Achieves overwhelming rate stability in organic deposition
Quartz Crystal UCR-4MAG-12
ULVAC
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Crystal quartz plate・UCR Series for sensors for crystal oscillation type deposition controller of ULVAC.
The 4MHz frequency specification was added to the product lineup for the first time in the world, and it has excellent temperature characteristics and can be used for organic material films.
The 4MHz frequency specification was added to the product lineup for the first time in the world, and it has excellent temperature characteristics and can be used for organic material films.
Features
- Specializes in organic material films. It is suitable for use while switching with a multi-sensor.
- Longer than 5 MHz frequency.
- Excellent temperature characteristics during film formation due to the least frequency change caused by radiant heat in the class.
- The dedicated case corresponding to multi-sensor CRTS-12NS makes it easy not to only take out quarts crystal one by one, but also replace 12 pcs of quartz crystals without any tools (Japanese Patent No. 6802937)
Applications
- Organic material film (OLED Panel)
Specifications
| Model | UCR-4MAG-12 | UCR-5MAU-12 | UCR-5MAG-12 | UCR-6MAU-12 |
| Surface pattern |  |
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 |
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| Frequency | 4MHz | 5MHz | 5MHz | 6MHz |
| Electrode | Ag | Au | Ag | Au |
| Surface finish | Mirror Finish | Standard | ||
| Diameter | φ12.4mm | φ14mm | ||
| Controller | CRTM-9200 CRTM-R1（ーEL） |
CRTM Series | ||
| Sensor | CRTS Series | 6MHz Sensor | ||
| Recommended Use |
Organic, Metal, Optical Film deposition |
Metal, Optical Film deposition | ||
| Case | Carousel type case (12pcs) | |||
