Oil Diffusion Ejector Pump Model:BW-22
ULVAC
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This product prevents the backflow of oil vapor from the oil diffusion pump to the intake side.
Features
- For preventing inside of vacuum chamber from the oil steam contamination from the oil diffusion pump.
- It is designed to minimize exhaust resistance.
- By setting the adapter for BW-04B and BW-06B, volume of the oil stem backflow volume can be suppressed additionally.
Specifications
| Model | BW-02 | BW-04B | BW-06B | BW-10 | BW-14 | BW-20 | BW-22 | BW-36 | BW-52 | ||
| Conductance [L/sec] | 100 | 940 | 2200 | 3130 | 5000 | 13000 | 14000 | 54000 | 75000 | ||
| Dimensions [mm] | D | φ120 | φ149 | φ199 | φ350 | φ450 | φ625 | φ680 | φ1065 | φ1480 | |
| T | 16 | 28 | 28 | 44 | 50 | 152 | 101 | 113 | 165 | ||
| t | 16 | 25 | 25 | 22 | 22 | 24 | 26 | 28 | 35 | ||
| Water connections | Rc 1/8 | Rc 1/4 | Rc 1/4 | Rc 1/4 | Rc 3/8 | Rc 3/8 | Rc 3/8 | Rc 3/8 | Rc 1/2 | ||
| Water capacity [L/min] |
1.5 | 0.7 | 1 | 2 | 2 | 3 | 3 | 5 | 5 | ||
| Weight[kg] | 1 | 1.3 | 1.7 | 7.6 | 11 | 22 | 28 | 66 | 200 | ||
