For a wide range of applications, from simple deposition monitoring to film thickness control
Deposition-Controller CRTM-6000G
ULVAC
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The CRTM-6000G is a deposition controller with excellent cost / performance features.
Unit offer a wide depostion control range for single as well as multilayer films.
Unit offer a wide depostion control range for single as well as multilayer films.
Features
- Two sensors can be switched for deposition control.
(The simultaneous measurement cannot be done. It is a switch type.) - Low rate deposition process control is possible with high resolution of film thickness.
- Excellent response is obtained with a sampling rate of 125 ms.
- Up to 99 deposition programs can be stored with battery backup.
- Memory of the controller can record up to 30 process sequences.
- RS232C interface is included as standard. Control from a PC is therefore simple.
- The 12ch digital input/output signals is programmable.
- The 3ch analog output signals (Power, Rate, Thickness) is programmable.
- Up to 3 steps can be input for pre-heating and rate control for more precise control.
Applications
- Film thickness and deposition rate control during evaporation.
Specifications
| Film thickness/rate resolution | 0.041 A (5 MHz) 0.029 A (6 MHz) |
| Film thickness display range / display resolution/td> | 0.000～99.99 μm(0.000～999.9 kÅ) |
| Deposition rate display range / display resolution | 0.01～99.99 nm/s(0.1～999.9 Å/s) |
| Supported sensor frequency | 5MHz, 6MHz |
| Number of sensors that can be attached |
Single sensor:：2(The simultaneous measurement cannot be done. It is a switch type. ) |
| Sampling rate | 125ms |
| Number of multilayer film layers supported | 99 layers |
| Number of deposition programs | 99 |
| Digital I/O | Input : 12channels programmable Output : 12channels programmable |
| Analog outputs | 3ch programmable |
| External dimensions W×D×H | 240mm x 350mm x 99mm |
