Stable film formation is achieved with the new Impedance measurement method!
Deposition-Controller CRTM-R1
ULVAC
For more information on ULVAC products, purchase, and/or consideration, click here.
New Product
ULVAC has developed the new quartz crystal deposition controllers based on our longtime experience and technologies. Contributes to improved quality and reliability in vapor deposition processes.
Features
- Excellent rate stability and resolution make it suitable for low rate control.
- Ability value (CI value) measurement function improves crystal anomaly detection.
- Simultaneous vapor deposition control of up to 8 sources is possible. (add option)
- Communication method supports Ethernet and RS-232C.
- Various log data can be saved. Data can be transferred to USB and analyzed on a PC.
Apprication
Thickness and rate control for vapor deposition of metal thin film or optical thin film
Specifications
| Frequency | Measurement range | 4.00 to 3.00MHz @4MHz 5.00 to 3.50MHz @5MHz 6.00 to 4.50MHz @6MHz |
| Measurement resolution | 1mHz | |
| Display resolution | 1mHz | |
| Deposition rate | Measurement range *1 | 0.000 to 999.9Å/s (0 to 99.99nm/s) |
| Measurement resolution *2 | 0.0028Å/s @4MHz 0.0018Å/s @5MHz 0.0012Å/s @6MHz |
|
| Display resolution *1 | 0.001Å/s | |
| Film thickness | Measurement range *1 | 0.000 to 9999kÅ (0 to 999.9μm) |
| Measurement resolution *2 | 0.0028Å @4MHz 0.0018Å @5MHz 0.0012Å @6MHz |
|
| Display resolution *1 | 0.001kÅ | |
| Sensor frequency | 4MHz, 5MHz, 6MHz | |
| Number of sensors that can be installed (single) | 2 (Optionally a set of 2 sensors can be added, up to 8 sensors.) | |
| Number of sensors that can be installed (multi) | 2 (Optionally a set of 2 sensors can be added, up to 8 sensors.) | |
| Sampling rate | 100msec | |
| Number of deposition programs | 999 | |
| Number of Process programs | 99 | |
| Digital input point | 14 (Optionally a set of 14 points can be added, up to 56 points.) | |
| Digital output point | 8 (Optionally a set of 8 points can be added, up to 32 points.) | |
| Analog output point | 2 (Optionally a set of 2 points can be added, up to 16 points.) | |
| Analog output range | -10 to +10V | |
| Communication method | Ether (1000BASE-T/100BASE-TX/10BASE-T) RS-232C USB (Type-B, for setting with dedicated software) |
|
| External dimensions (W x D x H) | CRTM-R1: Approx. 480 x 320 x 130mm CTM(-D): Approx. 80 x 152 x 53 mm |
|
| Weight (kg) | CRTM-R1: 5.3kg (up to 5.8kg with options installed) CTM(-D): 0.6 kg |
|
| Utility | AC 100 to 240V±10%, 50/60Hz | |
| Maximum Power Consumption | 150W | |
| Suitable Fuse | 250V 2.5A (2pcs of 5 x 20mm) | |
| IP Protection Class | IP20 | |
| Overvoltage Category | CAT.Ⅱ | |
| Altitude | 2000m or less above sea level | |
| Contamination level | 2 | |
| Operating environment | Temperature 5 to 40℃ Humidity 20 to 85%RH (no condensation) |
|
| Storage environment | Temperature -10 to 60℃ Humidity 20 to 85%RH (non-energizing, no condensation) |
|
| Warm-up time | Approx. 30 minutes | |
| Applicable standard | CE | |
* 1: This is the value when Tooling = 100 and Density = 1
* 2: This is the value that is converted frequency resolution with Tooling = 100 and Density = 1.
Option introduction
When using CRTM-R1, Requires options such as CTM(-D) and cables, CRTS sensors and feedthroughs.
Rate comparison between conventional CRTM and new CRTM-R1
CRTM-R1 is stable with low noise fluctuations.
【 New CRTM-R1 】
【 Conventional CRTM 】 
