Multi Sensor CRTS-12NS
ULVAC
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The rotary type multi-sensor "CRTS-12NS" has been developed for the crystal oscillation type deposition controller "CRTM Series".The 5MHz crystal is 12 pieces-mountable in the rotary type crystal holder. It can be used in such as a high rate vapor deposition and continuous multi-layer vapor deposition with safe.
Features
- 12 pieces of crystals are mountable.
- Having adopted a vacuum stepping motor in the drive section, this is designed to focus on reliability and durability in top priority, including precisely controlling the stop position of the crystal too.
- The replacement of crystal is detachable together with the crystal holder.
- In case the life of crystal (abnormal oscillation) is detected, it is automatically switched to next crystal by the signal from the controller(CRTM).
Applications
- High rate, multi-layer deposition control for Optical, OrganicEL, Electric devices.
Specifications
| Sensor head | |
| Equipped crystal number | 12 pieces |
| Capacity of crystal | 4MHz,5MHz AT cut crystal |
| Heat resistance temperature | 350C° |
| Cooling water volume | 1L / min |
| Weight | 2kg |
| Dimension | Φ104mm x H Approx. 61mm |
| Controller | |
| Digital input | INIT, CNT, STOP |
| Digital output | Sensor No., BUSY, ERROR, RETRY, END |
| Utility | DC24V, 3.0A |
| Dimension W×D×H | 100mm x 250mm x 99mm |
