BW-52

アルバック

This product prevents the backflow of oil vapor from the oil diffusion pump to the intake side.

Features

For preventing inside of vacuum chamber from the oil steam contamination from the oil diffusion pump.
It is designed to minimize exhaust resistance.
By setting the adapter for BW-04B and BW-06B, volume of the oil stem backflow volume can be suppressed additionally.

Specifications

Model		BW-02	BW-04B	BW-06B	BW-10	BW-14	BW-20	BW-22	BW-36	BW-52
Conductance [L/sec]		100	940	2200	3130	5000	13000	14000	54000	75000
Dimensions [mm]	D	φ120	φ149	φ199	φ350	φ450	φ625	φ680	φ1065	φ1480
	T	16	28	28	44	50	152	101	113	165
	t	16	25	25	22	22	24	26	28	35
Water connections		Rc 1/8	Rc 1/4	Rc 1/4	Rc 1/4	Rc 3/8	Rc 3/8	Rc 3/8	Rc 3/8	Rc 1/2
Water capacity [L/min]		1.5	0.7	1	2	2	3	3	5	5
Weight[kg]		1	1.3	1.7	7.6	11	22	28	66	200

該非判定結果報告書 Download

SDS Download

Accessories and Consumables

Oil Diffusion Ejector Pump

Water Cooled Baffle BW-02 Water Cooled Baffle BW-04B Water Cooled Baffle BW-06B Water Cooled Baffle BW-10 Water Cooled Baffle BW-14 Water Cooled Baffle BW-20 Water Cooled Baffle BW-22 Water Cooled Baffle BW-36 Water Cooled Baffle BW-52

Instruction Manuals and Specifications Download

Applications Download

Technical drawings Download

Technical Data Download

Specifications

Model		BW-02	BW-04B	BW-06B	BW-10	BW-14	BW-20	BW-22	BW-36	BW-52
Conductance [L/sec]		100	940	2200	3130	5000	13000	14000	54000	75000
Dimensions [mm]	D	φ120	φ149	φ199	φ350	φ450	φ625	φ680	φ1065	φ1480
	T	16	28	28	44	50	152	101	113	165
	t	16	25	25	22	22	24	26	28	35
Water connections		Rc 1/8	Rc 1/4	Rc 1/4	Rc 1/4	Rc 3/8	Rc 3/8	Rc 3/8	Rc 3/8	Rc 1/2
Water capacity [L/min]		1.5	0.7	1	2	2	3	3	5	5
Weight[kg]		1	1.3	1.7	7.6	11	22	28	66	200