Introduction of vacuum equipments manufactured by ULVAC Group.
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The CRTM series of crystal deposition controllers are products developed based on a wealth of experience. In particular, the CRTM-R1 series employs a unique "Impedance method" to improve film thickness measurement performance. This allows for a more stable deposition process and provides high-quality deposition. For organic processes, the use of the dedicated CRTM-R1-EL machine allows for long-term stable deposition.
Pump Type
Deposition-Controller
The CRTM series of crystal deposition controllers are products developed based on a wealth of experience. In particular, the CRTM-R1 series employs a unique "Impedance method" to improve film thickness measurement performance. This allows for a more stable deposition process and provides high-quality deposition. For organic processes, the use of the dedicated CRTM-R1-EL machine allows for long-term stable deposition.
Deposition-Controller
CRTM-R1
New Product
ULVAC has developed the new quartz crystal deposition controllers based on our longtime experience and technologies. Contributes to improved quality and reliability in vapor deposition processes.
Deposition-Controller
CRTM-R1-EL
New Product
CRTM-R1-EL is a crystal deposition monitor optimized for the organic EL deposition process. New measurement method provides excellent resolution and rate stability.
Deposition-Controller
CRTM-6000G
The CRTM-6000G is a deposition controller with excellent cost / performance features.
Unit offer a wide depostion control range for single as well as multilayer films.
Single Sensor
The single sensor of the CRTS series of crystal deposition controller sensors is designed to maximize the cooling efficiency of the crystal. In addition, the structure allows the crystal to be easily replaced without the use of tools, significantly reducing maintenance time. This improves the efficiency and reliability of the deposition process and supports stable operation.
Single Sensor
CRTS-0
This product is a sensor for CRTM series. We offer a wide range of sensors for various deposition equipment.
Single Sensor
CRTS-0 + Cooling Waterjacket
This product is a sensor for CRTM series. We offer a wide range of sensors for various deposition equipment.
Single Sensor
CRTS-4
This product is a sensor for CRTM series. We offer a wide range of sensors for various deposition equipment.
Single Sensor
CRTS-6
This product is a sensor for CRTM series. We offer a wide range of sensors for various deposition equipment.
Single Sensor
CRTS-4U
This product is a sensor for CRTM series. We offer a wide range of sensors for various deposition equipment.
Single Sensor
CRTS-6U
This product is a sensor for CRTM series. We offer a wide range of sensors for various deposition equipment.
Multi Sensor
The multi-sensor of the CRTS series of crystal deposition controller sensors can be equipped with multiple crystals, significantly reducing maintenance time. A highly reliable vacuum stepping motor is used to switch between crystals, enabling highly accurate switching. Multi-sensors are used in organic deposition and optical deposition, allowing automatic switching during continuous deposition. This improves the efficiency and accuracy of the deposition process and supports stable production.
Multi Sensor
CRTS-M6
The rotary type multi-sensor "CRTS-M6" has been developed for the crystal oscillation type deposition controller "CRTM Series" .The 5MHz or 6MHz crystal is 6 pieces-mountable in the rotary type crystal holder.It can be used in such as a high rate vapor deposition and continuous multi-layer vapor deposition with safe.
Multi Sensor
CRTS-12NS
The rotary type multi-sensor "CRTS-12NS" has been developed for the crystal oscillation type deposition controller "CRTM Series".The 5MHz crystal is 12 pieces-mountable in the rotary type crystal holder. It can be used in such as a high rate vapor deposition and continuous multi-layer vapor deposition with safe.
Quartz Crystal
The UCR series crystals are ideal for accurate film thickness measurement because they minimize the effects of heat sources such as evaporation sources and have little individual variation. For organic materials, we use a 4MHz crystal manufactured with our own patented technology to support low-rate control. This enables precise film formation processes and contributes to quality improvement.
Quartz Crystal
UCR-4MAG-12
Crystal quartz plate・UCR Series for sensors for crystal oscillation type deposition controller of ULVAC.
The 4MHz frequency specification was added to the product lineup for the first time in the world, and it has excellent temperature characteristics and can be used for organic material films.
Quartz Crystal
UCR-5MAU-12
Crystal quartz plate・UCR Series for sensors for crystal oscillation type deposition controller of ULVAC.
Quartz Crystal
UCR-5MAG-12
Crystal quartz plate・UCR Series for sensors for crystal oscillation type deposition controller of ULVAC.
Quartz Crystal
UCR-6MAU-12
Crystal quartz plate・UCR Series for sensors for crystal oscillation type deposition controller of ULVAC.
Option
This is a measurement CTM for the CRTM-R1 series of crystal deposition controllers, a CRTM Manager that allows easy setting and measurement by connecting a PC and the CRTM-R1 series with a cable, and an oscillator for oscillating the crystal unit for the CRTM-6000G.
Option
CRTM Manager
This is measurement software exclusively for crystal deposition controllers (CRTM-R1/CRTM-R1-EL).
If you install the software on a PC and connect it to the CRTM main unit with a cable, you can check the measurement data on the PC.
In addition, settings created on the PC can also be transferred to the main unit.
Option
CTM-EL-D,CTM outer cable (Only for CRTM-R1-EL)
Dedicated to crystal deposition controller CRTM-R1-EL.（Cannot be used for other models）Connect with 2 CRTS sensor to perform measurement.
2 sensors are automatically switched for measurement.
(Simultaneous measurement with 2 sensors is not possible.)
Comes with CTM-EL-D, 2 auxiliary cable (0.5m) and 1 outer cable (select from 4m/8m/12m/16m/20m)
Option
CTM-EL,CTM outer cable (Only for CRTM-R1-EL)
Dedicated to crystal deposition monitor CRTM-R1-EL.（Cannot be used for other models）Connect with CRTS sensor to perform measurement.
Comes with CTM-EL, 1 auxiliary cable (0.5m) and 1 outer cable (select from 4m/8m/12m/16m/20m)
Option
CTM-D,CTM outer cable (Only for CRTM-R1)
Dedicated to crystal deposition controller CRTM-R1.（Cannot be used for other models）Connect with 2 CRTS sensor to perform measurement.
2 sensors are automatically switched for measurement.
(Simultaneous measurement with 2 sensors is not possible.)
Comes with CTM-D, 2 auxiliary cable (0.5m) and 1 outer cable (select from 4m/8m/12m/16m/20m)
Option
CTM,CTM outer cable (Only for CRTM-R1)
Dedicated to crystal deposition controller CRTM-R1.（Cannot be used for other models）Connect with CRTS sensor to perform measurement.
Comes with CTM, 1 auxiliary cable (0.5m) and 1 outer cable (select from 4m/8m/12m/16m/20m)
Option
OSC-12BG
This is an oscillator and cable that connect to a crystal oscillation type deposition controller CRTM series. （Cannot be used for CRTM-R1 series)
Comes with OSC-12BG, 1 auxiliary cable (0.15m) and 1 outer cable (select from 4m/8m/12m/16m/20m)
Option
OSC-12DG
This is an oscillator and cable that connect to a crystal oscillation type deposition controller CRTM series. （Cannot be used for CRTM-R1 series)
Comes with OSC-12DG, 1 auxiliary cable (0.15m) and 1 outer cable and oscillator control cable(select from 4m/8m/12m/16m/20m)