Vacuum Pumping System Model:VFR-200M/X
ULVAC KIKO
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It is the small high vacuum pumping system which stored compactly required apparatus, such as a main pump, backing pump, valve piping, an electric system, and a pressure measurement port, in the mount.
"Model:VFR-200M/X" is preparing four types with which the composition of an exhaust system differs.
Handling is easy and ideal for an experiment.
"Model:VFR-200M/X" is preparing four types with which the composition of an exhaust system differs.
Handling is easy and ideal for an experiment.
Features
- The vacuum chamber can be opened without stopping the main pump.
- Maintenance is easy, because it is made of few parts included a three way valve.
- Improved system scalability by using new rack which can install optional items such as vacuum gauge.
- Cooling water of an oil diffusion pump is unnecessary because of an air cooling type.
- It is easily moving vacuum pumping system with casters.
- The safety of the installation can be secured with adjusters.
Specification
|
Model
|
VFR-200M/X |
|
Ultimate pressure
|
10-４Pa 10-５Pa（LN2) |
|
Main pump
|
Oil diffusion pump(air cooling) 200 L/sec |
|
Backing pump
|
Oil Rotary pump 100 L/min |
|
Main valve
|
65A Butterfly valve |
|
Sub valve
|
Three way valve |
|
Inlet flange
|
VG-65 |
|
Weight
|
120kg |
|
External dimensions （W×D×H）
|
730mm(W)×584mm(D)×804mm(H) |
|
※Ionization vacuum gauge ? Pirani vacuum gauge ? LN cold trap ? Conversion flange ? Oil mist trap are options.
|
Utility
| Model | VFR-200M/X |
|
Power required
|
Single phase 100V 1.4kVA |
|
Ground terminal
|
D grade （ground resistance/100MΩ or less） |
|
Connection
|
Vinyl cabtyre cable (with R3.5-4 ring tongue terminals) 4m |
Oil diffusion pump
| Model | DPF-200 |
|
Ultimate pressure
|
10-5Pa |
|
Maximum evacuation capacity
|
200L/sec |
|
Critical back-pressure
|
20Pa |
|
Required power
|
Single phase 100V 0.45kW |
|
Recommended oil
|
SX 70cc |
|
Weight
|
5kg |
|
Inlet flange
|
VG-65 |
|
Outlet flange
|
Φ27mm |
|
Cooling method
|
Air cooling |
Dimension drawing
Exhaust System Drawing
