification
| Model | VFR-200M/X |
| Ultimate pressure | 10-４Pa |
| 10-５Pa（LN2) | |
| Main pump | Oil diffusion pump(air cooling) 200 L/sec |
| Backing pump | Oil Rotary pump 100 L/min |
| Main valve | 65A Butterfly valve |
| Sub valve | Three way valve |
| Inlet flange | VG-65 |
| Weight | 120kg |
| External dimensions （W×D×H） | 730mm(W)×584mm(D)×804mm(H) |
※Ionization vacuum gauge ? Pirani vacuum gauge ? LN cold trap ? Conversion flange ? Oil mist trap are options.
Utility
| Model | VFR-200M/X |
| Power required | Single phase 100V 1.4kVA |
| Ground terminal | D grade （ground resistance/100MΩ or less） |
| Connection | Vinyl cabtyre cable (with R3.5-4 ring tongue terminals) 4m |
Oil diffusion pump
| Model | DPF-200 |
| Ultimate pressure | 10-5Pa |
| Maximum evacuation capacity | 200L/sec |
| Critical back-pressure | 20Pa |
| Required power | Single phase 100V 0.45kW |
| Recommended oil | SX 70cc |
| Weight | 5kg |
| nlet flange | VG-65 |
| Outlet flange | Φ27mm |
| Cooling method | Air cooling |
Dimension drawing
Exhaust System Drawing
